JP4730703B2 - Surface-coated cermet cutting tool with excellent chipping resistance thanks to thick α-type aluminum oxide layer - Google Patents
Surface-coated cermet cutting tool with excellent chipping resistance thanks to thick α-type aluminum oxide layer Download PDFInfo
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この発明は、硬質被覆層の上部層、すなわち化学蒸着形成した状態でα型の結晶構造を有する酸化アルミニウム層（以下、α型Ａｌ2Ｏ3層で示す）を、特に厚膜化した状態で、各種の鋼や鋳鉄などの切削加工に用いた場合にも、すぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具（以下、被覆サーメット工具という）に関するものである。 In the present invention, an upper layer of a hard coating layer, that is, an aluminum oxide layer (hereinafter referred to as an α-type Al 2 O 3 layer) having an α-type crystal structure in a state where chemical vapor deposition is formed is particularly thick. The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent chipping resistance even when used for cutting various steels and cast iron.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層として、いずれも化学蒸着形成されたＴｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ０．５〜１０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、１〜１５μｍの平均層厚を有するα型Ａｌ2Ｏ3層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) As a lower layer, a Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition, Ti composed of one or more of a carbon oxide (hereinafter referred to as TiCO) layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer and having an overall average layer thickness of 0.5 to 10 μm Compound layer,
(B) an α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm as an upper layer;
There is known a coated cermet tool formed by vapor-depositing a hard coating layer composed of the above (a) and (b). It is well known to be used.
また、一般に、上記の被覆サーメット工具の硬質被覆層を構成するＴｉ化合物層やα型Ａｌ2 Ｏ3 層が粒状結晶組織を有し、さらに、前記Ｔｉ化合物層を構成するＴｉＣＮ層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、７００〜９５０℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
近年の切削装置のＦＡ化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削工具に対する使用寿命の一層の延命化を図る目的で、特に硬質被覆層を構成する上部層、すなわちすぐれた高温硬さと耐熱性を有するα型Ａｌ2 Ｏ3 層には一段の厚膜化が強く望まれているが、前記α型Ａｌ2 Ｏ3 層の層厚を従来実用に供されている最大平均層厚である１５μmを越えて厚膜化すると、Ａｌ2 Ｏ3 結晶粒が急激に粗大化し、かつ層自体の緻密性が著しく低下し、この結果高温強度の低下が避けられなくなることから、かかる厚膜化α型Ａｌ2 Ｏ3 層を硬質被覆層の上部層として蒸着形成してなる被覆サーメット工具においては、前記厚膜化α型Ａｌ2 Ｏ3 層が原因で、切刃部にチッピング（微少欠け）が発生し易くなり、この結果使用寿命のきわめて短いものとなることから、実用に供することができないのが現状である。 In recent years, the use of FA for cutting devices has been remarkable. On the other hand, there has been a strong demand for labor saving and energy saving and further cost reduction for cutting work, and with this purpose, especially for the purpose of further extending the service life of cutting tools. upper layer constituting the hard coating layer, i.e. excellent but the hot hardness and thickening of one step in the α-type the Al 2 O 3 layer having heat resistance is strongly demanded, of the α-type the Al 2 O 3 layer When the layer thickness exceeds 15 μm, which is the maximum average layer thickness that has been practically used in the past, the Al 2 O 3 crystal grains become coarser and the denseness of the layer itself is significantly reduced. since the decrease in the high-temperature strength can not be avoided, the coated cermet tool formed by depositing formed as an upper layer of such thickening α type the Al 2 O 3 layer a hard coating layer, the thickening α-type Al 2 O 3 layer due to chipping to the cutting edge (fine Chipping) is likely to occur, since it becomes very short for this result useful life, it can not be put to practical use at present.
