JP4483467B2 - Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in intermittent heavy cutting - Google Patents
Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in intermittent heavy cutting Download PDFInfo
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- 238000005520 cutting process Methods 0.000 title claims description 59
- 239000011195 cermet Substances 0.000 title claims description 40
- 239000011247 coating layer Substances 0.000 title claims description 28
- 239000010410 layer Substances 0.000 claims description 112
- 238000009826 distribution Methods 0.000 claims description 40
- 239000013078 crystal Substances 0.000 claims description 22
- 238000005259 measurement Methods 0.000 claims description 20
- 239000010936 titanium Substances 0.000 claims description 14
- 239000012298 atmosphere Substances 0.000 claims description 11
- 238000005229 chemical vapour deposition Methods 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000001887 electron backscatter diffraction Methods 0.000 claims description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 5
- 239000012495 reaction gas Substances 0.000 claims description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 60
- 239000000843 powder Substances 0.000 description 16
- 238000012360 testing method Methods 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- 229910001018 Cast iron Inorganic materials 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000000396 iron Nutrition 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 102200003959 rs11556986 Human genes 0.000 description 1
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- 239000004416 thermosoftening plastic Substances 0.000 description 1
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Description
この発明は、特に各種の鋼や鋳鉄などの被削材の断続切削加工を、高切り込みや高送りなどの重切削条件で行った場合にも、硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具（以下、被覆サーメット工具という）に関するものである。 The present invention exhibits excellent chipping resistance even when the cutting material such as various steels and cast irons is cut under heavy cutting conditions such as high cutting and high feed. The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool).
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層が、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、１〜１５μｍの平均層厚を有し、かつ化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム（以下、α型Ａｌ2Ｏ3層という）層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) The lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO). A Ti compound layer consisting of one or two or more layers of carbonitride oxide (hereinafter referred to as TiCNO) layers and having an overall average layer thickness of 3 to 20 μm,
(B) an aluminum oxide (hereinafter referred to as α-type Al 2 O 3 layer) layer in which the upper layer has an average layer thickness of 1 to 15 μm and has an α-type crystal structure in a chemical vapor deposited state;
There is known a coated cermet tool formed by vapor-depositing a hard coating layer composed of (a) and (b) above, and this coated cermet tool can be used for continuous cutting and intermittent cutting of various steels and cast irons, for example. It is well known to be used.
また、上記の被覆サーメット工具において、これの硬質被覆層の構成層は、一般に粒状結晶組織を有し、さらに、下部層であるＴｉ化合物層を構成するＴｉＣＮ層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、７００〜９５０℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は切削条件のうちの切り込みや送りをなどを高くした重切削条件で行われる傾向にあるが、上記の従来被覆サーメット工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを強い機械的衝撃が繰り返し付加される前記の重切削条件で断続切削加工を行うのに用いた場合には、硬質被覆層を構成するα型Ａｌ2Ｏ3層が十分な耐衝撃性を具備するものでないために、前記硬質被覆層にチッピング（微少欠け）が発生し易くなり、この結果比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting work. However, in the above-mentioned conventional coated cermet tool, there is no problem when it is used for continuous cutting or intermittent cutting under normal conditions such as steel or cast iron. When this is used to perform intermittent cutting under the above-mentioned heavy cutting conditions in which strong mechanical impact is repeatedly applied, the α-type Al 2 O 3 layer constituting the hard coating layer has sufficient impact resistance. Since it is not provided, chipping (slight chipping) easily occurs in the hard coating layer, and as a result, the service life is reached in a relatively short time.
