JP4747385B2 - Surface-coated cermet cutting tool with excellent chipping resistance thanks to thick α-type aluminum oxide layer - Google Patents

Surface-coated cermet cutting tool with excellent chipping resistance thanks to thick α-type aluminum oxide layer Download PDF

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JP4747385B2
JP4747385B2 JP2005154805A JP2005154805A JP4747385B2 JP 4747385 B2 JP4747385 B2 JP 4747385B2 JP 2005154805 A JP2005154805 A JP 2005154805A JP 2005154805 A JP2005154805 A JP 2005154805A JP 4747385 B2 JP4747385 B2 JP 4747385B2
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晃 長田
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この発明は、硬質被覆層の上部層、すなわち化学蒸着形成した状態でα型の結晶構造を有する酸化アルミニウム層(以下、α型Al23層で示す)を、特に厚膜化した状態で、各種の鋼や鋳鉄などの切削加工に用いた場合にも、すぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具(以下、被覆サーメット工具という)に関するものである。 In the present invention, an upper layer of a hard coating layer, that is, an aluminum oxide layer (hereinafter referred to as an α-type Al 2 O 3 layer) having an α-type crystal structure in a state where chemical vapor deposition is formed is particularly thick. The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent chipping resistance even when used for cutting various steels and cast iron.

従来、一般に、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された基体(以下、これらを総称して工具基体という)の表面に、
(a)下部層として、いずれも化学蒸着形成されたTiの炭化物(以下、TiCで示す)層、窒化物(以下、同じくTiNで示す)層、炭窒化物(以下、TiCNで示す)層、炭酸化物(以下、TiCOで示す)層、および炭窒酸化物(以下、TiCNOで示す)層のうちの1層または2層以上からなり、かつ0.5〜10μmの全体平均層厚を有するTi化合物層、
(b)上部層として、1〜15μmの平均層厚を有するα型Al23層、
以上(a)および(b)で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) As a lower layer, a Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition, Ti composed of one or more of a carbon oxide (hereinafter referred to as TiCO) layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer and having an overall average layer thickness of 0.5 to 10 μm Compound layer,
(B) an α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm as an upper layer;
There is known a coated cermet tool formed by vapor-depositing a hard coating layer composed of the above (a) and (b). It is well known to be used.

また、一般に、上記の被覆サーメット工具の硬質被覆層を構成するTi化合物層やα型Al23 層が粒状結晶組織を有し、さらに、前記Ti化合物層を構成するTiCN層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、700〜950℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
特開平6−31503号公報 特開平6−8010号公報
In general, the Ti compound layer and the α-type Al 2 O 3 layer constituting the hard coating layer of the above-mentioned coated cermet tool have a granular crystal structure, and further, the TiCN layer constituting the Ti compound layer is the layer itself. For the purpose of improving the strength of the crystal, a vertically grown crystal formed by chemical vapor deposition at a medium temperature range of 700 to 950 ° C. using a mixed gas containing an organic carbonitride as a reaction gas in a normal chemical vapor deposition apparatus. It is also known to have an organization.
Japanese Unexamined Patent Publication No. 6-31503 Japanese Patent Laid-Open No. 6-8010

近年の切削装置のFA化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削工具に対する使用寿命の一層の延命化を図る目的で、特に硬質被覆層を構成する上部層、すなわちすぐれた高温硬さと耐熱性を有するα型Al23 層には一段の厚膜化が強く望まれているが、前記α型Al23 層の層厚を従来実用に供されている最大平均層厚である15μmを越えて厚膜化すると、Al23 結晶粒が急激に粗大化し、かつ層自体の緻密性が著しく低下し、この結果高温強度の低下が避けられなくなることから、かかる厚膜化α型Al23 層を硬質被覆層の上部層として蒸着形成してなる被覆サーメット工具においては、前記厚膜化α型Al23 層が原因で、切刃部にチッピング(微少欠け)が発生し易くなり、この結果使用寿命のきわめて短いものとなることから、実用に供することができないのが現状である。 In recent years, the use of FA for cutting devices has been remarkable. On the other hand, there has been a strong demand for labor saving and energy saving and further cost reduction for cutting work, and with this purpose, especially for the purpose of further extending the service life of cutting tools. upper layer constituting the hard coating layer, i.e. excellent but the hot hardness and thickening of one step in the α-type the Al 2 O 3 layer having heat resistance is strongly demanded, of the α-type the Al 2 O 3 layer When the layer thickness exceeds 15 μm, which is the maximum average layer thickness that has been practically used in the past, the Al 2 O 3 crystal grains become coarser and the denseness of the layer itself is significantly reduced. since the decrease in the high-temperature strength can not be avoided, the coated cermet tool formed by depositing formed as an upper layer of such thickening α type the Al 2 O 3 layer a hard coating layer, the thickening α-type Al 2 O 3 layer due to chipping to the cutting edge (fine Chipping) is likely to occur, since it becomes very short for this result useful life, it can not be put to practical use at present.

