JP4416140B2 - Resin-sealed semiconductor device - Google Patents
Resin-sealed semiconductor device Download PDFInfo
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- JP4416140B2 JP4416140B2 JP2000112780A JP2000112780A JP4416140B2 JP 4416140 B2 JP4416140 B2 JP 4416140B2 JP 2000112780 A JP2000112780 A JP 2000112780A JP 2000112780 A JP2000112780 A JP 2000112780A JP 4416140 B2 JP4416140 B2 JP 4416140B2
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L24/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/40221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/40245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
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- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/8434—Bonding interfaces of the connector
- H01L2224/84345—Shape, e.g. interlocking features
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- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/8438—Bonding interfaces outside the semiconductor or solid-state body
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- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/848—Bonding techniques
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Description
【0001】
本発明は、電子回路基板等に面実装のできる樹脂封止型半導体装置の改良構造に関するものである。
【0002】
【従来の技術】
樹脂封止型半導体装置の従来の構造例を図4及び図5を参照して説明する。まず、図5の樹脂封止型半導体装置1は、樹脂封止部2の下面と同一面となるように折り曲げ形成した平坦な外方端3a,4aを有する第1リード3と第2リード4を備えている。
【0003】
上記外方端3a,4aと連ねて形成されたクランク状の立上り部3b,4bは樹脂封止部2より外部に露出し、これらの立上り部3b,4bに連なる内方端3c,4cは、樹脂封止部2内に埋設されている。第1リード3の内方端3c上には半導体ペレット5が半田固着され、この半導体ペレット5の表面電極(図示せず)と第2リード4の内方端4cとがボンディングワイヤ6にて結線されている。
【0004】
上記図5に示した樹脂封止型半導体装置1を製作するには、例えば図4に示すようなリードフレーム7を使用する。
すなわち、リードフレーム7の幅方向に対向して設けたタイバ部8,9から内方に延びる第1リード部10及び第2リード部11が形成され、いずれか一方、この図では第1リード部10の先端部に半導体ペレット5が搭載・固着される。半導体ペレット5の表面電極(図示せず)と第2リード11の先端部とはボンディングワイヤ6にて結線される。
なお、上記のリードフレーム7は対抗するタイバ部8,9間が補強等のため連結部7aにより連結されている。
【0005】
上記のリードフレーム7を図示しない金型内に収納し、封止用樹脂を該金型内に注入して、トラスファーモールド法等により二点鎖線で示した部分に樹脂封止部2を形成する。
金型内から取り出したリードフレーム7は、タイバ部8,9、連結部11がプレス等により切り離され、また、図5の樹脂封止型半導体装置1ではクランク状の立上り部3b,4b及びそれに連なる平坦な外方端3a,4aをプレス等により折り曲げ形成する。
【0006】
【発明が解決しようとする課題】
従来の樹脂封止型半導体装置は上記のように構成されているので、次のような解決すべき課題があった。
(1)半導体ペレット5の表面電極と第2リード4の内方端4cとがボンディングワイヤ6で結線されているために、該半導体ペレット5の上面からの放熱が悪く、半導体ペレット5に流せる電流を大きくできないという解決すべき課題があった。
(2)上記樹脂封止部2の側面から外部に露出したリードのフォーミング加工の際に半導体ペレット5に機械的ストレスが加わり、半導体装置の電気的特性を劣化させるおそれがあることや樹脂封止部2にクラックを生じさせ、耐湿性を損ねかねないという解決すべき課題があった。
【0007】
【発明の目的】
