JP4444022B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP4444022B2 JP4444022B2 JP2004194016A JP2004194016A JP4444022B2 JP 4444022 B2 JP4444022 B2 JP 4444022B2 JP 2004194016 A JP2004194016 A JP 2004194016A JP 2004194016 A JP2004194016 A JP 2004194016A JP 4444022 B2 JP4444022 B2 JP 4444022B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- circuit board
- bump
- metal
- bumps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
- H01L2224/1134—Stud bumping, i.e. using a wire-bonding apparatus
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01046—Palladium [Pd]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
Landscapes
- Wire Bonding (AREA)
Description
また、半導体チップのバンプに予め熱可塑性樹脂をコーティングしたものを、回路基板に対してフリップチップ接続する技術が、例えば、特開平6−151502号公報に記載されている。(特許文献2)
2 半導体回路形成部 12 回路基板
3 電極パッド 13 電極端子
4 パッシベーション膜 14 アンダーフィル樹脂
5 アンダーバンプメタル
6 フォトレジスト
7 めっき金属バンプ
8 絶縁膜
9 スタッドバンプ
10 半導体チップ
Claims (3)
- 複数の突起金属電極を有する半導体素子を、回路基板にフェイスダウン実装する半導体装置の製造方法において、
該突起金属電極の頭頂部を平坦かつ平滑にする工程と、
少なくとも該突起金属電極の表面部全面を固化した絶縁膜により被覆する工程と、
半導体素子の突起金属電極と回路基板上に形成された電極端子を対向配置する工程と、
該絶縁膜により被覆された該突起金属電極を該電極端子に接触させた状態で、該半導体素子に荷重及び超音波振動を印加して該突起金属電極と該回路基板の電極端子とを接合する工程を含むことを特徴とする半導体装置の製造方法。 - 前記絶縁膜とポリパラキシリレン樹脂を使用することを特徴とする請求項1に記載の半導体装置の製造方法。
- 半導体素子に荷重を印加する前に、半導体素子と回路基板との間に熱硬化性樹脂接着材を介在させる工程を含むことを特徴とする請求項1又は2に記載の半導体装置の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004194016A JP4444022B2 (ja) | 2004-06-30 | 2004-06-30 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004194016A JP4444022B2 (ja) | 2004-06-30 | 2004-06-30 | 半導体装置の製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009260673A Division JP5152157B2 (ja) | 2009-11-16 | 2009-11-16 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006019398A JP2006019398A (ja) | 2006-01-19 |
JP4444022B2 true JP4444022B2 (ja) | 2010-03-31 |
Family
ID=35793402
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004194016A Expired - Fee Related JP4444022B2 (ja) | 2004-06-30 | 2004-06-30 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4444022B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI520288B (zh) * | 2011-10-04 | 2016-02-01 | 頎邦科技股份有限公司 | 半導體結構及其封裝構造 |
CN103035608A (zh) * | 2011-10-08 | 2013-04-10 | 颀邦科技股份有限公司 | 半导体结构及其封装构造 |
-
2004
- 2004-06-30 JP JP2004194016A patent/JP4444022B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2006019398A (ja) | 2006-01-19 |
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