JP4446030B2 - 液中プラズマ発生装置および液中プラズマ発生方法 - Google Patents
液中プラズマ発生装置および液中プラズマ発生方法 Download PDFInfo
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- JP4446030B2 JP4446030B2 JP2003339641A JP2003339641A JP4446030B2 JP 4446030 B2 JP4446030 B2 JP 4446030B2 JP 2003339641 A JP2003339641 A JP 2003339641A JP 2003339641 A JP2003339641 A JP 2003339641A JP 4446030 B2 JP4446030 B2 JP 4446030B2
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- 239000007788 liquid Substances 0.000 title claims description 56
- 238000000034 method Methods 0.000 title claims description 16
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 238000002604 ultrasonography Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
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- 238000007740 vapor deposition Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
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- 238000006243 chemical reaction Methods 0.000 description 2
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- 239000010432 diamond Substances 0.000 description 2
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910003472 fullerene Inorganic materials 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 150000002013 dioxins Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
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- Plasma Technology (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Description
2.容器
3.液体
4.電磁波照射手段
5a、5b.電極
6.高周波供給装置
7.超音波照射手段
8.超音波反射板
9.気泡
10.マイクロ波集中装置
Claims (3)
- 液体を保持するための容器と、液体中に電磁波を照射するための電磁波照射手段と、液体中で気泡を発生させるための気泡発生手段と、気泡を電磁波照射手段の近くに保持するための気泡保持手段を有し、前記気泡保持手段が気泡を挟んで上下に配置された超音波照射手段と超音波反射板の対であり、気泡に電磁波を照射して気泡中にプラズマを発生させる液中プラズマ発生装置。
- 導電性の液体中で気泡を発生させるとともに上下に配置された超音波照射手段と超音波反射板の対によってその気泡を電磁波照射手段の近くに保持し、気泡に電磁波を照射して気泡中にプラズマを発生させる液中プラズマ発生方法。
- 導電性の液体として水溶液を用いる請求項2に記載の液中プラズマ発生方法。
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JP2003339641A JP4446030B2 (ja) | 2003-09-30 | 2003-09-30 | 液中プラズマ発生装置および液中プラズマ発生方法 |
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JP2003339641A JP4446030B2 (ja) | 2003-09-30 | 2003-09-30 | 液中プラズマ発生装置および液中プラズマ発生方法 |
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JP2009114083A Division JP4517098B2 (ja) | 2009-05-11 | 2009-05-11 | 液中プラズマ発生方法 |
Publications (2)
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JP2005108600A JP2005108600A (ja) | 2005-04-21 |
JP4446030B2 true JP4446030B2 (ja) | 2010-04-07 |
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JP2003339641A Expired - Lifetime JP4446030B2 (ja) | 2003-09-30 | 2003-09-30 | 液中プラズマ発生装置および液中プラズマ発生方法 |
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JP (1) | JP4446030B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013150959A1 (ja) | 2012-04-02 | 2013-10-10 | 株式会社Taane | 水素プラズマ場発生方法および発生装置 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004306029A (ja) * | 2003-03-27 | 2004-11-04 | Techno Network Shikoku Co Ltd | 化学反応装置および有害物質分解方法 |
JP2005235662A (ja) * | 2004-02-23 | 2005-09-02 | Techno Network Shikoku Co Ltd | 液中プラズマ装置および液中プラズマ発生方法 |
JP5286517B2 (ja) * | 2006-09-15 | 2013-09-11 | 国立大学法人長岡技術科学大学 | 溶液プラズマ反応装置及び該装置を使用したナノ材料の製造方法 |
JP4915697B2 (ja) * | 2007-06-14 | 2012-04-11 | 株式会社豊田自動織機 | 液中プラズマを用いた成膜方法および液中プラズマ成膜装置 |
JP4982658B2 (ja) * | 2007-09-21 | 2012-07-25 | 本多電子株式会社 | 液中プラズマ処理装置、及び液中プラズマ処理方法 |
ES2301441B1 (es) * | 2007-11-14 | 2009-02-01 | Fidel Franco Gonzalez | Procedimiento y aparato para el aprovechamiento del hidrogeno. |
US8349142B2 (en) | 2008-03-26 | 2013-01-08 | Masaru Hori | Method for producing graphene |
JP5083825B2 (ja) * | 2008-06-27 | 2012-11-28 | 独立行政法人産業技術総合研究所 | 液体中プラズマ放電装置 |
JP4517098B2 (ja) * | 2009-05-11 | 2010-08-04 | 国立大学法人愛媛大学 | 液中プラズマ発生方法 |
WO2012147334A1 (ja) | 2011-04-28 | 2012-11-01 | 国立大学法人愛媛大学 | ナノ粒子製造装置、ナノ粒子製造方法、ナノ粒子、亜鉛/酸化亜鉛ナノ粒子および水酸化マグネシウムナノ粒子 |
JP5875413B2 (ja) * | 2012-03-06 | 2016-03-02 | 株式会社アルバック | 金属微粒子の製造方法 |
-
2003
- 2003-09-30 JP JP2003339641A patent/JP4446030B2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013150959A1 (ja) | 2012-04-02 | 2013-10-10 | 株式会社Taane | 水素プラズマ場発生方法および発生装置 |
WO2013150581A1 (ja) | 2012-04-02 | 2013-10-10 | 株式会社Taane | 水素プラズマ発生方法および発生装置 |
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