本発明は上記のような課題を解決すためになされたもので、▲1▼半導体ペレットからの発熱を効率良く放熱できる構造とし、大電流を流せるようにするとともに、▲2▼リードのフォーミング加工をなくし、半導体ペレット及び樹脂封止部に機械的ストレスを与えない樹脂封止型半導体装置を提供することを目的とするものである。
【0008】
【課題を解決するための手段】
請求項1に記載の発明によれば、半導体ペレット(5)に接続される第1リード(3)と第2リード(4)とを有し、該半導体ペレット(5)及び前記第1リード(3)の内方端(3c)ならびに第2リード(4)の内方端(4c)の周囲を樹脂にて封止し、樹脂封止部(2)を形成した樹脂封止型半導体装置において、
上記第1リード(3)の外方端(3a)の下面は、上記樹脂封止部(2)の下面と同一平面とし、上記第1リード(3)の外方端(3a)に連らなる立上り部(3b)は、上記樹脂封止部(2)内に埋設され、該第1リード(3)の立上り部(3b)に連ねて水平方向に形成された内方端(3c)と前記半導体ペレット(5)とが電気的に接続され、前記内方端(4c)と連なる外方端(4a)を前記第2リード(4)が有し、前記第2リード(4)の外方端(4a)は、上記樹脂封止部(2)から一部が露出され、かつ、該第2リード(4)の下面全体が上記樹脂封止部(2)の下面と同一平面となるように形成し、
前記第2リード(4)の内方端(4c)の先端部(4d)を折り曲げて上方へ偏位させ、前記第1リード(3)と第2リード(4)と間の沿面距離を長くし、
前記第2リード(4)の内方端(4c)のうち、上方へ偏位せしめられている先端部(4d)以外の部分の上面に半導体ペレット(5)を固着させたことを特徴とする樹脂封止型半導体装置が提供される。
【0010】
請求項2に記載の発明によれば、前記第1リード(3)の内方端(3c)と、前記第2リード(4)の内方端(3c)の上面に固着された半導体ペレット(5)の上面とは、平板状の導体からなる内部リード(13)により電気的に接続したことを特徴とする請求項1に記載の樹脂封止型半導体装置が提供される。
【0011】
請求項3に記載の発明によれば、前記第1リード(3)の内方端(3c)と前記内部リード(13)の外方端との接続部は、一方が凸部で他方が凹部の相補形状を備え、互いの位置決めをなすことを特徴とする請求項2に記載の樹脂封止型半導体装置が提供される。
【0012】
【実施例】
以下に、本発明の実施例を、図1ないし図3を参照して説明する。図1は本発明の樹脂封止型半導体装置の縦断面図あり、図において樹脂封止型半導体装置1は、第1リード3を有し、この第1リード3は、従来と同様に外方端3aの一部が樹脂封止部2の側面から外部に露出している。
【0013】
上記第1リード3の外方端3aに連ねて延在する立上り部3b及びそれに連なる水平方向の内方端3cは樹脂封止部2内に埋設されている。
そして、上記外方端3aの先端から立上り部3bまでの下面が樹脂封止部2から露出し、かつ、該樹脂封止部2の下面と同一面となるように形成されている。
【0014】
上記樹脂封止型半導体装置1には、第1リード3に対向して第2リード4が配置されている。すなわち、第2リード4は板材により平板状に形成され、その外方端4aの一部が樹脂封止部2から外部に露出している。そして第2リード4の内方端4cは樹脂封止部2内に埋設されるが、該内方端4cから外方端4aまでの第2リード4の下面は樹脂封止部2より外部に露出し、かつ、該樹脂封止部2の下面と同一面となるように形成されている。
【0015】
上記第2リード4の内方端4cの上面には半導体ペレット5が半田12より固着され、この半導体ペレット5の表面電極(図示せず)と前記第1リード3の内方端3cとが電気的に接続されている。
すなわち、この実施例では平板状の導体からなる内部リード13を用いて接続している。この内部リード13の一方の端部には凸部13aが形成され、この凸部13aが半導体ペレット5の表面電極と半田12を介して固着される。また、内部リード13の他方の端部にもプレス等で打ち出し加工された突起13bを有し、この突起13bと相補形状をなす凹部3dが第1リード3の内方端3c上に形成されている。
【0016】
したがって、上記の凹部3dに内部リード13の突起13bを嵌め合わせることにより両者の相対的な位置決めがなされるようになる。
なお、上記の嵌め合わせ部分も半田により固着される。
【0017】
次に、上記樹脂封止型半導体装置1を製作する方法の概略を、図2を参照して説明する。
図において、14はリードフレーム全体を示し、このリードフレーム14は、その長手方向に連続するタイバ部15a,15bを有している。この互いに対向するタイバ部15a,15bから内方に向かって第1リード3及び第2リード4が形成されている。また、第1リード3には、リードフレーム14の状態でプレス等により予め折り曲げ形成された立上り部3b及びこれに連なる内方端3cを有している。
なお、リードフレーム14のタイバ部15a,15b間は、補強等のため、必要に応じて連結部16が設けられている。
【0018】
上記リードフレーム14の第2リード4上には、図示のように半導体ペレット5が半田固着され、第1リード3の内方端3cと半導体ペレット4の表面電極との間が内部リード13により接続される。この状態のリードフレーム14を図示を省略した金型内に収納して封止用樹脂を注入し、従来と同様にトランスファーモールド法等により二点鎖線で示した部分に樹脂封止部2を形成する。
最後に、タイバ部15a,15b及び連結部16をリードフレーム14から切り離して図1に示したような樹脂封止型半導体装置1を得る。
【0019】