そこで、本発明者等は、上述のような観点から、上記の従来被覆サーメット工具の硬質被覆層を構成する１〜１５μmの平均層厚を有するα型Ａｌ2Ｏ3層に着目し、これの層厚を平均層厚で１５μmを越えて厚膜化しても、前記厚膜化α型Ａｌ2Ｏ3層が原因のチッピングが切刃部に発生しない被覆サーメット工具を開発するべく研究を行った結果、
（ａ）工具基体の表面に、硬質被覆層としてのα型Ａｌ2Ｏ3層を蒸着形成するに際して、例えばこれの蒸着形成に先だって、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＡｌＣｌ3：３〜１０％、ＣＯ2：０．５〜３％、Ｃ2Ｈ4：０．０１〜０．３％、Ｈ2：残り、
反応雰囲気温度：７５０〜９００℃、
反応雰囲気圧力：３〜１３ｋＰａ、
の低温条件で、下部層であるＴｉ化合物層の表面にＡｌ2Ｏ3核を形成し、この場合前記Ａｌ2Ｏ3核は３０〜２００ｎｍの平均層厚を有するＡｌ2Ｏ3核薄膜であるのが望ましく、引き続いて、反応雰囲気を圧力：３〜１３ｋＰａの水素雰囲気に変え、反応雰囲気温度を１１００〜１２００℃に昇温した条件で前記Ａｌ2Ｏ3核薄膜に加熱処理を施した状態で、硬質被覆層としてのα型Ａｌ2Ｏ3層を通常の条件で、平均層厚で１５μmを越えた１６〜２８μmの層厚に形成すると、この結果の前記加熱処理Ａｌ2Ｏ3核薄膜上に蒸着形成された厚膜化α型Ａｌ2Ｏ3層（以下、厚膜化改質α型Ａｌ2Ｏ3層という）においては、平均層厚で１６〜２８μmの層厚に厚膜化したにもかかわらず、Ａｌ2Ｏ3結晶粒の粗大化が著しく抑制され、かつ層自体の緻密性も保持されたものになるので、高温強度の低下が抑制されるようになること。
Therefore, the present inventors focused on the α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm constituting the hard coating layer of the above-described conventional coated cermet tool from the above viewpoint, Research was conducted to develop a coated cermet tool in which chipping caused by the thickened α-type Al 2 O 3 layer does not occur at the cutting edge even if the layer thickness is increased to an average layer thickness exceeding 15 μm. result,
(A) When the α-type Al 2 O 3 layer as the hard coating layer is vapor-deposited on the surface of the tool base, for example, prior to the vapor-deposition formation,
Reaction gas composition:% by volume, AlCl 3 : 3 to 10%, CO 2 : 0.5 to 3%, C 2 H 4 : 0.01 to 0.3%, H 2 : remaining,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 3 to 13 kPa,
Under the low temperature conditions, Al 2 O 3 nuclei are formed on the surface of the lower Ti compound layer. In this case, the Al 2 O 3 nuclei are Al 2 O 3 nuclei thin films having an average layer thickness of 30 to 200 nm. Subsequently, the reaction atmosphere is changed to a hydrogen atmosphere at a pressure of 3 to 13 kPa, and the reaction atmosphere temperature is raised to 1100 to 1200 ° C., and the Al 2 O 3 core thin film is heated. When the α-type Al 2 O 3 layer as a hard coating layer is formed under a normal condition to a layer thickness of 16 to 28 μm exceeding an average layer thickness of 15 μm, the resulting heat-treated Al 2 O 3 core thin film In the thickened α-type Al 2 O 3 layer deposited on top (hereinafter referred to as the thickened modified α-type Al 2 O 3 layer), the thickness is increased to an average layer thickness of 16 to 28 μm. Nevertheless ized, Al 2 O 3 grain coarsening significantly suppressed, and Soji Since also those held denseness of, be like reduction in high-temperature strength can be suppressed.
（ｂ）上記の厚膜化改質α型Ａｌ2Ｏ3層、および上記の加熱処理Ａｌ2Ｏ3核薄膜の形成を行わないで、下部層であるＴｉ化合物層の表面に、通常の条件で１６〜２８μmの平均層厚で蒸着形成された厚膜化α型Ａｌ2Ｏ3層（以下、厚膜化通常α型Ａｌ2Ｏ3層という）について、電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）に概略説明図で示される通り、表面研磨面の測定範囲内に存在する六方晶結晶格子を有するα型Ａｌ2Ｏ3結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記厚膜化通常α型Ａｌ2Ｏ3層は、図３に例示される通り、（０００１）面の測定傾斜角の分布が０〜４５度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記加熱処理Ａｌ2Ｏ3核薄膜上に蒸着形成された厚膜化改質α型Ａｌ2Ｏ3層は、図２に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、このシャープな最高ピークは、前記Ａｌ2Ｏ3核薄膜の平均層厚を変化させることによりグラフ横軸の傾斜角区分に現れる位置が変わること。 (B) Without forming the above-described thickening-modified α-type Al 2 O 3 layer and the above-mentioned heat-treated Al 2 O 3 core thin film, on the surface of the Ti compound layer as the lower layer, normal conditions A thickened α-type Al 2 O 3 layer (hereinafter referred to as a “thickened normal α-type Al 2 O 3 layer”) deposited with an average thickness of 16 to 28 μm by using a field emission scanning electron microscope As shown schematically in FIGS. 1A and 1B, each α-type Al 2 O 3 crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam. Then, using the electron backscatter diffraction image apparatus, the normal of the (0001) plane, which is the crystal plane of the crystal grain, is made with respect to the normal of the surface-polished surface in a predetermined region at an interval of 0.1 μm / step. The tilt angle is measured, and the measured tilt angle within the range of 0 to 45 degrees is measured for each pitch of 0.25 degrees. When the inclination angle number distribution graph obtained by counting the frequencies existing in each section is created, the thickened normal α-type Al 2 O 3 layer is, as illustrated in FIG. The distribution of the measured inclination angle of the (0001) plane shows an unbiased inclination angle number distribution graph in the range of 0 to 45 degrees, whereas the thick film deposited on the heat-treated Al 2 O 3 core thin film In the modified α-type Al 2 O 3 layer, as illustrated in FIG. 2, a sharp maximum peak appears at a specific position in the tilt angle section, and this sharp maximum peak is the average of the Al 2 O 3 core thin film. By changing the layer thickness, the position that appears in the tilt angle section on the horizontal axis of the graph changes.