そこで、本発明者等は、上述のような観点から、上記の従来被覆サーメット工具の硬質被覆層を構成する1〜15μmの平均層厚を有するα型Al23層に着目し、これの層厚を平均層厚で15μmを越えて厚膜化しても、前記厚膜化α型Al23層が原因のチッピングが切刃部に発生しない被覆サーメット工具を開発するべく研究を行った結果、
(a)下部層としてTi化合物層を形成した後の工具基体の表面に、上部層としてのα型Al23層を蒸着形成するに際して、これの蒸着形成に先だって、例えば、通常の化学蒸着装置にて、
反応ガス組成:容量%で、AlCl3:3〜10%、CO2:0.5〜3%、C24:0.01〜0.3%、H2:残り、
反応雰囲気温度:750〜900℃、
反応雰囲気圧力:3〜13kPa、
の低温条件で、Al23核を前記表面に分散分布した状態で形成し、この場合、走査型電子顕微鏡を用い、10000倍の倍率で観察して、Al23核が平均値で5〜200個/μmの割合で分散分布するのが望ましく、ついで、装置内雰囲気を圧力:3〜13kPaのAr雰囲気に変え、装置内温度を930〜1050℃に昇温した条件で前記Al23核に加熱処理を施した状態で、硬質被覆層の上部層としてのα型Al23層を通常の条件で、平均層厚で15μmを越えた16〜30μmの層厚に形成すると、この結果の前記加熱処理Al23核形成後に蒸着形成された厚膜化α型Al23層(以下、厚膜化改質α型Al23層という)においては、平均層厚で16〜30μmの層厚に厚膜化したにもかかわらず、Al23結晶粒の粗大化が著しく抑制され、かつ層自体の緻密性も保持されたものになるので、高温強度の低下が防止されるようになること。
Therefore, the present inventors focused on the α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm constituting the hard coating layer of the above-described conventional coated cermet tool from the above viewpoint, Research was conducted to develop a coated cermet tool in which chipping caused by the thickened α-type Al 2 O 3 layer does not occur at the cutting edge even if the layer thickness is increased to an average layer thickness exceeding 15 μm. result,
(A) When forming an α-type Al 2 O 3 layer as an upper layer on the surface of a tool base after forming a Ti compound layer as a lower layer, prior to the vapor deposition, for example, an ordinary chemical vapor deposition In the device
Reaction gas composition:% by volume, AlCl 3 : 3 to 10%, CO 2 : 0.5 to 3%, C 2 H 4 : 0.01 to 0.3%, H 2 : remaining,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 3 to 13 kPa,
Under the low temperature condition, the Al 2 O 3 nuclei are formed in a state of being distributed and distributed on the surface. In this case, using a scanning electron microscope, the Al 2 O 3 nuclei are observed at an average value of 10,000 times. It is desirable to disperse and distribute at a rate of 5 to 200 / μm 2 , and then change the atmosphere in the apparatus to an Ar atmosphere at a pressure of 3 to 13 kPa, and increase the temperature in the apparatus to 930 to 1050 ° C. With the heat treatment applied to the 2 O 3 core, an α-type Al 2 O 3 layer as an upper layer of the hard coating layer is formed under a normal condition to a layer thickness of 16 to 30 μm exceeding an average layer thickness of 15 μm. Then, in the resulting thickened α-type Al 2 O 3 layer (hereinafter referred to as a thickened modified α-type Al 2 O 3 layer) deposited after the heat-treated Al 2 O 3 nucleation, the average Despite increasing the thickness to 16-30 μm, Al 2 O 3 crystal grains The coarsening is remarkably suppressed and the denseness of the layer itself is maintained, so that a decrease in high-temperature strength is prevented.

(b)上記の厚膜化改質α型Al23層、および上記の加熱処理Al23核の形成を行わないで、下部層であるTi化合物層の表面に、通常の条件で16〜30μmの平均層厚で蒸着形成された厚膜化α型Al23層(以下、厚膜化通常α型Al23層という)について、電界放出型走査電子顕微鏡を用い、図1(a),(b)に概略説明図で示される通り、表面研磨面の測定範囲内に存在する六方晶結晶格子を有するα型Al23結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記厚膜化通常α型Al23層は、図3に例示される通り、(0001)面の測定傾斜角の分布が0〜45度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記加熱処理Al23核上に蒸着形成された厚膜化改質α型Al23層は、図2に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、このシャープな最高ピークは、前記Al23核の分布割合を変化させることによりグラフ横軸の傾斜角区分に現れる位置が変わること。 (B) Without forming the above thickened modified α-type Al 2 O 3 layer and the above heat-treated Al 2 O 3 nucleus, on the surface of the Ti compound layer, which is the lower layer, under normal conditions For a thickened α-type Al 2 O 3 layer (hereinafter referred to as a thickened normal α-type Al 2 O 3 layer) deposited with an average layer thickness of 16 to 30 μm, a field emission scanning electron microscope is used. 1 (a) and 1 (b), as schematically illustrated, the α-type Al 2 O 3 crystal grains having a hexagonal crystal lattice existing within the measurement range of the surface polished surface are irradiated with an electron beam, An inclination angle formed by a normal line of the (0001) plane, which is a crystal plane of the crystal grain, with respect to a normal line of the surface-polished surface with respect to the normal line of the surface-polished surface at a spacing of 0.1 μm / step using a backscatter diffraction image apparatus. Of the measured tilt angles, the measured tilt angles within a range of 0 to 45 degrees are divided for each pitch of 0.25 degrees. As with, if you create a tilt angle frequency distribution graph obtained by aggregating the frequencies present in each segment, the thickened normal α-type Al 2 O 3 layer is illustrated in FIG. 3, (0001) Whereas the distribution of the measured inclination angle of the surface shows an unbiased inclination angle number distribution graph within the range of 0 to 45 degrees, the film thickness reforming formed by vapor deposition on the heat-treated Al 2 O 3 nucleus In the α-type Al 2 O 3 layer, as illustrated in FIG. 2, a sharp maximum peak appears at a specific position in the tilt angle section, and this sharp maximum peak changes the distribution ratio of the Al 2 O 3 nuclei. As a result, the position that appears in the tilt angle section of the horizontal axis of the graph changes.