上記のようにして得られた樹脂封止型半導体装置1は、一方のリード3のみに立上り部3bを形成するようにしているので、両方のリード3,4の下面を樹脂封止部2の下面と面一に設けるものに比べ、両リード3,4間の沿面距離Lを長くすることができ、逆電圧を高くすることができる。
【0020】
また、半導体ペレット5の表面電極と第1リード3との接続は、細線のボンディングワイヤを使用することなく、平板状の内部リード13を使用しているので、半導体ペレット5からの発熱を効率良く放熱でき、大電流を流せる。さらに、樹脂封止部2の形成後にリードのフォーミング加工をすることがないので、半導体ペレット5及び樹脂封止部2に機械的ストレスを与えず、電気的特性の劣化及び樹脂封止部2にクラックを発生させることがなく、耐湿性を損ねることもない。
【0021】
なお、上記の実施例では、内部リード13側に突起13bを形成したが、これを逆にして第1リード3側に突起、内部リード13側に該凹部を形成するようにしても良い。
【0022】
次に、本発明の詳細な点を、図3を参照して説明する。図3は、第2リード4の内方端4cを図示した拡大図である。この図から明らかなように、本実施例では上記内方端4cの先端部4dを上方に偏位させ、図1に示した沿面距離Lをさらに長くしたものである。この沿面距離Lを寸法的には僅かに長くするものであっても、前述したようにこの種の樹脂封止型半導体装置は全長が僅か4mm程度であり、そのため相対的には大きな効果となって現れるものである。なお、上記第2リード4の先端部4dの加工はリードフレーム14の状態の時に、プレス等により加工しておけば良い。
【0023】
【発明の効果】
以上説明したように本発明は、左右非対称のリードを使用し、また、一方のリードと半導体ペレットの表面電極との接続に細線のボンディングワイヤを使用することなく、平板状の内部リードを使用して接続するようにしたので概略次のような効果がある。
(1)半導体ペレットからの発熱を効率良く放熱できる構造となり、大電流を流せる。
(2)リードの樹脂封止後のフォーミング加工がなく半導体ペレット及び樹脂封止部に機械的ストレスを与えないので、電気的特性に悪影響を与えることもなく、また、樹脂封止部にクラックを発生させず、耐湿性を損ねることもない。
(3)第2リードの先端部を上方に偏位させる場合には沿面距離の増加とともに、樹脂封止部との付着面積が増加し、付着強度が大きくなり耐湿性が向上する。
【図面の簡単な説明】
【図1】本発明の樹脂封止型半導体装置の縦断面図である。
【図2】本発明に使用するリードフレーム等の斜視図である。
【図3】本発明の実施例を詳細に示す拡大図である。
【図4】従来の樹脂封止型半導体装置に使用するリードフレーム等の斜視図である。
【図5】従来の樹脂封止型半導体装置の構造例を示す縦断面図である。[0001]
The present invention relates to an improved structure of a resin-encapsulated semiconductor device that can be surface-mounted on an electronic circuit board or the like.
[0002]
[Prior art]
A conventional structure example of a resin-encapsulated semiconductor device will be described with reference to FIGS. First, the resin-encapsulated
[0003]
Crank-shaped rising
[0004]
In order to manufacture the resin-encapsulated
That is, the
The
[0005]
The
In the
[0006]
[Problems to be solved by the invention]
Since the conventional resin-encapsulated semiconductor device is configured as described above, there are the following problems to be solved.
(1) Since the surface electrode of the
(2) There is a possibility that mechanical stress is applied to the
[0007]
OBJECT OF THE INVENTION
The present invention has been made to solve the above-mentioned problems. (1) A structure capable of efficiently dissipating heat generated from semiconductor pellets to allow a large current to flow, and (2) lead forming processing. It is an object of the present invention to provide a resin-encapsulated semiconductor device that does not apply mechanical stress to the semiconductor pellet and the resin-encapsulated portion.