（ｃ）試験結果によれば、上記の厚膜化改質α型Ａｌ2Ｏ3層においては、上記Ａｌ2Ｏ3核薄膜の平均層厚を３０〜２００ｎｍとすると、上記シャープな最高ピークが傾斜角区分の１．２５〜１０．００度の範囲内に現れると共に、０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜９８％の割合を占める傾斜角度数分布グラフを示すようになり、したがって、傾斜角度数分布グラフで１．２５〜１０．００度の範囲内に傾斜角区分の最高ピークが現れ、かつ０〜１０度の範囲内に存在する度数割合が４５〜９８％の割合を占める厚膜化改質α型Ａｌ2Ｏ3層を硬質被覆層の上部層として、下部層のＴｉ化合物層と共存した状態で蒸着形成してなる被覆サーメット工具は、上記の厚膜化通常α型Ａｌ2Ｏ3層を蒸着形成した被覆サーメット工具に比して、特に切刃部にチッピングの発生なく、一段とすぐれた耐摩耗性を発揮するようになること。
以上（ａ）〜（ｃ）に示される研究結果を得たのである。
(C) According to the test results, in the above-mentioned thickening-modified α-type Al 2 O 3 layer, when the average layer thickness of the Al 2 O 3 core thin film is 30 to 200 nm, the sharp maximum peak is The sum of the frequencies appearing in the range of 1.25 to 10.00 degrees of the tilt angle section and existing in the range of 0 to 10 degrees represents a ratio of 45 to 98% of the total degrees in the tilt angle frequency distribution graph. An inclination angle number distribution graph is shown, and therefore, the highest peak of the inclination angle section appears in the range of 1.25 to 10.00 degrees in the inclination angle number distribution graph, and in the range of 0 to 10 degrees. A thickening- modified α-type Al 2 O 3 layer having a frequency ratio of 45 to 98% is deposited as an upper layer of the hard coating layer in the state of coexisting with the lower Ti compound layer. The coated cermet tool is the above-mentioned thickened normal α-type A 2 O 3 layer as compared with the vapor deposited the coated cermet tools and in particular without the occurrence of chipping in the cutting edge, more excellent becomes possible to exert abrasion resistance.
The research results shown in (a) to (c) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された工具基体の表面に、
（ａ）下部層として、いずれも化学蒸着形成された、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層または２層以上からなり、かつ０．５〜１０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、化学蒸着形成した状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、１．２５〜１０．００度の範囲内の傾斜角区分に最高ピークが存在すると共に、０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜９８％の割合を占める傾斜角度数分布グラフを示し、かつ１６〜２８μｍの平均層厚を有する厚膜化改質α型Ａｌ2Ｏ3層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる、硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and on the surface of a tool base composed of a WC-based cemented carbide or TiCN-based cermet,
(A) The lower layer is composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, all of which are formed by chemical vapor deposition, and a whole of 0.5 to 10 μm. A Ti compound layer having an average layer thickness;
(B) As an upper layer, each crystal grain having a hexagonal crystal lattice which has an α-type crystal structure in a state where chemical vapor deposition is formed, and which exists within the measurement range of the surface polished surface using a field emission scanning electron microscope An electron backscattered diffraction image apparatus is used to irradiate the substrate with a predetermined region of the crystal grain with respect to the normal of the surface polished surface at an interval of 0.1 μm / step (0001). The tilt angle formed by the normal of the surface is measured, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are divided for each pitch of 0.25 degrees and exist in each section. In the inclination angle distribution graph obtained by counting the frequencies, the highest peak exists in the inclination angle section within the range of 1.25 to 10.00 degrees, and the total of the frequencies existing within the range of 0 to 10 degrees is , the overall power in the inclination angle frequency distribution graph 45-9 % Of indicated inclination angle frequency distribution graph in a proportion, and. 16 to 28 [mu] m average thickness thicker reforming α type the Al 2 O 3 layer having a,
The hard coating layer formed by vapor deposition of the hard coating layer composed of (a) and (b) above is characterized by a coated cermet tool that exhibits excellent chipping resistance.
また、この発明の被覆サーメット工具の硬質被覆層の構成層において、上記の通りに数値限定した理由を以下に説明する。
（ａ）Ｔｉ化合物層
Ｔｉ化合物層は、基本的には厚膜化改質α型Ａｌ2Ｏ3層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層の高温強度向上に寄与するほか、工具基体と厚膜化改質α型Ａｌ2Ｏ3層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性を向上させる作用を有するが、その平均層厚が０．５μｍ未満では、前記作用を十分に発揮させることができず、一方その平均層厚が１０μｍを越えると、切削時の発生熱による熱塑性変形量が許容範囲を越えて大きくなり、この結果上部層である厚膜化改質α型Ａｌ2Ｏ3層に割れが発生し易くなることから、その平均層厚を０．５〜１０μｍと定めた。
In addition, the reason why the numerical values of the constituent layers of the hard coating layer of the coated cermet tool of the present invention are limited as described above will be described below.