そこで、本発明者等は、上述のような観点から、上記のα型Ａｌ2Ｏ3層が硬質被覆層の上部層を構成する被覆サーメット工具に着目し、特に前記α型Ａｌ2Ｏ3層の耐衝撃性向上を図るべく研究を行った結果、
下部層としてＴｉ化合物層を形成した後の工具基体の表面に、上部層としてのα型Ａｌ2Ｏ3層を蒸着形成するに際して、これの蒸着形成に先だって、例えば、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＡｌＣｌ3：３〜１０％、ＣＯ2：０．５〜３％、Ｃ2Ｈ4：０．０１〜０．３％、ＳＦ６：０．０１〜０．２％、Ｈ2：残り、
反応雰囲気温度：７５０〜９００℃、
反応雰囲気圧力：３〜１３ｋＰａ、
の低温条件で、Ａｌ2Ｏ3核を前記表面に分散分布した状態で形成し、この場合、走査型電子顕微鏡を用い、１００００倍の倍率で観察して、Ａｌ2Ｏ3核が平均値で５．１〜９２．５個／μｍ２の割合で分散分布するのが望ましく、ついで、装置内雰囲気を圧力：３〜１３ｋＰａのＡｒ雰囲気に変え、装置内温度を９３０〜１０５０℃に昇温した条件で前記Ａｌ2Ｏ3核に加熱処理を施した状態で、
硬質被覆層の上部層としてのα型Ａｌ2Ｏ3層を通常の条件で蒸着形成すると、この結果の前記加熱処理Ａｌ2Ｏ3核形成後に蒸着形成されたα型Ａｌ2Ｏ3層は、電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）に概略説明図で示される通り、工具基体表面と平行な表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用いて、前記測定範囲を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記従来α型Ａｌ2Ｏ3層は、（０００１）面の測定傾斜角の分布が０〜４５度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記Ａｌ2Ｏ3核形成のα型Ａｌ2Ｏ3層は、傾斜角区分の特定位置にシャープな最高ピークが現れ、このシャープな最高ピークは、前記Ａｌ2Ｏ3核の分布割合を変化させることによりグラフ横軸の傾斜角区分に現れる位置が変わること。
The present inventors have, from the viewpoint as described above, focuses on coated cermet tool α type the Al 2 O 3 layer described above constituting the upper layer of the hard coating layer, in particular the α-type the Al 2 O 3 layer As a result of research to improve the impact resistance of
When the α-type Al 2 O 3 layer as the upper layer is vapor-deposited on the surface of the tool base after the Ti compound layer is formed as the lower layer, prior to the vapor-deposition formation, for example, with a normal chemical vapor deposition apparatus ,
Reaction gas composition:% by volume, AlCl 3 : 3 to 10%, CO 2 : 0.5 to 3%, C 2 H 4 : 0.01 to 0.3%, SF 6 : 0.01 to 0.2 %, H 2 : remaining,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 3 to 13 kPa,
Under the low temperature condition, the Al 2 O 3 nuclei are formed in a state of being distributed and distributed on the surface. In this case, using a scanning electron microscope, the Al 2 O 3 nuclei are observed at an average value of 10,000 times. It is desirable to disperse and distribute at a rate of 5.1 to 92.5 / μm 2. Then, the atmosphere in the apparatus was changed to an Ar atmosphere having a pressure of 3 to 13 kPa, and the temperature in the apparatus was increased to 930 to 1050 ° C. In a state where the Al 2 O 3 nucleus is subjected to heat treatment under conditions,
When the α-type Al 2 O 3 layer as the upper layer of the hard coating layer is formed by vapor deposition under normal conditions, the α-type Al 2 O 3 layer formed by vapor deposition after the heat treatment Al 2 O 3 nucleation as a result is Using a field emission scanning electron microscope, a crystal having a hexagonal crystal lattice existing within a measurement range of a surface polished surface parallel to the tool substrate surface as shown in the schematic explanatory diagrams of FIGS. 1 (a) and 1 (b) Each particle is irradiated with an electron beam, and using an electron backscatter diffraction image apparatus, the measurement range is 0.1 μm / step at an interval of 0.1 μm / step with respect to the normal of the surface polished surface. An inclination angle formed by a normal line of a (0001) plane is measured, and among the measurement inclination angles, a measurement inclination angle within a range of 0 to 45 degrees is divided for each pitch of 0.25 degrees. If you have created a slope angle distribution graph that is an aggregation of the frequencies existing in the Conventional α-type the Al 2 O 3 layer, whereas show the unbiased inclination angle frequency distribution graph in the range of distribution of 0-45 degrees measurement angle of inclination (0001) plane, the Al 2 O 3 nuclei In the formed α-type Al 2 O 3 layer, a sharp maximum peak appears at a specific position of the tilt angle section, and this sharp maximum peak is changed on the horizontal axis of the graph by changing the distribution ratio of the Al 2 O 3 nuclei. The position that appears in the tilt angle section changes.
（ｂ）上記のＡｌ2Ｏ3核形成のα型Ａｌ2Ｏ3層は上記従来α型Ａｌ2Ｏ3層に比して著しく耐衝撃性の向上したものとなるので、これを硬質被覆層の上部層として蒸着形成してなる被覆サーメット工具は、特に断続切削加工を高切り込みや高送りなどの重切削条件で行うのに用いた場合にも、同じく前記従来α型Ａｌ2Ｏ3層を蒸着形成してなる従来被覆サーメット工具に比して、硬質被覆層が一段とすぐれた耐チッピング性を発揮するようになること。 (B) The α 2 Al 3 O 3 layer formed with Al 2 O 3 nuclei has significantly improved impact resistance as compared with the conventional α type Al 2 O 3 layer. The coated cermet tool formed by vapor deposition as the upper layer of the above-mentioned conventional α-type Al 2 O 3 layer is also used when the intermittent cutting process is performed under heavy cutting conditions such as high cutting and high feed. Compared to the conventional coated cermet tool formed by vapor deposition, the hard coating layer should exhibit superior chipping resistance.