(c)試験結果によれば、上記の厚膜化改質α型Al23層においては、上記Al23核の分布割合を平均値で5〜200個/μmとすると、上記シャープな最高ピークが傾斜角区分の33.00〜36.50度または39.00〜43.00度の範囲内に現れると共に、33〜43度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45〜73%の割合を占める傾斜角度数分布グラフを示すようになり、したがって、傾斜角度数分布グラフで33.00〜36.50度または39.00〜43.00度の範囲内に傾斜角区分の最高ピークが現れ、かつ33〜43度の範囲内に存在する度数割合が45〜73%の割合を占める厚膜化改質α型Al23層を硬質被覆層の上部層として、下部層のTi化合物層と共存した状態で蒸着形成してなる被覆サーメット工具は、上記の厚膜化通常α型Al23層を硬質被覆層の上部層として蒸着形成した被覆サーメット工具に比して、特に切刃部にチッピングの発生なく、一段とすぐれた耐摩耗性を長期に亘って発揮するようになること。
以上(a)〜(c)に示される研究結果を得たのである。
(C) According to the test results, in the above-mentioned thickening-modified α-type Al 2 O 3 layer, when the distribution ratio of the Al 2 O 3 nuclei is 5 to 200 / μm 2 on average, The sharpest peak appears in the range of 33.00 to 36.50 degrees or 39.00 to 43.00 degrees of the tilt angle section, and the sum of the frequencies existing in the range of 33 to 43 degrees is the tilt angle. An inclination angle frequency distribution graph occupying a ratio of 45 to 73% of the entire frequency in the number distribution graph is displayed, and accordingly, the inclination angle frequency distribution graph is 33.00 to 36.50 degrees or 39.00 to 43.00. The thickened reformed α-type Al 2 O 3 layer is hard, in which the highest peak of the inclination angle section appears in the range of degrees and the frequency ratio existing in the range of 33 to 43 degrees accounts for 45 to 73% Ti compound layer as the lower layer as the upper layer of the coating layer Coated cermet tool formed by depositing formed in the coexistence state is different from the coated cermet tool formed by depositing form thicker normal α type the Al 2 O 3 layer of the as the upper layer of the hard coating layer, particularly the cutting edge In addition, there is no need for chipping and the wear resistance is improved over a long period of time.
The research results shown in (a) to (c) above were obtained.

この発明は、上記の研究結果に基づいてなされたものであって、WC基超硬合金またはTiCN基サーメットで構成された工具基体の表面に、
(a)下部層として、いずれも化学蒸着形成された、TiC層、TiN層、TiCN層、TiCO層、およびTiCNO層のうちの1層または2層以上からなり、かつ0.5〜10μmの全体平均層厚を有するTi化合物層、
(b)上部層として、化学蒸着形成した状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、33.00〜36.50度または39.00〜43.00度の範囲内の傾斜角区分に最高ピークが存在すると共に、33〜43度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45〜73%の割合を占める傾斜角度数分布グラフを示し、かつ16〜30μmの平均層厚を有する厚膜化改質α型Al23層、
以上(a)および(b)で構成された硬質被覆層を蒸着形成してなる、硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and on the surface of a tool base composed of a WC-based cemented carbide or TiCN-based cermet,
(A) The lower layer is composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, all of which are formed by chemical vapor deposition, and a whole of 0.5 to 10 μm. A Ti compound layer having an average layer thickness;
(B) As an upper layer, each crystal grain having a hexagonal crystal lattice which has an α-type crystal structure in a state where chemical vapor deposition is formed, and which exists within the measurement range of the surface polished surface using a field emission scanning electron microscope An electron backscattered diffraction image apparatus is used to irradiate the substrate with a predetermined region of the crystal grain with respect to the normal of the surface polished surface at an interval of 0.1 μm / step (0001). The tilt angle formed by the normal of the surface is measured, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are divided for each pitch of 0.25 degrees and exist in each section. In the inclination angle number distribution graph obtained by collecting the frequencies, the highest peak exists in the inclination angle section in the range of 33.00 to 36.50 degrees or 39.00 to 43.00 degrees , and 33 to 43 degrees. The total frequency within the range is the number of tilt angles. It shows an inclination angle frequency distribution graph in a proportion of 45-73% of the total power in the graph, and thickening modified α type with an average layer thickness of 16~30μm Al 2 O 3 layer,
The hard coating layer formed by vapor deposition of the hard coating layer composed of (a) and (b) above is characterized by a coated cermet tool that exhibits excellent chipping resistance.