(A) Ti compound layer The Ti compound layer basically exists as a lower layer of the thickening-modified α-type Al 2 O 3 layer, and the high temperature strength of the hard coating layer is improved by its excellent high temperature strength. In addition to the tool substrate and the thickened modified α-type Al 2 O 3 layer, and thus has an effect of improving the adhesion of the hard coating layer to the tool substrate. If the thickness is less than 0.5 μm, the above-mentioned effect cannot be sufficiently exerted. On the other hand, if the average layer thickness exceeds 10 μm, the amount of thermoplastic deformation caused by heat generated during cutting increases beyond the allowable range. As a result, cracks are likely to occur in the thickened reformed α-type Al 2 O 3 layer, which is the upper layer, so the average layer thickness was determined to be 0.5 to 10 μm.
（ｂ）厚膜化改質α型Ａｌ2Ｏ3層
上記の通り加熱処理Ａｌ2Ｏ3核薄膜上に形成された厚膜化改質α型Ａｌ2Ｏ3層には、Ａｌ2Ｏ3自体のもつすぐれた高温硬度と耐熱性によって硬質被覆層の耐摩耗性を向上させると共に、厚膜化通常α型Ａｌ2Ｏ3層に比して、一段とすぐれた高温強度を有するので、厚膜化した硬質被覆層にチッピングが発生するのを抑制する作用があるが、その平均層厚が１６μｍ未満では厚膜化の要求に十分満足に対応することができず、一方その平均層厚が２８μｍを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を１６〜２８μｍと定めた。
(B) Thickened modified α-type Al 2 O 3 layer As described above, the thickened modified α-type Al 2 O 3 layer formed on the heat-treated Al 2 O 3 core thin film includes Al 2 O 3 The high temperature hardness and heat resistance of its own improve the wear resistance of the hard coating layer, and it has a higher temperature strength than that of the normal α-type Al 2 O 3 layer. However, if the average layer thickness is less than 16 μm, it cannot sufficiently satisfy the demand for thickening, while the average layer thickness is 28. When the thickness exceeds μm, the chipping tends to occur. Therefore, the average layer thickness is set to 16 to 28 μm.
（ｃ）加熱処理Ａｌ2Ｏ3核薄膜
この発明の被覆サーメット工具の硬質被覆層を構成する厚膜化改質α型Ａｌ2Ｏ3層に関して、傾斜角度数分布グラフで最高ピークを示す傾斜角区分と加熱処理Ａｌ2Ｏ3核薄膜の平均層厚との間には密接な関係があり、この場合試験結果によれば、前記加熱処理Ａｌ2Ｏ3核薄膜の平均層厚を３０〜２００ｎｍの範囲で変化させると、最高ピークが１．２５〜１０．００度の範囲内の傾斜角区分に現れると共に、０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜９８％の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記加熱処理Ａｌ2Ｏ3核薄膜の平均層厚が、３０ｎｍ未満では、これの上に蒸着形成される厚膜化改質α型Ａｌ2Ｏ3層の傾斜角度数分布グラフの１．２５〜１０．００度の範囲内に現れるピーク高さが不十分、すなわち、前記０〜１０度の範囲内に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の４５％未満となる場合が生じ、この場合上記の通り、前記厚膜化改質α型Ａｌ2Ｏ3層の高温強度を、上記の従来被覆サーメット工具の硬質被覆層の上部層を構成するα型Ａｌ2Ｏ3層、すなわち１〜１５μmの平均層厚を有するα型Ａｌ2Ｏ3層の具備する高温強度と同等の高温強度を保持することができず、この結果耐チッピング性が低下するようになり、一方その平均層厚が、２００ｎｍを越えると最高ピークの現れる傾斜角区分が１．２５〜１０．００度の範囲から外れる場合が生じ、この場合も前記厚膜化改質α型Ａｌ2Ｏ3層の高温強度の低下が避けられなくなることから、硬質被覆層の下部層であるＴｉ化合物層上に形成される前記Ａｌ2Ｏ3核薄膜の平均層厚を３０〜２００ｎｍ、望ましくは同３０〜１５０ｎｍとしたのである。
(C) Heat-treated Al 2 O 3 core thin film For the thickened modified α-type Al 2 O 3 layer constituting the hard coating layer of the coated cermet tool of the present invention, the inclination angle showing the highest peak in the inclination angle number distribution graph There is a close relationship between the classification and the average layer thickness of the heat-treated Al 2 O 3 core thin film. In this case, according to the test results, the average layer thickness of the heat-treated Al 2 O 3 core thin film is 30 to 200 nm. The maximum peak appears in the inclination angle section within the range of 1.25 to 10.00 degrees, and the total of the frequencies existing within the range of 0 to 10 degrees is represented in the inclination angle number distribution graph. An inclination angle number distribution graph occupying a ratio of 45 to 98% of the entire frequency is shown. Therefore, when the average layer thickness of the heat-treated Al 2 O 3 nuclear thin film is less than 30 nm, the upper Thickened reformed α-type A The peak height appearing in the range of 1.25 to 10.00 degrees of the inclination angle number distribution graph of the l 2 O 3 layer is insufficient, that is, the total ratio of the frequencies existing in the range of 0 to 10 degrees is In some cases , the angle is less than 45% of the entire frequency in the inclination angle distribution graph. In this case, as described above, the high-temperature strength of the thickening-modified α-type Al 2 O 3 layer is the same as that of the conventional coated cermet tool. hard layer