（ｃ）試験結果によれば、上記加熱処理Ａｌ2Ｏ3核の分布割合を平均値で５．１〜９２．５個／μｍ２とすると、上記シャープな最高ピークが傾斜角区分の３９〜４３度の範囲内に現れると共に、３３〜４３度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜７３％の割合を占める傾斜角度数分布グラフを示すようになり、この結果の傾斜角度数分布グラフで３９〜４３度の範囲内に傾斜角区分の最高ピークが現れ、かつ３３〜４３度の範囲内に存在する度数割合が４５〜７３％の割合を占めるα型Ａｌ2Ｏ3層を硬質被覆層の上部層として、下部層のＴｉ化合物層と共存した状態で蒸着形成してなる被覆サーメット工具は、上記の従来被覆サーメット工具に比して、特に断続切削加工を重切削条件で行った場合に一段とすぐれた耐チッピング性を示し、長期に亘ってすぐれた切削性能を発揮するようになること。
以上（ａ）〜（ｃ）に示される研究結果を得たのである。
(C) According to the test results, when the distribution ratio of the heat-treated Al 2 O 3 nuclei is an average value of 5.1 to 92.5 / μm 2 , the sharpest peak is the inclination angle section of 39 to As shown in the slope angle distribution graph that appears in the range of 43 degrees and the sum of the frequencies that are in the range of 33 to 43 degrees occupies a ratio of 45 to 73 % of the entire frequency in the slope angle distribution graph. In the inclination angle distribution graph of this result, the highest peak of the inclination angle section appears in the range of 39 to 43 degrees, and the frequency ratio existing in the range of 33 to 43 degrees occupies a ratio of 45 to 73 %. The coated cermet tool formed by vapor deposition with the α-type Al 2 O 3 layer as the upper layer of the hard coating layer and coexisting with the lower Ti compound layer is particularly intermittent compared to the conventional coated cermet tool described above. Cutting with heavy cutting conditions It shows the more excellent chipping resistance in a case where Tsu, to come to exert a superior cutting performance over a long period of time.
The research results shown in (a) to (c) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された工具基体の表面に、
（ａ）下部層が、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、１〜１５μｍの平均層厚を有するα型Ａｌ 2 Ｏ 3 層、
以上（ａ）および（ｂ）で構成された硬質被覆層を形成してなる被覆サーメット工具において、
上記（ｂ）のα型Ａｌ 2 Ｏ 3 層を、
反応ガス組成：容量％で、ＡｌＣｌ 3 ：３〜１０％、ＣＯ 2 ：０．５〜３％、Ｃ 2 Ｈ 4 ：０．０１〜０．３％、ＳＦ ６ ：０．０１〜０．２％、Ｈ 2 ：残り、
反応雰囲気温度：７５０〜９００℃、
反応雰囲気圧力：３〜１３ｋＰａ、
の低温条件で化学蒸着形成し、かつ加熱処理を施したＡｌ 2 Ｏ 3 核を介して、α型Ａｌ 2 Ｏ 3 層の通常の形成条件に相当する条件で化学蒸着形成してなると共に、
電界放出型走査電子顕微鏡を用い、上記工具基体の表面と平行な表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用いて、前記測定範囲を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、３９〜４３度の範囲内の傾斜角区分に最高ピークが存在すると共に、３３〜４３度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜７３％の割合を占める傾斜角度数分布グラフを示すα型Ａｌ2Ｏ3層、
で構成してなる、硬質被覆層が断続重切削加工ですぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and on the surface of a tool base composed of a WC-based cemented carbide or TiCN-based cermet,
(A) a Ti compound layer in which the lower layer is composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, and has an overall average layer thickness of 3 to 20 μm,
(B) an α-type Al 2 O 3 layer whose upper layer has an average layer thickness of 1 to 15 μm ;
In the coated cermet tool formed by forming the hard coating layer composed of (a) and (b) above,
The α-type Al 2 O 3 layer of (b) above is
Reaction gas composition:% by volume, AlCl 3 : 3 to 10%, CO 2 : 0.5 to 3%, C 2 H 4 : 0.01 to 0.3%, SF 6 : 0.01 to 0.2 %, H 2 : remaining,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 3 to 13 kPa,
Chemical vapor deposition under low temperature conditions and chemical vapor deposition under conditions corresponding to normal formation conditions of the α-type Al 2 O 3 layer through the Al 2 O 3 nucleus subjected to heat treatment ,
Using a field emission scanning electron microscope, an electron beam is irradiated to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface parallel to the surface of the tool base, and an electron backscatter diffraction image device is formed. The measurement range is measured at an interval of 0.1 μm / step, and the inclination angle formed by the normal of the (0001) plane that is the crystal plane of the crystal grain is measured with respect to the normal of the surface-polished surface, In the inclination angle distribution graph formed by dividing the measurement inclination angles within the range of 0 to 45 degrees among the measurement inclination angles for each pitch of 0.25 degrees and totaling the frequencies existing in each section. The highest peak is present in the inclination angle section in the range of 39 to 43 degrees, and the total of the frequencies existing in the range of 33 to 43 degrees is a ratio of 45 to 73 % of the entire degrees in the inclination angle frequency distribution graph. Angle distribution graph occupying Α-type the Al 2 O 3 layer indicated,
The hard coating layer is characterized by a coated cermet tool that exhibits excellent chipping resistance in intermittent heavy cutting.