また、この発明の被覆サーメット工具の硬質被覆層の構成層において、上記の通りに数値限定した理由を以下に説明する。
(a)Ti化合物層
Ti化合物層は、基本的には厚膜化改質α型Al23層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層の高温強度向上に寄与するほか、工具基体と厚膜化改質α型Al23層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性を向上させる作用を有するが、その平均層厚が0.5μm未満では、前記作用を十分に発揮させることができず、一方その平均層厚が10μmを越えると、切削時の発生熱による熱塑性変形量が許容範囲を越えて大きくなり、この結果上部層である厚膜化改質α型Al23層に割れが発生し易くなることから、その平均層厚を0.5〜10μmと定めた。
In addition, the reason why the numerical values of the constituent layers of the hard coating layer of the coated cermet tool of the present invention are limited as described above will be described below.
(A) Ti compound layer The Ti compound layer basically exists as a lower layer of the thickening-modified α-type Al 2 O 3 layer, and the high temperature strength of the hard coating layer is improved by its excellent high temperature strength. In addition to the tool substrate and the thickened modified α-type Al 2 O 3 layer, and thus has an effect of improving the adhesion of the hard coating layer to the tool substrate. If the thickness is less than 0.5 μm, the above-mentioned effect cannot be sufficiently exerted. On the other hand, if the average layer thickness exceeds 10 μm, the amount of thermoplastic deformation caused by heat generated during cutting increases beyond the allowable range. As a result, cracks are likely to occur in the thickened reformed α-type Al 2 O 3 layer, which is the upper layer, so the average layer thickness was determined to be 0.5 to 10 μm.

(b)厚膜化改質α型Al23
上記の通り加熱処理Al23核上に形成された厚膜化改質α型Al23層は、Al23自体のもつすぐれた高温硬度と耐熱性によって硬質被覆層の耐摩耗性を向上させると共に、厚膜化通常α型Al23層に比して、すぐれた高温強度を有するので、厚膜化した状態でもチッピング発生が著しく抑制され、使用寿命の一段の延命化を可能にする特性を有するが、その平均層厚が16μm未満では厚膜化の要求に十分満足に対応することができず、一方その平均層厚が30μmを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を16〜30μmと定めた。
(B) Thickened modified α-type Al 2 O 3 layer As described above, the thickened modified α-type Al 2 O 3 layer formed on the heat-treated Al 2 O 3 nucleus is formed of Al 2 O 3 itself. The high temperature hardness and heat resistance of the hard coating layer improves the wear resistance of the hard coating layer, and it has a high temperature strength compared to the normal α-type Al 2 O 3 layer. However, the occurrence of chipping is remarkably suppressed, and it has the characteristic that the life of the product can be further extended. However, if the average layer thickness is less than 16 μm, it cannot sufficiently satisfy the demand for thick film, If the average layer thickness exceeds 30 μm and becomes too thick, chipping is likely to occur. Therefore, the average layer thickness was determined to be 16 to 30 μm.

(c)加熱処理Al23
この発明の被覆サーメット工具の硬質被覆層を構成する厚膜化改質α型Al23層に関して、上記の通り、傾斜角度数分布グラフで最高ピークを示す傾斜角区分と加熱処理Al23核の分布割合との間には密接な関係があり、この場合試験結果によれば、前記加熱処理Al23核の分布割合を平均値で5〜200個/μmの範囲内で変化させると、最高ピークが33.00〜36.50度または39.00〜43.00度の範囲内の傾斜角区分に現れると共に、33〜43度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45〜73%の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記加熱処理Al23核の分布割合が5個/μm未満では、これの上に蒸着形成される厚膜化改質α型Al23層の傾斜角度数分布グラフの33.00〜36.50度または39.00〜43.00度の範囲内に現れるピーク高さが不十分、すなわち前記33〜43度の範囲内に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の45%未満となる場合が生じ、この場合上記の通り、前記厚膜化改質α型Al23層の高温強度を、上記の従来被覆サーメット工具の硬質被覆層の上部層を構成するα型Al23層、すなわち1〜15μmの平均層厚を有するα型Al23層の具備する高温強度と同等の高温強度を保持することができず、この結果耐チッピング性が低下するようになり、一方その分布割合が、200個/μmを越えると、最高ピークの現れる傾斜角区分が33.00〜36.50度または39.00〜43.00度の範囲から外れるようになるほか、前記最高ピークの高さも低下してしまう場合が生じ、この場合も前記厚膜化改質α型Al23層に所望の高温強度を確保することができないことから、硬質被覆層を構成するTi化合物層上に形成される前記加熱処理Al23核の分布割合を平均値で5〜200個/μmとしたのである。
(C) Heat-treated Al 2 O 3 nucleus Regarding the thickened modified α-type Al 2 O 3 layer constituting the hard coating layer of the coated cermet tool of the present invention, as described above, the highest peak is shown in the inclination angle number distribution graph. There is a close relationship between the inclination angle section shown and the distribution ratio of the heat-treated Al 2 O 3 nuclei. In this case, according to the test results, the distribution ratio of the heat-treated Al 2 O 3 nuclei is 5 on average. When changed within the range of ~ 200 / μm 2 , the highest peak appears in the inclination angle section in the range of 33.00 to 36.50 degrees or 39.00 to 43.00 degrees , and 33 to 43 degrees. An inclination angle frequency distribution graph in which the sum of the frequencies existing in the range occupies a ratio of 45 to 73% of the entire frequency in the inclination angle frequency distribution graph is shown. Therefore, the heat-treated Al 2 O 3 distribution ratio of the nucleus is less than 5 / μm 2 It is in the range of 33.00 to 36.50 degrees or 39.00 to 43.00 degrees inclination angle frequency distribution graph of the thickening modified α type the Al 2 O 3 layer is deposited formed on this peak height appearing insufficient, i.e. total proportion of the frequencies present in the range of the 33-43 °, if less than 45% of the total power at the inclination angle frequency distribution graph is generated, as in this case above, the high temperature strength of the thick film reforming α type the Al 2 O 3 layer, the conventional coated cermet tool hard layer α type the Al 2 O 3 layer constituting the upper layer of the above, i.e. the average layer thickness of 1~15μm The high temperature strength equivalent to the high temperature strength of the α-type Al 2 O 3 layer having the above cannot be maintained, and as a result, the chipping resistance is lowered, while the distribution ratio is 200 / μm 2. by weight, inclination angle segment of appearance of the highest peak 33 00 to 36.50 degrees or addition become disengaged from 39.00 to 43.00 degrees in the range, the height of the highest peaks occur if lowered, again the thickened reforming α-type Al Since the desired high-temperature strength cannot be ensured in the 2 O 3 layer, the distribution ratio of the heat-treated Al 2 O 3 nuclei formed on the Ti compound layer constituting the hard coating layer is 5 to 200 on average. Pieces / μm 2 .