α type the Al 2 O 3 layer constituting the upper layer, that can hold an average layer thickness-temperature strength equivalent to that of the high temperature strength comprising the α-type the Al 2 O 3 layer having the 1~15μm As a result, the chipping resistance is lowered. On the other hand, when the average layer thickness exceeds 200 nm, the slope angle section where the highest peak appears may be out of the range of 1.25 to 10.00 degrees. the thickening modified α type the Al 2 O 3 layer may Since the decrease in the high-temperature strength can not be avoided, the Al 2 O 3 Average layer thickness of 30 to 200 nm nuclear thin film formed on the Ti compound layer as the lower layer of the hard coating layer, preferably the same 30~150nm It was.
なお、被覆サーメット工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、硬質被覆層の最表面層として必要に応じて蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由からである。 For the purpose of identification before and after the use of the coated cermet tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer, but the average layer thickness in this case 0.1-1 μm may be sufficient, because if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient with an average layer thickness of up to 1 μm. .
この発明の被覆サーメット工具は、これの硬質被覆層を構成する厚膜化改質α型Ａｌ2Ｏ3層が、図２に例示される通り１．２５〜１０．００度の範囲内の傾斜角区分に最高ピークが現れる傾斜角度数分布グラフを示し、平均層厚で１６〜２８μmの層厚に厚膜化されても、すぐれた耐チッピング性を発揮することから、各種の鋼や鋳鉄の切削加工で、すぐれた耐摩耗性を長期に亘って発揮し、使用寿命の一段の延命化を可能とするものである。 In the coated cermet tool of the present invention, the thickened modified α-type Al 2 O 3 layer constituting the hard coating layer thereof is inclined in the range of 1.25 to 10.00 degrees as illustrated in FIG. An inclination angle distribution graph in which the highest peak appears in the angular section is shown, and even if it is thickened to an average layer thickness of 16 to 28 μm, it exhibits excellent chipping resistance. In this cutting process, excellent wear resistance is exhibited over a long period of time, and the service life can be further extended.
つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。 Next, the coated cermet tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3 Ｃ2 粉末、ＴｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ，ＢおよびＤ〜Ｆをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders were blended into the composition shown in Table 1, added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and pressed into a green compact with a predetermined shape at a pressure of 98 MPa. The green compact was vacuum sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge portion was R: 0.07 mm honing By processing, tool bases A, B, and D to F made of a WC-base cemented carbide having a throwaway tip shape specified in ISO · CNMG120408 were produced.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2 Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN-based cermet having a standard / CNMG12041 chip shape were formed.
ついで、これらの工具基体Ａ，ＢおよびＤ〜Ｆおよび工具基体ａ〜ｆのそれぞれを、Ａｌ2Ｏ3核薄膜層厚測定用試験片と共に、通常の化学蒸着装置に装入し、まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される通常の条件にて、表４に示される目標層厚のＴｉ化合物層を硬質被覆層の下部層として蒸着形成し、ついで、
反応ガス組成：容量％で、ＡｌＣｌ3：６．５％、ＣＯ2：１．６％、Ｃ2Ｈ4：０．１３％、Ｈ2：残り、
反応雰囲気温度：８２０℃、
反応雰囲気圧力：８ｋＰａ、
時間：５〜８０分の範囲内のＡｌ2Ｏ3核薄膜の層厚に対応した時間、
の低温条件で表４に示される目標層厚のＡｌ2Ｏ3核薄膜を形成した後（前記Ａｌ2Ｏ3核薄膜の層厚と処理時間の関係は上記Ｔｉ化合物層の場合と同様に実験により予め調査されている）、反応雰囲気を圧力：８ｋＰａの水素雰囲気に変え、反応雰囲気温度を１１３５℃に昇温した条件で前記Ａｌ2Ｏ3核薄膜に加熱処理を施して加熱処理Ａｌ2Ｏ3核薄膜とし、
この時点で前記試験片を装置から取り出し、引続いて、同じく表３に示される通常の条件で、同じく表４に示される目標層厚の厚膜化改質α型Ａｌ2Ｏ3層を硬質被覆層の上部層として蒸着形成することにより本発明被覆サーメット工具１〜１２をそれぞれ製造した。
Next, each of the tool bases A, B and D to F and the tool bases a to f together with test pieces for measuring the thickness of the Al 2 O 3 nuclear thin film layer was loaded into a normal chemical vapor deposition apparatus. 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically grown crystal structure described in JP-A-6-8010, and the other conditions for forming a normal granular crystal structure are described below. Under the normal conditions shown in Table 4), a Ti compound layer having a target layer thickness shown in Table 4 is formed as a lower layer of the hard coating layer, and then,
Reaction gas composition: volume%, AlCl 3 : 6.5%, CO 2 : 1.6%, C 2 H 4 : 0.13%, H 2 : remaining,
Reaction atmosphere temperature: 820 ° C.
