JP4429974B2 - レーザ加工方法および装置 - Google Patents

レーザ加工方法および装置 Download PDF

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Publication number
JP4429974B2
JP4429974B2 JP2005178286A JP2005178286A JP4429974B2 JP 4429974 B2 JP4429974 B2 JP 4429974B2 JP 2005178286 A JP2005178286 A JP 2005178286A JP 2005178286 A JP2005178286 A JP 2005178286A JP 4429974 B2 JP4429974 B2 JP 4429974B2
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JP
Japan
Prior art keywords
laser
wavelengths
light
laser processing
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005178286A
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English (en)
Japanese (ja)
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JP2006350123A (ja
JP2006350123A5 (enExample
Inventor
聡明 松沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2005178286A priority Critical patent/JP4429974B2/ja
Priority to TW095120968A priority patent/TWI367800B/zh
Priority to KR1020060053453A priority patent/KR101287982B1/ko
Priority to CN2009102219116A priority patent/CN101722364B/zh
Priority to CN2006100922014A priority patent/CN1880004B/zh
Publication of JP2006350123A publication Critical patent/JP2006350123A/ja
Publication of JP2006350123A5 publication Critical patent/JP2006350123A5/ja
Application granted granted Critical
Publication of JP4429974B2 publication Critical patent/JP4429974B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2005178286A 2005-06-17 2005-06-17 レーザ加工方法および装置 Expired - Fee Related JP4429974B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005178286A JP4429974B2 (ja) 2005-06-17 2005-06-17 レーザ加工方法および装置
TW095120968A TWI367800B (en) 2005-06-17 2006-06-13 Laser beam machining method and apparatus
KR1020060053453A KR101287982B1 (ko) 2005-06-17 2006-06-14 레이저 가공 방법 및 장치
CN2009102219116A CN101722364B (zh) 2005-06-17 2006-06-14 激光加工方法和装置
CN2006100922014A CN1880004B (zh) 2005-06-17 2006-06-14 激光加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005178286A JP4429974B2 (ja) 2005-06-17 2005-06-17 レーザ加工方法および装置

Publications (3)

Publication Number Publication Date
JP2006350123A JP2006350123A (ja) 2006-12-28
JP2006350123A5 JP2006350123A5 (enExample) 2008-07-31
JP4429974B2 true JP4429974B2 (ja) 2010-03-10

Family

ID=37518481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005178286A Expired - Fee Related JP4429974B2 (ja) 2005-06-17 2005-06-17 レーザ加工方法および装置

Country Status (2)

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JP (1) JP4429974B2 (enExample)
CN (1) CN1880004B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100761238B1 (ko) * 2007-03-13 2007-09-27 에스엔유 프리시젼 주식회사 레이저빔 가공장치
JP5086687B2 (ja) * 2007-05-01 2012-11-28 オリンパス株式会社 レーザ加工装置
JP5137488B2 (ja) * 2007-07-25 2013-02-06 オリンパス株式会社 レーザ照射装置およびそれを用いたレーザ加工システム
JP4959590B2 (ja) * 2008-01-15 2012-06-27 浜松ホトニクス株式会社 観察装置
JP4961359B2 (ja) * 2008-01-16 2012-06-27 浜松ホトニクス株式会社 観察装置
JP5120814B2 (ja) * 2008-03-28 2013-01-16 株式会社ブイ・テクノロジー パターン形成方法及びパターン形成装置
JP5474340B2 (ja) * 2008-11-28 2014-04-16 浜松ホトニクス株式会社 光変調装置
US9285579B2 (en) 2008-11-28 2016-03-15 Hamamatsu Photonics K.K. Light modulating device and laser processing device
CN102608875A (zh) * 2012-03-27 2012-07-25 深圳市华星光电技术有限公司 基于修补机台的玻璃基板补刻号方法及玻璃基板补刻号装置
CN103170733B (zh) * 2013-04-01 2015-12-23 深圳市木森科技有限公司 一种同轴激光加工机构
JP6546230B2 (ja) * 2017-08-28 2019-07-17 ファナック株式会社 機械学習装置、機械学習システム及び機械学習方法
CN111283335B (zh) * 2020-03-24 2022-02-22 宁波大学 激光显微切割装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002015448A (ja) * 2000-06-29 2002-01-18 Matsushita Electric Ind Co Ltd 光学素子、光源装置、光ヘッド装置および光情報処理装置
JP2002237081A (ja) * 2001-02-14 2002-08-23 Sankyo Seiki Mfg Co Ltd 光ヘッド装置
WO2003075267A1 (en) * 2002-03-06 2003-09-12 Matsushita Electric Industrial Co., Ltd. Optical head device and optical information device using this, and computer, optical disk player, car navigation system, optical disy recorder and optical disk server using this optical information device
JP4260062B2 (ja) * 2004-05-14 2009-04-30 三洋電機株式会社 光ピックアップ装置

Also Published As

Publication number Publication date
CN1880004B (zh) 2010-08-11
JP2006350123A (ja) 2006-12-28
CN1880004A (zh) 2006-12-20

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