なお、被覆サーメット工具の使用前後の識別を目的として、黄金色の色調を有するTiN層を、硬質被覆層の最表面層として必要に応じて蒸着形成してもよいが、この場合の平均層厚は0.1〜1μmでよく、これは0.1μm未満では、十分な識別効果が得られず、一方前記TiN層による前記識別効果は1μmまでの平均層厚で十分であるという理由からである。   For the purpose of identification before and after the use of the coated cermet tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer, but the average layer thickness in this case 0.1-1 μm may be sufficient, because if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient with an average layer thickness of up to 1 μm. .

この発明の被覆サーメット工具は、これの硬質被覆層を構成する厚膜化改質α型Al23層が、図2に例示される通り33.00〜36.50度または39.00〜43.00度の範囲内の傾斜角区分に最高ピークが現れる傾斜角度数分布グラフを示し、平均層厚で16〜30μmの層厚に厚膜化されても、すぐれた耐チッピング性を発揮することから、各種の鋼や鋳鉄の切削加工で、すぐれた耐摩耗性を長期に亘って発揮し、使用寿命の一段の延命化を可能とするものである。 In the coated cermet tool of the present invention, the thickened modified α-type Al 2 O 3 layer constituting the hard coating layer thereof is 33.00 to 36.50 degrees or 39.000 as illustrated in FIG. An inclination angle number distribution graph in which the highest peak appears in the inclination angle section within the range of 43.00 degrees shows excellent chipping resistance even when the average layer thickness is increased to a layer thickness of 16 to 30 μm. For this reason, excellent wear resistance is exhibited over a long period of time by cutting various steels and cast irons, and the service life can be further extended.

つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。   Next, the coated cermet tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも0.5〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr3 2 粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、切刃部にR:0.05mmのホーニング加工を施すことによりISO・CNMG120412に規定するスローアウエイチップ形状をもったWC基超硬合金製の工具基体A〜Fをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 0.5 to 3 μm as raw material powder These raw material powders are blended into the blending composition shown in Table 1, further added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and then formed into a compact with a predetermined shape at a pressure of 98 MPa. The green compact was press-molded and vacuum-sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour. After sintering, the cutting edge portion had R: 0.05 mm. The tool bases A to F made of a WC-base cemented carbide having a throwaway tip shape specified in ISO · CNMG12041 were manufactured by performing the honing process.

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(質量比でTiC/TiN=50/50)粉末、Mo2 C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、98MPaの圧力で圧粉体にプレス成形し、この圧粉体を1.3kPaの窒素雰囲気中、温度:1540℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.07mmのホーニング加工を施すことによりISO規格・CNMG120412のチップ形状をもったTiCN基サーメット製の工具基体a〜d,fを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to d and f made of TiCN base cermet having a standard / CNMG12041 chip shape were formed.