Reaction atmosphere pressure: 8 kPa,
Time: Time corresponding to the layer thickness of the Al 2 O 3 core thin film in the range of 5 to 80 minutes,
After forming the Al 2 O 3 nucleus thin film having the target layer thickness shown in Table 4 under the low temperature conditions (the relationship between the layer thickness of the Al 2 O 3 nucleus thin film and the treatment time is the same as in the case of the Ti compound layer) The reaction atmosphere is changed to a hydrogen atmosphere with a pressure of 8 kPa and the reaction atmosphere temperature is raised to 1135 ° C., and the Al 2 O 3 core thin film is subjected to heat treatment to heat-treat Al 2 O. 3 nuclear thin film,
At this time, the test piece is taken out from the apparatus, and subsequently the thickened modified α-type Al 2 O 3 layer having the target layer thickness shown in Table 4 is hardened under the normal conditions shown in Table 3 as well. The coated cermet tools 1 to 12 of the present invention were produced by vapor deposition as the upper layer of the coating layer.
また、比較の目的で、表５に示される通り、上記のＡｌ2Ｏ3核薄膜の形成およびこれの加熱処理を行なわず、硬質被覆層の上部層として厚膜化通常α型Ａｌ2Ｏ3層を形成する以外は同一の条件で、比較被覆サーメット工具１〜１２をそれぞれ製造した。 For comparison purposes, as shown in Table 5, the formation of the above-described Al 2 O 3 core thin film and the heat treatment thereof are not performed, and the thickened normal α-type Al 2 O 3 is used as the upper layer of the hard coating layer. Comparative coated cermet tools 1 to 12 were produced under the same conditions except that the layers were formed.
さらに、上記の本発明被覆サーメット工具１〜１２および比較被覆サーメット工具１〜１２の硬質被覆層を構成する厚膜化改質α型Ａｌ2Ｏ3層および厚膜化通常α型Ａｌ2Ｏ3層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の各種厚膜化α型Ａｌ2Ｏ3層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射し、電子後方散乱回折像装置を用いて、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Further, the thickened modified α-type Al 2 O 3 layer and the thickened normal α-type Al 2 O 3 constituting the hard coating layers of the above-described coated cermet tools 1 to 12 of the present invention and the comparative coated cermet tools 1 to 12 About the layer, the inclination angle number distribution graph was each created using the field emission scanning electron microscope.
That is, the inclination angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope in a state where the surface of each of the various thickened α-type Al 2 O 3 layers is a polished surface. An electron backscattered diffraction image is obtained by irradiating an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 ° to an individual crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface with an irradiation current of 1 nA. Using an apparatus, an inclination angle formed by a normal line of the (0001) plane that is a crystal plane of the crystal grain with respect to a normal line of the surface-polished surface in a 30 × 50 μm region at an interval of 0.1 μm / step Based on the measurement result, the measurement inclination angle within the range of 0 to 45 degrees is divided into 0.25 degree pitches among the measurement inclination angles, and the frequency existing in each division is measured. Created by counting.
この結果得られた各種の厚膜化α型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、（０００１）面が最高ピークを示す傾斜角区分、並びに０〜１０度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合をそれぞれ表４，５にそれぞれ示した。 In the gradient angle distribution graphs of the various thickened α-type Al 2 O 3 layers obtained as a result, the inclination angle section in which the (0001) plane shows the highest peak, and the inclination angle section within the range of 0 to 10 degrees. Tables 4 and 5 show the ratio of the number of tilt angles existing in the tilt angle number distribution graph to the entire tilt angle number distribution graph.