以下に、この発明の被覆サーメット工具の硬質被覆層の構成層において、上記の通りに数値限定した理由を説明する。
（ａ）下部層のＴｉ化合物層
Ｔｉ化合物層は、α型Ａｌ2Ｏ3層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層が高温強度向上に寄与するほか、工具基体とα型Ａｌ2Ｏ3層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性を向上させる作用を有するが、その平均層厚が３μｍ未満では、前記作用を十分に発揮させることができず、一方その平均層厚が２０μｍを越えると、特に高熱発生を伴なう高速切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚を３〜２０μｍと定めた。
Hereinafter, the reason why the constituent layers of the hard coating layer of the coated cermet tool of the present invention are numerically limited as described above will be described.
(A) Lower Ti compound layer The Ti compound layer exists as a lower layer of the α-type Al 2 O 3 layer, and the hard coating layer contributes to the improvement of the high temperature strength by the excellent high temperature strength possessed by itself. The substrate and the α-type Al 2 O 3 layer are firmly adhered to each other, thereby improving the adhesion of the hard coating layer to the tool substrate. However, when the average layer thickness is less than 3 μm, the above-described operation is sufficiently achieved. On the other hand, when the average layer thickness exceeds 20 μm, it becomes easy to cause thermoplastic deformation particularly in high-speed cutting with high heat generation, which causes uneven wear. Was determined to be 3 to 20 μm.
（ｂ）上部層のα型Ａｌ2Ｏ3層
上記の傾斜角度数分布グラフで、３３〜４３度の範囲内の傾斜角区分に最高ピークを示すα型Ａｌ2Ｏ3層は、Ａｌ2Ｏ3自体のもつ高硬度とすぐれた耐熱性に加えて、すぐれた耐衝撃性を有し、したがって、強い機械的衝撃が繰り返し付加される断続重切削加工で、上記の従来被覆サーメット工具の硬質被覆層を構成するα型Ａｌ2Ｏ3層に比して、一段とすぐれた耐チッピング性を発揮するが、その平均層厚が１μｍ未満では、所望のすぐれた耐摩耗性を十分に発揮させることができず、一方その平均層厚が１５μｍを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を１〜１５μｍと定めた。
(B) Upper α-type Al 2 O 3 layer In the above inclination angle number distribution graph, the α-type Al 2 O 3 layer showing the highest peak in the inclination angle section within the range of 33 to 43 degrees is the Al 2 O 3 in addition to the high hardness and excellent heat resistance possessed by itself, excellent have impact resistance, therefore, a strong mechanical shock intermittent heavy cutting that is repeatedly added, hard coating of the above-described conventional coated cermet tool Compared to the α-type Al 2 O 3 layer constituting the layer, the chipping resistance is further improved. However, if the average layer thickness is less than 1 μm, the desired excellent wear resistance can be sufficiently exhibited. On the other hand, if the average layer thickness exceeds 15 μm and becomes too thick, chipping tends to occur. Therefore, the average layer thickness was set to 1 to 15 μm.
（ｃ）加熱処理Ａｌ2Ｏ3核
この発明の被覆サーメット工具の硬質被覆層を構成するα型Ａｌ2Ｏ3層に関して、傾斜角度数分布グラフで最高ピークを示す傾斜角区分と加熱処理Ａｌ2Ｏ3核の分布割合との間には密接な関係があり、この場合試験結果によれば、前記加熱処理Ａｌ2Ｏ3核の分布割合を平均値で５．１〜９２．５個／μｍ２の範囲内で変化させると、最高ピークが３９〜４３度の範囲内の傾斜角区分に現れると共に、３３〜４３度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜７３％の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記加熱処理Ａｌ2Ｏ3核の分布割合が、５．１個／μｍ２未満では、これの上に蒸着形成されるα型Ａｌ2Ｏ3層の傾斜角度数分布グラフの３９〜４３度の範囲内に現れるピーク高さが不十分、すなわち、３３〜４３度の範囲内に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の４５％未満となってしまい、この場合上記の通り、前記α型Ａｌ2Ｏ3層に所望のすぐれた耐衝撃性を確保することができず、一方その分布割合が、９２．５個／μｍ２を越えると、最高ピークの現れる傾斜角区分が３９〜４３度の範囲から外れるようになることから、硬質被覆層を構成するＴｉ化合物層上に形成される前記加熱処理Ａｌ2Ｏ3核の分布割合を平均値で５．１〜９２．５個／μｍ２としたのである。
(C) Heat-treated Al 2 O 3 nucleus Regarding the α-type Al 2 O 3 layer constituting the hard coating layer of the coated cermet tool of the present invention, the tilt angle segment showing the highest peak in the tilt angle number distribution graph and the heat-treated Al 2 There is a close relationship between the distribution ratio of the O 3 nuclei, and in this case, according to the test results, the average distribution of the distribution ratio of the heat-treated Al 2 O 3 nuclei is 5.1 to 92.5 / μm. When the variation is within the range of 2 , the highest peak appears in the inclination angle section in the range of 39 to 43 degrees, and the total of the frequencies existing in the range of 33 to 43 degrees is the entire frequency in the inclination angle distribution graph. An inclination angle number distribution graph occupying a ratio of 45 to 73 % of the heat treatment Al 2 O 3 nuclei is less than 5.1 particles / μm 2 . inclination of α type the Al 2 O 3 layer is deposited formed thereon Insufficient peak height appearing in the range of 39 to 43 degrees of the frequency distribution graph, i.e., percentage of total power present in the range of 33-43 degrees, less than 45% of the total power at the inclination angle frequency distribution graph In this case, as described above, the desired excellent impact resistance cannot be ensured in the α-type Al 2 O 3 layer, while the distribution ratio exceeds 92.5 / μm 2 . Since the inclination angle section where the highest peak appears is out of the range of 39 to 43 degrees, the distribution ratio of the heat-treated Al 2 O 3 nuclei formed on the Ti compound layer constituting the hard coating layer is determined. The average value was 5.1 to 92.5 / μm 2 .
なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、必要に応じて硬質被覆層の最表面層として蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由からである。 In addition, for the purpose of identification before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer as necessary, but the average layer thickness in this case is It may be 0.1 to 1 μm, and if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient for an average layer thickness of up to 1 μm.
この発明被覆サーメット工具は、各種の鋼や鋳鉄などの切削加工を、強い機械的衝撃を伴なう断続切削加工を重切削条件で行うのに用いた場合にも、硬質被覆層の上部層を構成するα型Ａｌ2Ｏ3層が、Ａｌ2Ｏ3自身のもつすぐれた高温硬さと耐熱性による耐摩耗性に加えて、一段とすぐれた耐衝撃性を具備することから、すぐれた耐チッピング性を発揮し、使用寿命の一層の延命化を可能とするものである。 The coated cermet tool of the present invention can be used to cut various types of steel and cast iron, etc., when performing intermittent cutting with strong mechanical impact under heavy cutting conditions. The constituting α-type Al 2 O 3 layer has excellent impact resistance in addition to the excellent high temperature hardness and heat resistance of Al 2 O 3 itself, so it has excellent chipping resistance. The service life can be further extended.
つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。 Next, the coated cermet tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＶＣ粉末、Ｃｒ 3 Ｃ 2 粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１６０４１２に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ，Ｃ，Ｆをそれぞれ製造した。 As raw material powders, WC powder, VC powder, Cr 3 C 2 powder , and Co powder all having an average particle diameter of 1 to 3 μm are prepared, and these raw material powders are blended in the blending composition shown in Table 1, Further, wax was added and mixed in a ball mill in acetone for 24 hours, dried under reduced pressure, and then pressed into a green compact of a predetermined shape at a pressure of 98 MPa. The green compact was in a range of 1370 to 1470 ° C. in a vacuum of 5 Pa. Vacuum sintering under the condition of holding at a predetermined temperature for 1 hour, and after sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm to have a throwaway tip shape defined in ISO · CNMG160412 Tool bases A, C, and F made of WC-base cemented carbide were produced.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１６０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ，ｃ，ｄ，ｅを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a, c, d, and e made of TiCN-based cermet having a standard / CNMG 160412 chip shape were formed.
ついで、これらの工具基体Ａ，Ｃ，Ｆおよび工具基体ａ，ｃ，ｄ，ｅのそれぞれを、Ａｌ2Ｏ3核分布割合測定用試験片と共に、通常の化学蒸着装置に装入し、まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表４に示される目標層厚のＴｉ化合物層を硬質被覆層の下部層として蒸着形成し、ついで、
反応ガス組成：容量％で、ＡｌＣｌ3：６．５％、ＣＯ2：１．６％、Ｃ2Ｈ4：０．１３％、ＳＦ６：０．１２％、Ｈ2：残り、
反応雰囲気温度：８２０℃、
反応雰囲気圧力：８ｋＰａ、
の低温条件でＡｌ2Ｏ3核を形成した後、
装置内雰囲気を圧力：８ｋＰａのＡｒ雰囲気に変え、かつ装置内温度を１０００℃に昇温した条件で前記Ａｌ2Ｏ3核に加熱処理を施して加熱処理Ａｌ2Ｏ3核とし、
この時点で前記試験片を装置から取り出し、引続いて、同じく表３に示される条件で、同じく表４に示される目標層厚のα型Ａｌ2Ｏ3層を硬質被覆層の上部層として蒸着形成することにより本発明被覆サーメット工具１〜７をそれぞれ製造した。
Next, each of these tool bases A, C, F and tool bases a, c, d, e , together with Al 2 O 3 nucleus distribution ratio measurement specimens, was charged into a normal chemical vapor deposition apparatus. Table 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically long crystal structure described in JP-A-6-8010. Otherwise, the conditions for forming a normal granular crystal structure are shown. The Ti compound layer having the target layer thickness shown in Table 4 is deposited as a lower layer of the hard coating layer under the conditions shown in FIG.