ついで、これらの工具基体A〜Fおよび工具基体a〜d,fのそれぞれを、Al23核分布割合測定用試験片と共に、通常の化学蒸着装置に装入し、まず、表3(表3中のl−TiCNは特開平6−8010号公報に記載される縦長成長結晶組織をもつTiCN層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである)に示される通常の条件にて、表4に示される目標層厚のTi化合物層を硬質被覆層の下部層として蒸着形成し、ついで、
反応ガス組成:容量%で、AlCl3:6.5%、CO2:1.6%、C24:0.13%、H2:残り、
反応雰囲気温度:820℃、
反応雰囲気圧力:8kPa、
の低温条件でAl23核を形成した後、装置内雰囲気を圧力:8kPaのAr雰囲気に変え、かつ装置内温度を1000℃に昇温した条件で前記Al23核に加熱処理を施して加熱処理Al23核とし、
この時点で前記試験片を装置から取り出し、引続いて、同じく表3に示される通常の条件で、表4に示される目標層厚の厚膜化改質α型Al23層を硬質被覆層の上部層として蒸着形成することにより本発明被覆サーメット工具1〜12をそれぞれ製造した。
また、上記のAl23核分布割合測定用試験片における加熱処理Al23核の分布割合については、走査型電子顕微鏡を用い、10000倍の倍率で観察して、3μm×3μmの範囲内に存在するAl23核の数を任意箇所5ヶ所について測定し、この測定結果を表4に単位面積(μm)当たりの平均値で示した。
Next, each of the tool bases A to F and the tool bases a to d and f together with a test piece for Al 2 O 3 nucleus distribution ratio measurement was charged into a normal chemical vapor deposition apparatus. 1-TiCN in No. 3 indicates the conditions for forming a TiCN layer having a vertically grown crystal structure described in JP-A-6-8010, and the other conditions indicate the conditions for forming a normal granular crystal structure. Under the normal conditions shown in Table 4), a Ti compound layer having a target layer thickness shown in Table 4 is deposited as a lower layer of the hard coating layer, and then,
Reaction gas composition: volume%, AlCl 3 : 6.5%, CO 2 : 1.6%, C 2 H 4 : 0.13%, H 2 : remaining,
Reaction atmosphere temperature: 820 ° C.
Reaction atmosphere pressure: 8 kPa,
After forming Al 2 O 3 nuclei under low temperature conditions, the atmosphere inside the apparatus was changed to an Ar atmosphere at a pressure of 8 kPa and the temperature inside the apparatus was raised to 1000 ° C., and the Al 2 O 3 nuclei were subjected to heat treatment. To heat-treat Al 2 O 3 nuclei,
At this time, the test piece is taken out from the apparatus, and subsequently, the thickened modified α-type Al 2 O 3 layer having the target layer thickness shown in Table 4 is hard-coated under the normal conditions also shown in Table 3. The coated cermet tools 1 to 12 of the present invention were produced by vapor deposition as the upper layer of each layer.
The distribution ratio of the heat-treated Al 2 O 3 nuclei in the Al 2 O 3 nucleus distribution ratio measurement test piece was observed at a magnification of 10,000 using a scanning electron microscope, and the range was 3 μm × 3 μm. The number of Al 2 O 3 nuclei present inside was measured at five arbitrary locations, and the measurement results are shown in Table 4 as an average value per unit area (μm 2 ).

また、比較の目的で、表5に示される通り、上記のAl23核の形成およびこれの加熱処理を行なわず、硬質被覆層の下部層であるTi化合物層の上に直接厚膜化通常α型Al23層を上部層として形成する以外は同一の条件で、比較被覆サーメット工具1〜12をそれぞれ製造した。 For comparison purposes, as shown in Table 5, without forming the above Al 2 O 3 nuclei and heating them, the film thickness is increased directly on the Ti compound layer, which is the lower layer of the hard coating layer. Comparative coated cermet tools 1 to 12 were produced under the same conditions except that the α-type Al 2 O 3 layer was usually formed as the upper layer.

さらに、上記の本発明被覆サーメット工具1〜12および比較被覆サーメット工具1〜12の硬質被覆層を構成する厚膜化改質α型Al23層および厚膜化通常α型Al23層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の各種厚膜化α型Al23層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に70度の入射角度で15kVの加速電圧の電子線を1nAの照射電流で、前記表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射し、電子後方散乱回折像装置を用いて、30×50μmの領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Further, the thickened modified α-type Al 2 O 3 layer and the thickened normal α-type Al 2 O 3 constituting the hard coating layers of the above-described coated cermet tools 1 to 12 of the present invention and the comparative coated cermet tools 1 to 12 About the layer, the inclination angle number distribution graph was each created using the field emission scanning electron microscope.
That is, the inclination angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope in a state where the surface of each of the various thickened α-type Al 2 O 3 layers is a polished surface. An electron backscattered diffraction image is obtained by irradiating an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 ° to an individual crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface with an irradiation current of 1 nA. Using an apparatus, an inclination angle formed by a normal line of the (0001) plane that is a crystal plane of the crystal grain with respect to a normal line of the surface-polished surface in a 30 × 50 μm region at an interval of 0.1 μm / step Based on the measurement result, the measurement inclination angle within the range of 0 to 45 degrees is divided into 0.25 degree pitches among the measurement inclination angles, and the frequency existing in each division is measured. Created by counting.

この結果得られた各種の厚膜化α型Al23層の傾斜角度数分布グラフにおいて、(0001)面が最高ピークを示す傾斜角区分、並びに33〜43度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合をそれぞれ表4,5にそれぞれ示した。 In the gradient angle distribution graphs of the various thickened α-type Al 2 O 3 layers obtained as a result, the tilt angle segment in which the (0001) plane shows the highest peak, and the tilt angle segment in the range of 33 to 43 degrees. Tables 4 and 5 show the ratio of the number of tilt angles existing in the tilt angle number distribution graph to the entire tilt angle number distribution graph.

