JP2005059128A5 - - Google Patents

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Publication number
JP2005059128A5
JP2005059128A5 JP2003291004A JP2003291004A JP2005059128A5 JP 2005059128 A5 JP2005059128 A5 JP 2005059128A5 JP 2003291004 A JP2003291004 A JP 2003291004A JP 2003291004 A JP2003291004 A JP 2003291004A JP 2005059128 A5 JP2005059128 A5 JP 2005059128A5
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JP
Japan
Prior art keywords
vibrator
electromechanical resonator
temperature
voltage
temperature sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003291004A
Other languages
English (en)
Japanese (ja)
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JP4487512B2 (ja
JP2005059128A (ja
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Publication date
Application filed filed Critical
Priority to JP2003291004A priority Critical patent/JP4487512B2/ja
Priority claimed from JP2003291004A external-priority patent/JP4487512B2/ja
Publication of JP2005059128A publication Critical patent/JP2005059128A/ja
Publication of JP2005059128A5 publication Critical patent/JP2005059128A5/ja
Application granted granted Critical
Publication of JP4487512B2 publication Critical patent/JP4487512B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003291004A 2003-08-11 2003-08-11 電気機械共振器およびその動作方法 Expired - Fee Related JP4487512B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003291004A JP4487512B2 (ja) 2003-08-11 2003-08-11 電気機械共振器およびその動作方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003291004A JP4487512B2 (ja) 2003-08-11 2003-08-11 電気機械共振器およびその動作方法

Publications (3)

Publication Number Publication Date
JP2005059128A JP2005059128A (ja) 2005-03-10
JP2005059128A5 true JP2005059128A5 (enExample) 2006-07-06
JP4487512B2 JP4487512B2 (ja) 2010-06-23

Family

ID=34368828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003291004A Expired - Fee Related JP4487512B2 (ja) 2003-08-11 2003-08-11 電気機械共振器およびその動作方法

Country Status (1)

Country Link
JP (1) JP4487512B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4945204B2 (ja) * 2006-09-08 2012-06-06 株式会社東芝 アクチュエータ
JP5105279B2 (ja) * 2007-10-12 2012-12-26 セイコーインスツル株式会社 発振子及び該発振子を有する発振器
JP5101410B2 (ja) * 2008-06-27 2012-12-19 セイコーインスツル株式会社 共振周波数可変ｍｅｍｓ振動子
JP5407765B2 (ja) * 2008-11-20 2014-02-05 富士通株式会社 発振器および半導体装置
JP5204354B1 (ja) 2011-06-09 2013-06-05 パナソニック株式会社 発振器

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