上記の各種の厚膜化α型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、表４，５にそれぞれ示される通り、本発明被覆サーメット工具の加熱処理Ａｌ2Ｏ3核薄膜上に形成された厚膜化改質α型Ａｌ2Ｏ3層は、いずれも（０００１）面の測定傾斜角の分布が１．２５〜１０．００度の範囲内の傾斜角区分に最高ピークが現れ、かつ０〜１０度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が４５〜９８％である傾斜角度数分布グラフを示すのに対して、比較被覆サーメット工具の厚膜化通常α型Ａｌ2Ｏ3層は、いずれも（０００１）面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在せず、０〜１０度の範囲内の傾斜角区分内に存在する傾斜角度数の割合も３０％以下である傾斜角度数分布グラフを示すものであった。
なお、図２は、本発明被覆サーメット工具７の厚膜化改質α型Ａｌ2Ｏ3層の傾斜角度数分布グラフ、図３は、比較被覆サーメット工具７の厚膜化通常α型Ａｌ2Ｏ3層の傾斜角度数分布グラフをそれぞれ示すものである。
In the gradient angle number distribution graphs of the various thickened α-type Al 2 O 3 layers described above, as shown in Tables 4 and 5, the heat-treated Al 2 O 3 core thin film of the coated cermet tool of the present invention was formed. In each of the thickening-modified α-type Al 2 O 3 layers, the highest peak appears in the tilt angle section where the distribution of measured tilt angles on the (0001) plane is in the range of 1.25 to 10.00 degrees, and While the inclination angle number distribution graph in which the ratio of the inclination angle number existing in the inclination angle section within the range of 0 to 10 degrees is 45 to 98% is shown, the comparatively coated cermet tool is made thicker in the normal α type All Al 2 O 3 layers are unbiased in the distribution of the measured inclination angle of the (0001) plane within the range of 0 to 45 degrees, the highest peak does not exist, and the inclination angle section within the range of 0 to 10 degrees. An inclination angle number distribution graph in which the ratio of the number of inclination angles existing within is 30% or less There was.
Incidentally, FIG. 2, the inclination angle frequency distribution graph of the present invention thickened modified α type the Al 2 O 3 layer of the coated cermet tool 7, FIG. 3 is thickened usually α-type Al 2 comparative coated cermet tool 7 The graph of the distribution of the number of inclination angles of the O 3 layer is shown.
また、この結果得られた本発明被覆サーメット工具１〜１２および比較被覆サーメット工具１〜１２の硬質被覆層の構成層の厚さ、並びに上記の試験片の加熱処理Ａｌ2Ｏ3核薄膜の厚さを、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Further, the resulting present invention coated cermet tools 1 to 12 and Comparative coated cermet tool 1-12 hard layer structure layer thickness, as well as the thickness of the heat treatment Al 2 O 3 nuclei film of the test piece When measured using a scanning electron microscope (longitudinal section measurement), all showed an average layer thickness (average value of five-point measurement) substantially the same as the target layer thickness.
つぎに、上記の各種の被覆サーメット工具をいずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆サーメット工具１〜１２および比較被覆サーメット工具１〜１２について、
被削材：ＪＩＳ・ＳＣＭ４４０の長さ方向等間隔４本縦溝入り丸棒、
切削速度：２５０ｍ／ｍｉｎ、
切り込み：２ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：１０分、
の条件（切削条件Ａという）での合金鋼の乾式断続切削試験、
被削材：ＪＩＳ・Ｓ４５Ｃの丸棒、
切削速度：２８０ｍ／ｍｉｎ、
切り込み：２ｍｍ、
送り：０．３５ｍｍ／ｒｅｖ、
切削時間：１５分、
の条件（切削条件Ｂという）での炭素鋼の乾式連続切削試験、さらに、
被削材：ＪＩＳ・ＦＣ３００の丸棒、
切削速度：３００ｍ／ｍｉｎ、
切り込み：２．５ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：１５分、
の条件（切削条件Ｃという）での鋳鉄の乾式連続切削試験を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表６に示した。
Next, in the state where each of the above various coated cermet tools is screwed to the tip of the tool steel tool with a fixing jig, the present coated cermet tools 1 to 12 and the comparative coated cermet tools 1 to 12 ,
Work material: JIS · SCM440 lengthwise equidistant 4 vertical grooved round bar,
Cutting speed: 250 m / min,
Cutting depth: 2mm,
Feed: 0.3mm / rev,
Cutting time: 10 minutes,
Dry interrupted cutting test of alloy steel under the following conditions (referred to as cutting condition A),
Work material: JIS / S45C round bar,
Cutting speed: 280 m / min,
Cutting depth: 2mm,
Feed: 0.35mm / rev,
Cutting time: 15 minutes,
Dry continuous cutting test of carbon steel under the conditions (referred to as cutting condition B),
Work material: JIS / FC300 round bar,
Cutting speed: 300 m / min,
Incision: 2.5mm,
Feed: 0.3mm / rev,
Cutting time: 15 minutes,
The dry continuous cutting test of cast iron was performed under the above conditions (referred to as cutting condition C), and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 6.