上記の各種の厚膜化α型Al23層の傾斜角度数分布グラフにおいて、表4,5にそれぞれ示される通り、本発明被覆サーメット工具の加熱処理Al23核上に形成された厚膜化改質α型Al23層は、いずれも(0001)面の測定傾斜角の分布が33.00〜36.50度または39.00〜43.00度の範囲内の傾斜角区分に最高ピークが現れ、かつ33〜43度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が45〜73%である傾斜角度数分布グラフを示すのに対して、比較被覆サーメット工具の厚膜化通常α型Al23層は、いずれも(0001)面の測定傾斜角の分布が0〜45度の範囲内で不偏的で、最高ピークが存在せず、33〜43度の範囲内の傾斜角区分内に存在する傾斜角度数の割合も30%以下である傾斜角度数分布グラフを示すものであった。
なお、図2は、本発明被覆サーメット工具の厚膜化改質α型Al23層の傾斜角度数分布グラフ、図3は、比較被覆サーメット工具の厚膜化通常α型Al23層の傾斜角度数分布グラフをそれぞれ示すものである。
In the inclination angle number distribution graphs of the various thickened α-type Al 2 O 3 layers described above, as shown in Tables 4 and 5, the heat-treated Al 2 O 3 nuclei of the coated cermet tool of the present invention were formed. Any of the thickening- modified α-type Al 2 O 3 layers has an inclination angle within the range of a measured inclination angle of (0001) plane of 33.00 to 36.50 degrees or 39.00 to 43.00 degrees. While the highest peak appears in the section and the ratio of the tilt angle number existing in the tilt angle section within the range of 33 to 43 degrees is 45 to 73% , the comparative coated cermet Thickening of tool normal α-type Al 2 O 3 layers are all unbiased in the distribution of measured inclination angle of (0001) plane within the range of 0 to 45 degrees, and the highest peak does not exist. The ratio of the number of tilt angles existing in the tilt angle section within the range of degrees is also 30% or less It was indicative of the inclination angle frequency distribution graph.
Incidentally, FIG. 2, the inclination angle frequency distribution graph of the present invention thickened modified α type the Al 2 O 3 layer of coated cermet tool 4, Fig. 3, compare coated cermet tool 4 thickening normal α-type Al 2 The graph of the distribution of the number of inclination angles of the O 3 layer is shown respectively.

また、この結果得られた本発明被覆サーメット工具1〜12および比較被覆サーメット工具1〜12の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定(縦断面測定)したところ、いずれも目標層厚と実質的に同じ平均層厚(5点測定の平均値)を示した。 Further, when the thickness of the resulting present invention coated cermet tools 1 to 12 and Comparative coated cermet tool 1-12 layers constituting the hard layer of the, was measured using a scanning electron microscope (longitudinal sectional measurement) , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.

つぎに、上記の各種の被覆サーメット工具をいずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆サーメット工具1〜12および比較被覆サーメット工具1〜12について、
被削材:JIS・SCM415の長さ方向等間隔4本縦溝入り丸棒、
切削速度:220m/min、
切り込み:1.5mm、
送り:0.25mm/rev、
切削時間:30分、
の条件(切削条件Aという)での合金鋼の乾式断続切削試験、
被削材:JIS・S35Cの丸棒、
切削速度:200m/min、
切り込み:1.5mm、
送り:0.30mm/rev、
切削時間:30分、
の条件(切削条件Bという)での炭素鋼の乾式連続切削試験、さらに、
被削材:JIS・FC250の丸棒、
切削速度:300m/min、
切り込み:2.0mm、
送り:0.28mm/rev、
切削時間:30分、
の条件(切削条件Cという)での鋳鉄の乾式連続切削試験を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表6に示した。
Next, in the state where each of the above various coated cermet tools is screwed to the tip of the tool steel tool with a fixing jig, the present coated cermet tools 1 to 12 and the comparative coated cermet tools 1 to 12 ,
Work material: JIS / SCM415 lengthwise equidistant 4 round grooved round bars,
Cutting speed: 220 m / min,
Incision: 1.5mm,
Feed: 0.25mm / rev,
Cutting time: 30 minutes,
Dry interrupted cutting test of alloy steel under the following conditions (referred to as cutting condition A),
Work material: JIS / S35C round bar,
Cutting speed: 200 m / min,
Incision: 1.5mm,
Feed: 0.30mm / rev,
Cutting time: 30 minutes,
Dry continuous cutting test of carbon steel under the conditions (referred to as cutting condition B),
Work material: JIS / FC250 round bar,
Cutting speed: 300 m / min,
Cutting depth: 2.0 mm
Feed: 0.28mm / rev,
Cutting time: 30 minutes,
The dry continuous cutting test of cast iron was performed under the above conditions (referred to as cutting condition C), and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 6.

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Figure 0004747385
Figure 0004747385