Reaction gas composition:% by volume, AlCl 3 : 6.5%, CO 2 : 1.6%, C 2 H 4 : 0.13%, SF 6 : 0.12%, H 2 : remaining,
Reaction atmosphere temperature: 820 ° C.
Reaction atmosphere pressure: 8 kPa,
After forming Al 2 O 3 nuclei under low temperature conditions,
The device ambience pressure changed to an Ar atmosphere at 8 kPa, and the device temperature of the Al 2 O 3 nuclei heat treatment for heat-treatment Al 2 O 3 nuclei conditions the temperature was raised to 1000 ° C.,
At this time, the test piece is taken out from the apparatus, and subsequently an α-type Al 2 O 3 layer having the target layer thickness shown in Table 4 is deposited as an upper layer of the hard coating layer under the conditions shown in Table 3 as well. The coated cermet tools 1 to 7 of the present invention were produced by forming the respective cermet tools.
また、上記のＡｌ2Ｏ3核分布割合測定用試験片における加熱処理Ａｌ2Ｏ3核の分布割合については、走査型電子顕微鏡を用い、１００００倍の倍率で観察して、３μｍ×３μｍの範囲内に存在するＡｌ2Ｏ3核の数を任意箇所５ヶ所について測定し、この測定結果を表４に単位面積（μｍ２）当たりの平均値で示した。 The distribution ratio of the heat-treated Al 2 O 3 nuclei in the Al 2 O 3 nucleus distribution ratio measurement test piece was observed at a magnification of 10,000 using a scanning electron microscope, and the range was 3 μm × 3 μm. The number of Al 2 O 3 nuclei present inside was measured at five arbitrary locations, and the measurement results are shown in Table 4 as an average value per unit area (μm 2 ).
また、比較の目的で、表５に示される通り、硬質被覆層のα型Ａｌ2Ｏ3層を形成するに先だって、上記の加熱処理Ａｌ2Ｏ3核の形成を行なわない以外は同一の条件で従来被覆サーメット工具１〜７をそれぞれ製造した。 For comparison purposes, as shown in Table 5, the same conditions except that the above heat-treated Al 2 O 3 nuclei were not formed prior to forming the α-type Al 2 O 3 layer of the hard coating layer. Conventionally, coated cermet tools 1 to 7 were produced.
ついで、上記の本発明被覆サーメット工具と従来被覆サーメット工具の硬質被覆層を構成するα型Ａｌ2Ｏ3層について、電界放出型走査電子顕微鏡および電子後方散乱回折像装置を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記のα型Ａｌ2Ｏ3層の表面を上記工具基体の表面と平行な研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜核のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Next, with respect to the α-type Al 2 O 3 layer constituting the hard coating layer of the above-described coated cermet tool of the present invention and the conventional coated cermet tool, the number of tilt angles is measured using a field emission scanning electron microscope and an electron backscatter diffraction image apparatus. Each distribution graph was created.
That is, the inclination angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope with the surface of the α-type Al 2 O 3 layer being a polished surface parallel to the surface of the tool base. Irradiating the polished surface with an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees with an irradiation current of 1 nA on each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface; Using an electron backscatter diffraction image apparatus, a normal of the (0001) plane, which is the crystal plane of the crystal grain, with respect to the normal of the surface-polished surface in a 30 × 50 μm region at an interval of 0.1 μm / step The measured tilt angle is measured, and based on the measurement result, among the measured tilt nuclei, the measured tilt angle within the range of 0 to 45 degrees is divided for each pitch of 0.25 degrees, and within each section It was created by counting the frequencies existing in
この結果得られた各種のα型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、（０００１）面が最高ピークを示す傾斜角区分、並びに３３〜４３度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合をそれぞれ表４，５にそれぞれ示した。 In the inclination angle number distribution graphs of various α-type Al 2 O 3 layers obtained as a result, the (0001) plane is present in the inclination angle section showing the highest peak, and in the inclination angle section in the range of 33 to 43 degrees. Tables 4 and 5 show the ratios of the tilt angle numbers to the tilt angle number distribution graph as a whole.