表４〜６に示される結果から、本発明被覆サーメット工具１〜１２は、いずれも硬質被覆層の上部層が、（０００１）面の傾斜角が１．２５〜１０．００度の範囲内の傾斜角区分で最高ピークを示すと共に、０〜１０度の範囲内に存在する合計度数割合が４５〜９８％を占める傾斜角度数分布グラフを示す厚膜化改質α型Ａｌ2Ｏ3層で構成され、平均層厚で１６〜２８μmと厚膜化したにもかかわらず、鋼や鋳鉄の切削加工で、前記厚膜化改質α型Ａｌ2Ｏ3層がすぐれた耐チッピング性を発揮し、切刃部のチッピング発生が著しく抑制され、長期に亘ってすぐれた耐摩耗性を示し、使用寿命の延命化を可能とするのに対して、硬質被覆層の上部層が、（０００１）面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す厚膜化通常α型Ａｌ2Ｏ3層で構成された比較被覆サーメット工具１〜１２においては、いずれも前記厚膜化通常α型Ａｌ2Ｏ3層が平均層厚で１６〜２８μmと厚膜化すると、これの高温強度低下が著しく、この結果切刃部にチッピングが発生し、短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4 to 6, in the coated cermet tools 1 to 12 of the present invention, the upper layer of the hard coating layer is within the range where the inclination angle of the (0001) plane is 1.25 to 10.00 degrees. In the thickened modified α-type Al 2 O 3 layer showing the highest peak in the inclination angle section and showing the inclination angle number distribution graph in which the total frequency ratio existing in the range of 0 to 10 degrees occupies 45 to 98% Despite being composed and having an average layer thickness of 16 to 28 μm, the thickened modified α-type Al 2 O 3 layer exhibits excellent chipping resistance when cutting steel and cast iron. However, the occurrence of chipping at the cutting edge is remarkably suppressed, and excellent wear resistance is exhibited over a long period of time, and the service life can be extended. On the other hand, the upper layer of the hard coating layer is (0001) The distribution of the measured inclination angle of the surface is unbiased within the range of 0 to 45 degrees, and the highest peak exists In no inclination angle frequency distribution thickening Comparison coated cermet tool 1-12 usually composed of α-type the Al 2 O 3 layer showing a graph, both the thickened usually α type the Al 2 O 3 layer is the average layer When the thickness is increased to 16 to 28 μm, the high-temperature strength is significantly reduced. As a result, it is apparent that chipping occurs at the cutting edge and the service life is reached in a short time.
上述のように、この発明の被覆サーメット工具は、これの硬質被覆層の上部層であるα型Ａｌ2Ｏ3層の層厚を平均層厚で１６〜２８μmに厚くしても、各種の鋼や鋳鉄などの切削加工で、すぐれた耐チッピング性を示し、長期に亘ってすぐれた耐摩耗性を発揮し、使用寿命の延命化を可能とするものであるから、切削加工のＦＡ化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool of the present invention can be used in various ways even if the layer thickness of the α-type Al 2 O 3 layer, which is the upper layer of the hard coating layer, is increased to an average layer thickness of 16 to 28 μm. In cutting work such as steel and cast iron, it exhibits excellent chipping resistance, exhibits excellent wear resistance over a long period of time, and can extend the service life. It can fully satisfy the labor-saving and energy-saving of cutting and cost reduction.
Claims (1)
（ａ）下部層として、いずれも化学蒸着形成されたＴｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ０．５〜１０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、化学蒸着形成された状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、１．２５〜１０．００度の範囲内の傾斜角区分に最高ピークが存在すると共に、０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜９８％の割合を占める傾斜角度数分布グラフを示し、かつ１６〜２８μｍの平均層厚を有する厚膜化改質α型酸化アルミニウム層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる、厚膜化α型酸化アルミニウム層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。 On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) As a lower layer, each consists of one or two or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride oxide layer formed by chemical vapor deposition, And a Ti compound layer having an overall average layer thickness of 0.5 to 10 μm,
(B) Crystal grains having an α-type crystal structure in the state of chemical vapor deposition as an upper layer and having a hexagonal crystal lattice existing within the measurement range of the surface polished surface using a field emission scanning electron microscope Individually irradiated with an electron beam, and using an electron backscatter diffraction image apparatus, a predetermined region is a crystal plane of the crystal grain with respect to the normal of the surface polished surface at an interval of 0.1 μm / step (0001 ) Measure the tilt angle formed by the normal of the surface, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are divided for each pitch of 0.25 degrees and exist in each section In the inclination angle distribution graph obtained by summing up the frequencies to be performed, the highest peak exists in the inclination angle section within the range of 1.25 to 10.00 degrees, and the total of the frequencies existing within the range of 0 to 10 degrees but 45 of the total power at the inclination angle frequency distribution graph - It shows an inclination angle frequency distribution graph in a proportion of 8%, and. 16 to 28 [mu] m average thickness thicker reforming α-type aluminum oxide layer having a,
A surface-coated cermet cutting tool that exhibits excellent chipping resistance with a thickened α-type aluminum oxide layer formed by vapor-depositing the hard coating layer composed of (a) and (b) above.
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