表4〜6に示される結果から、本発明被覆サーメット工具1〜12は、いずれも硬質被覆層の上部層が、(0001)面の傾斜角が33.00〜36.50度または39.00〜43.00度の範囲内の傾斜角区分で最高ピークを示すと共に、33〜43度の範囲内に存在する合計度数割合が45〜73%を占める傾斜角度数分布グラフを示す厚膜化改質α型Al23層で構成され、平均層厚で16〜30μmと厚膜化したにもかかわらず、鋼や鋳鉄の切削加工で、前記厚膜化改質α型Al23層がすぐれた耐チッピング性を発揮し、切刃部のチッピング発生が著しく抑制され、長期に亘ってすぐれた耐摩耗性を示し、使用寿命の延命化を可能とするのに対して、硬質被覆層の上部層が、(0001)面の測定傾斜角の分布が0〜45度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す厚膜化通常α型Al23層で構成された比較被覆サーメット工具1〜12に見られる通り、いずれもα型Al23層が平均層厚で15μmを越えて16〜30μmに厚膜化すると、高温強度低下が著しく、この結果切刃部にチッピングが発生し易くなることから、短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4 to 6, in the coated cermet tools 1 to 12 of the present invention, the upper layer of the hard coating layer has a (0001) plane inclination angle of 33.00 to 36.50 degrees or 39.00. A thickening modification showing an inclination angle distribution graph showing the highest peak in the inclination angle section within the range of ˜43.00 degrees and the total frequency ratio existing in the range of 33 to 43 degrees occupying 45 to 73%. consists of quality α type the Al 2 O 3 layer, in spite of 16~30μm and thicker in average thickness, by cutting the steel or cast iron, the thicker reforming α type the Al 2 O 3 layer It exhibits excellent chipping resistance, the chipping of the cutting edge is remarkably suppressed, and it exhibits excellent wear resistance over a long period of time. The upper layer of the (0001) plane has a measured inclination angle distribution in the range of 0 to 45 degrees. A unbiased manner in囲内, as seen in the comparer coated cermet tools 1 to 12 composed of a thickened normal α type the Al 2 O 3 layer showing the inclination angle frequency distribution graph the highest peak does not exist, either α-type Al When the average thickness of the 2 O 3 layer exceeds 15 μm and is increased to 16 to 30 μm, the high-temperature strength is significantly reduced. As a result, chipping tends to occur at the cutting edge, and the service life is reached in a short time. It is clear.

上述のように、この発明の被覆サーメット工具は、これの硬質被覆層の上部層であるα型Al23層の層厚を平均層厚で16〜30μmに厚くしても、各種の鋼や鋳鉄などの切削加工で、すぐれた耐チッピング性を示し、長期に亘ってすぐれた耐摩耗性を発揮し、使用寿命の延命化を可能とするものであるから、切削加工のFA化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool according to the present invention can be used for various steels even when the α-type Al 2 O 3 layer, which is the upper layer of the hard coating layer, has an average layer thickness of 16 to 30 μm. It shows excellent chipping resistance in cutting work such as cast iron and cast iron, exhibits excellent wear resistance over a long period of time, and can extend the service life. It can cope with labor saving, energy saving and cost reduction of processing sufficiently satisfactorily.

硬質被覆層を構成する各種厚膜化α型Al23層における結晶粒の(0001)面の傾斜角の測定範囲を示す概略説明図である。It is a schematic diagram illustrating a measurement range of the inclination angle of the crystal grains (0001) plane in various thickened α type the Al 2 O 3 layer constituting the hard coating layer. 本発明被覆サーメット工具4の硬質被覆層を構成する厚膜化改質α型Al23層の(0001)面の傾斜角度数分布グラフである。It is an inclination angle number distribution graph of the (0001) plane of the thickening modified α-type Al 2 O 3 layer constituting the hard coating layer of the coated cermet tool 4 of the present invention. 比較被覆サーメット工具4の硬質被覆層を構成する厚膜化通常α型Al23層の(0001)面の傾斜角度数分布グラフである。6 is a graph showing the distribution of the number of inclination angles of the (0001) plane of the thickened normal α-type Al 2 O 3 layer constituting the hard coating layer of the comparative coated cermet tool 4.

Claims (1)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
(a)下部層として、いずれも化学蒸着形成されたTiの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの1層または2層以上からなり、かつ0.5〜10μmの全体平均層厚を有するTi化合物層、
(b)上部層として、化学蒸着形成された状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、33.00〜36.50度または39.00〜43.00度の範囲内の傾斜角区分に最高ピークが存在すると共に、12〜22度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45〜73%の割合を占める傾斜角度数分布グラフを示し、かつ16〜30μmの平均層厚を有する厚膜化改質α型酸化アルミニウム層、
以上(a)および(b)で構成された硬質被覆層を蒸着形成してなる、厚膜化α型酸化アルミニウム層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。
On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) As a lower layer, each consists of one or two or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride oxide layer formed by chemical vapor deposition, And a Ti compound layer having an overall average layer thickness of 0.5 to 10 μm,
(B) Crystal grains having an α-type crystal structure in the state of chemical vapor deposition as an upper layer and having a hexagonal crystal lattice existing within the measurement range of the surface polished surface using a field emission scanning electron microscope Individually irradiated with an electron beam, and using an electron backscatter diffraction image apparatus, a predetermined region is a crystal plane of the crystal grain with respect to the normal of the surface polished surface at an interval of 0.1 μm / step (0001 ) Measure the tilt angle formed by the normal of the surface, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are divided for each pitch of 0.25 degrees and exist in each section In the inclination angle distribution graph obtained by summing up the frequencies to be detected , the highest peak exists in the inclination angle section within the range of 33.00 to 36.50 degrees or 39.00 to 43.00 degrees, and 12 to 22 degrees. The total number of frequencies within the range of Shows an inclination angle frequency distribution graph in a proportion of 45-73% of the total power at the fabric graph, and thickening modified α-type aluminum oxide layer having an average layer thickness of 16~30Myuemu,
A surface-coated cermet cutting tool that exhibits excellent chipping resistance with a thickened α-type aluminum oxide layer formed by vapor-depositing the hard coating layer composed of (a) and (b) above.
JP2005154805A 2005-05-27 2005-05-27 Surface-coated cermet cutting tool with excellent chipping resistance thanks to thick α-type aluminum oxide layer Expired - Fee Related JP4747385B2 (en)

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