上記の各種のα型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、表４，５にそれぞれ示される通り、本発明被覆サーメット工具の加熱処理Ａｌ2Ｏ3核上に形成されたα型Ａｌ2Ｏ3層は、いずれも（０００１）面の測定傾斜角の分布が３９〜４３度の範囲内の傾斜角区分に最高ピークが現れ、かつ３３〜４３度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が４５〜７３％である傾斜角度数分布グラフを示すのに対して、従来被覆サーメット工具のα型Ａｌ2Ｏ3層は、いずれも（０００１）面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在せず、３３〜４３度の範囲内の傾斜角区分内に存在する傾斜角度数の割合も３０％以下である傾斜角度数分布グラフを示すものであった。 In the inclination angle number distribution graphs of the various α-type Al 2 O 3 layers, α-type Al formed on the heat-treated Al 2 O 3 core of the coated cermet tool of the present invention as shown in Tables 4 and 5, respectively. In the 2 O 3 layer, the highest peak appears in the tilt angle section where the distribution of the measured tilt angle on the (0001) plane is in the range of 39 to 43 degrees, and in the tilt angle section in the range of 33 to 43 degrees. While the inclination angle number distribution graph in which the ratio of the existing inclination angle number is 45 to 73 % is shown, the α-type Al 2 O 3 layer of the conventional coated cermet tool has a measured inclination angle of the (0001) plane. An inclination angle in which the distribution of the angle is unbiased within the range of 0 to 45 degrees, the highest peak does not exist, and the ratio of the number of inclination angles existing in the inclination angle section within the range of 33 to 43 degrees is 30% or less. A number distribution graph was shown.
また、この結果得られた本発明被覆サーメット工具１〜７および従来被覆サーメット工具１〜７の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Moreover, when the thickness of the constituent layer of the hard coating layer of the present coated cermet tools 1 to 7 and the conventional coated cermet tools 1 to 7 obtained as a result was measured using a scanning electron microscope (longitudinal section measurement) , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.
つぎに、上記の本発明被覆サーメット工具１〜７および従来被覆サーメット工具１〜７の各種の被覆サーメット工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＣＭ４４０の長さ方向等間隔４本縦溝入り丸棒、
切削速度：２００ｍ／ｍｉｎ、
切り込み：４．０ｍｍ、
送り：０．２５ｍｍ／ｒｅｖ、
切削時間：１０分、
の条件（切削条件Ａという）での合金鋼の乾式断続高切り込み切削試験（通常の切り込みは２．０ｍｍ）、
被削材：ＪＩＳ・Ｓ４０Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度：１８０ｍ／ｍｉｎ、
切り込み：２．０ｍｍ、
送り：０．５ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ｂという）での炭素鋼の乾式断続高送り切削試験（通常の送りは０．２５ｍｍ／ｒｅｖ）、さらに、
被削材：ＪＩＳ・ＦＣ３００の長さ方向等間隔４本縦溝入り丸棒、
切削速度：２５０ｍ／ｍｉｎ、
切り込み：５．０ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：１０分、
の条件（切削条件Ｃという）での鋳鉄の乾式断続高切り込み切削試験（通常の切り込みは２．０ｍｍ）を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表６に示した。
Next, for the various coated cermet tools of the present invention coated cermet tools 1 to 7 and the conventional coated cermet tools 1 to 7 , all of them are screwed with a fixing jig to the tip of the tool steel tool,
Work material: JIS · SCM440 lengthwise equidistant 4 vertical grooved round bar,
Cutting speed: 200 m / min,
Cutting depth: 4.0 mm,
Feed: 0.25mm / rev,
Cutting time: 10 minutes,
Dry interrupted high cutting test of alloy steel under the conditions (referred to as cutting condition A) (normal cutting is 2.0 mm),
Work material: JIS · S40C lengthwise equal length 4 round bar with round groove,
Cutting speed: 180 m / min,
Cutting depth: 2.0 mm
Feed: 0.5mm / rev,
Cutting time: 5 minutes
Of carbon steel under the above conditions (referred to as cutting condition B) (normal feed is 0.25 mm / rev),
Work material: JIS / FC300 lengthwise equidistant 4 bars with vertical grooves,
Cutting speed: 250 m / min,
Cutting depth: 5.0mm,
Feed: 0.3mm / rev,
Cutting time: 10 minutes,
The cast iron was subjected to a dry interrupted high cutting test (normal cutting was 2.0 mm) under the above conditions (referred to as cutting condition C), and the flank wear width of the cutting blade was measured in any cutting test. The measurement results are shown in Table 6.
