CN1880004B - 激光加工装置 - Google Patents

激光加工装置 Download PDF

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Publication number
CN1880004B
CN1880004B CN2006100922014A CN200610092201A CN1880004B CN 1880004 B CN1880004 B CN 1880004B CN 2006100922014 A CN2006100922014 A CN 2006100922014A CN 200610092201 A CN200610092201 A CN 200610092201A CN 1880004 B CN1880004 B CN 1880004B
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CN
China
Prior art keywords
laser
diffraction
light
wavelength
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN2006100922014A
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English (en)
Chinese (zh)
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CN1880004A (zh
Inventor
松沢聪明
中村达哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Priority claimed from JP2005187829A external-priority patent/JP5036144B2/ja
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of CN1880004A publication Critical patent/CN1880004A/zh
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Publication of CN1880004B publication Critical patent/CN1880004B/zh
Expired - Fee Related legal-status Critical Current
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  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN2006100922014A 2005-06-17 2006-06-14 激光加工装置 Expired - Fee Related CN1880004B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2005-178286 2005-06-17
JP2005178286A JP4429974B2 (ja) 2005-06-17 2005-06-17 レーザ加工方法および装置
JP2005178286 2005-06-17
JP2005-187829 2005-06-28
JP2005187829A JP5036144B2 (ja) 2005-06-28 2005-06-28 レーザ加工装置
JP2005187829 2005-06-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2009102219116A Division CN101722364B (zh) 2005-06-17 2006-06-14 激光加工方法和装置

Publications (2)

Publication Number Publication Date
CN1880004A CN1880004A (zh) 2006-12-20
CN1880004B true CN1880004B (zh) 2010-08-11

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ID=37518481

Family Applications (1)

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CN2006100922014A Expired - Fee Related CN1880004B (zh) 2005-06-17 2006-06-14 激光加工装置

Country Status (2)

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JP (1) JP4429974B2 (enExample)
CN (1) CN1880004B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100761238B1 (ko) * 2007-03-13 2007-09-27 에스엔유 프리시젼 주식회사 레이저빔 가공장치
JP5086687B2 (ja) * 2007-05-01 2012-11-28 オリンパス株式会社 レーザ加工装置
JP5137488B2 (ja) * 2007-07-25 2013-02-06 オリンパス株式会社 レーザ照射装置およびそれを用いたレーザ加工システム
JP4959590B2 (ja) * 2008-01-15 2012-06-27 浜松ホトニクス株式会社 観察装置
JP4961359B2 (ja) * 2008-01-16 2012-06-27 浜松ホトニクス株式会社 観察装置
JP5120814B2 (ja) * 2008-03-28 2013-01-16 株式会社ブイ・テクノロジー パターン形成方法及びパターン形成装置
JP5474340B2 (ja) * 2008-11-28 2014-04-16 浜松ホトニクス株式会社 光変調装置
US9285579B2 (en) 2008-11-28 2016-03-15 Hamamatsu Photonics K.K. Light modulating device and laser processing device
CN102608875A (zh) * 2012-03-27 2012-07-25 深圳市华星光电技术有限公司 基于修补机台的玻璃基板补刻号方法及玻璃基板补刻号装置
CN103170733B (zh) * 2013-04-01 2015-12-23 深圳市木森科技有限公司 一种同轴激光加工机构
JP6546230B2 (ja) * 2017-08-28 2019-07-17 ファナック株式会社 機械学習装置、機械学習システム及び機械学習方法
CN111283335B (zh) * 2020-03-24 2022-02-22 宁波大学 激光显微切割装置及方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1187743C (zh) * 2000-06-29 2005-02-02 松下电器产业株式会社 光学元件,光源装置,光头装置以及光信息处理装置
CN1198274C (zh) * 2001-02-14 2005-04-20 株式会社三协精机制作所 光学头装置
CN1639784A (zh) * 2002-03-06 2005-07-13 松下电器产业株式会社 光学头器件和使用该光学头器件的光学信息装置
CN1722253A (zh) * 2004-05-14 2006-01-18 三洋电机株式会社 光学拾取装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1187743C (zh) * 2000-06-29 2005-02-02 松下电器产业株式会社 光学元件,光源装置,光头装置以及光信息处理装置
CN1198274C (zh) * 2001-02-14 2005-04-20 株式会社三协精机制作所 光学头装置
CN1639784A (zh) * 2002-03-06 2005-07-13 松下电器产业株式会社 光学头器件和使用该光学头器件的光学信息装置
CN1722253A (zh) * 2004-05-14 2006-01-18 三洋电机株式会社 光学拾取装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2000-275581A 2000.10.06 *
JP特开平8-174242A 1996.07.09 *

Also Published As

Publication number Publication date
JP2006350123A (ja) 2006-12-28
CN1880004A (zh) 2006-12-20
JP4429974B2 (ja) 2010-03-10

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Granted publication date: 20100811

Termination date: 20130614