表４〜６に示される結果から、本発明被覆サーメット工具１〜７は、いずれも硬質被覆層の上部層が、（０００１）面の傾斜角が３９〜４３度の範囲内の傾斜角区分で最高ピークを示すと共に、３３〜４３度の傾斜角区分範囲内に存在する度数の合計割合が４５〜７３％を占める傾斜角度数分布グラフを示すα型Ａｌ2Ｏ3層で構成され、すぐれた耐衝撃性を有することから、鋼および鋳鉄の強い機械的衝撃を伴なう断続重切削加工で、すぐれた耐チッピング性を示し、長期に亘ってすぐれた切削性能を発揮するのに対して、硬質被覆層の上部層が、（０００１）面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示すα型Ａｌ2Ｏ3層で構成された従来被覆サーメット工具１〜７においては、いずれも上記の断続重切削加工では、前記α型Ａｌ2Ｏ3層の耐衝撃性不足が原因で硬質被覆層にチッピングが発生し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4 to 6, in the coated cermet tools 1 to 7 of the present invention, the upper layer of the hard coating layer is an inclination angle section in which the inclination angle of the (0001) plane is in the range of 39 to 43 degrees. It was composed of an α-type Al 2 O 3 layer showing the highest peak and showing an inclination angle number distribution graph in which the total ratio of the frequencies existing in the inclination angle range of 33 to 43 degrees accounted for 45 to 73 %. Because it has impact resistance, it exhibits excellent chipping resistance in intermittent heavy cutting with strong mechanical impact of steel and cast iron, and exhibits excellent cutting performance over a long period of time. The upper layer of the hard coating layer is an α-type Al 2 O 3 layer showing an inclination angle number distribution graph in which the distribution of measured inclination angles on the (0001) plane is unbiased within the range of 0 to 45 degrees and there is no highest peak. Contact with the conventional coated cermet tools 1 to 7 in configured Te, in both the above intermittent heavy cutting, the chipping occurs in the hard coating layer because the impact resistance insufficient α type the Al 2 O 3 layer, apparently can lead to a relatively short time using life It is.
上述のように、この発明の被覆サーメット工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に断続切削加工を重切削条件で行う場合にもすぐれた耐チッピング性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool of the present invention has excellent resistance not only to continuous cutting and interrupted cutting under normal conditions such as various types of steel and cast iron, but particularly when interrupted cutting is performed under heavy cutting conditions. Since it exhibits chipping performance and excellent cutting performance over a long period of time, it can sufficiently satisfy the high performance of cutting equipment, labor saving and energy saving of cutting processing, and further cost reduction. .
Claims (1)
（ａ）下部層が、いずれも化学蒸着形成された、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、化学蒸着した状態でα型の結晶構造および１〜１５μｍの平均層厚を有する酸化アルミニウム層、
以上（ａ）および（ｂ）で構成された硬質被覆層を形成してなる表面被覆サーメット製切削工具において、
上記（ｂ）の酸化アルミニウム層を、
反応ガス組成：容量％で、ＡｌＣｌ 3 ：３〜１０％、ＣＯ 2 ：０．５〜３％、Ｃ 2 Ｈ 4 ：０．０１〜０．３％、ＳＦ ６ ：０．０１〜０．２％、Ｈ 2 ：残り、
反応雰囲気温度：７５０〜９００℃、
反応雰囲気圧力：３〜１３ｋＰａ、
の低温条件で化学蒸着形成し、かつ加熱処理を施した酸化アルミニウム核を介して、化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム層の通常の形成条件に相当する条件で化学蒸着形成してなると共に、
電界放出型走査電子顕微鏡を用い、工具基体表面と平行な表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用いて、前記測定範囲を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、３９〜４３度の範囲内の傾斜角区分に最高ピークが存在すると共に、３３〜４３度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜７３％の割合を占める傾斜角度数分布グラフを示す酸化アルミニウム層、
で構成したことを特徴とする、硬質被覆層が断続重切削加工ですぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。 On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) The lower layer is composed of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride oxide layer formed by chemical vapor deposition. And a Ti compound layer having an overall average layer thickness of 3 to 20 μm,
(B) an aluminum oxide layer having an α-type crystal structure and an average layer thickness of 1 to 15 μm in an upper layer formed by chemical vapor deposition;
In the cutting tool made of surface-coated cermet formed by forming the hard coating layer composed of (a) and (b) above,
The aluminum oxide layer of (b) above is
Reaction gas composition:% by volume, AlCl 3 : 3 to 10%, CO 2 : 0.5 to 3%, C 2 H 4 : 0.01 to 0.3%, SF 6 : 0.01 to 0.2 %, H 2 : remaining,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 3 to 13 kPa,
Chemical vapor deposition under low-temperature conditions, and chemical vapor deposition under conditions equivalent to the normal formation conditions of an aluminum oxide layer having an α-type crystal structure in the state of chemical vapor deposition through heat-treated aluminum oxide nuclei As well as
Using a field emission scanning electron microscope, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface parallel to the tool substrate surface is irradiated with an electron beam, and an electron backscatter diffraction image apparatus is used. The measurement range is measured at an interval of 0.1 μm / step, and the inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line of the polished surface. 39. In the inclination angle number distribution graph formed by dividing the measured inclination angles in the range of 0 to 45 degrees out of the inclination angles for each pitch of 0.25 degrees and totaling the frequencies existing in each section, The highest peak exists in the inclination angle section within the range of ˜43 degrees, and the total of the frequencies existing within the range of 33 to 43 degrees accounts for 45 to 73 % of the total degrees in the inclination angle frequency distribution graph. An inclination angle number distribution graph is shown. Aluminum layer,
A surface-coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in intermittent heavy cutting processing, characterized by comprising
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