[0008]
[Means for Solving the Problems]
According to invention of
The lower surface of the outer end (3a) of the first lead (3) is flush with the lower surface of the resin sealing portion (2) and continues to the outer end (3a) of the first lead (3). The rising portion (3b), which is embedded in the resin sealing portion (2), is connected to the rising portion (3b) of the first lead (3) and is formed in the horizontal direction (3c). The second lead (4) has an outer end (4a) that is electrically connected to the semiconductor pellet (5) and continues to the inner end (4c), and is external to the second lead (4). One end of the side end (4a) is exposed from the resin sealing portion (2), and the entire lower surface of the second lead (4) is flush with the lower surface of the resin sealing portion (2). Formed as
The tip (4d) of the inner end (4c) of the second lead (4) is bent and displaced upward, and the creepage distance between the first lead (3) and the second lead (4) is increased. And
A semiconductor pellet (5) is fixed to the upper surface of the inner lead (4c) of the second lead (4) other than the tip (4d) that is deflected upward. A resin-encapsulated semiconductor device is provided.
[0010]
According to the second aspect of the present invention, semiconductor pellets fixed to the upper surface of the inner end (3c) of the first lead (3) and the inner end (3c) of the second lead (4) ( 5. The resin-encapsulated semiconductor device according to
[0011]
According to the third aspect of the present invention, one of the connecting portions between the inner end (3c) of the first lead (3) and the outer end of the inner lead (13) is a convex portion and the other is a concave portion. 3. The resin-encapsulated semiconductor device according to
[0012]
【Example】
Embodiments of the present invention will be described below with reference to FIGS. FIG. 1 is a longitudinal sectional view of a resin-encapsulated semiconductor device according to the present invention. In the figure, a resin-encapsulated
[0013]
The rising
The lower surface from the tip of the
[0014]
In the resin-encapsulated
[0015]
A
That is, in this embodiment, the connection is made by using the
[0016]
Therefore, by fitting the
The fitting portion is also fixed by solder.
[0017]
Next, an outline of a method for manufacturing the resin-encapsulated
In the figure,
In addition, between the
[0018]
A
Finally, the
[0019]
In the resin-encapsulated
[0020]
In addition, the connection between the surface electrode of the
[0021]
In the above embodiment, the
[0022]
Next, details of the present invention will be described with reference to FIG. FIG. 3 is an enlarged view illustrating the
[0023]
【The invention's effect】
As described above, the present invention uses an asymmetrical lead, and uses a flat internal lead without using a fine bonding wire to connect one lead to the surface electrode of the semiconductor pellet. As a result, the following effects are obtained.
(1) The structure can efficiently dissipate heat generated from the semiconductor pellet, and a large current can flow.
(2) Since there is no forming process after the resin sealing of the lead and no mechanical stress is given to the semiconductor pellet and the resin sealing part, the electrical characteristics are not adversely affected, and the resin sealing part is cracked. Does not occur and does not impair the moisture resistance.
(3) When the tip of the second lead is displaced upward, the adhesion area with the resin sealing portion increases as the creeping distance increases, and the adhesion strength increases and the moisture resistance improves.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a resin-encapsulated semiconductor device of the present invention.
FIG. 2 is a perspective view of a lead frame and the like used in the present invention.
FIG. 3 is an enlarged view showing an embodiment of the present invention in detail .
FIG. 4 is a perspective view of a lead frame and the like used in a conventional resin-encapsulated semiconductor device.
FIG. 5 is a longitudinal sectional view showing a structural example of a conventional resin-encapsulated semiconductor device.
Claims (3)
上記第1リード(3)の外方端(3a)の下面は、上記樹脂封止部(2)の下面と同一平面とし、上記第1リード(3)の外方端(3a)に連らなる立上り部(3b)は、上記樹脂封止部(2)内に埋設され、該第1リード(3)の立上り部(3b)に連ねて水平方向に形成された内方端(3c)と前記半導体ペレット(5)とが電気的に接続され、前記内方端(4c)と連なる外方端(4a)を前記第2リード(4)が有し、前記第2リード(4)の外方端(4a)は、上記樹脂封止部(2)から一部が露出され、かつ、該第2リード(4)の下面全体が上記樹脂封止部(2)の下面と同一平面となるように形成し、
前記第2リード(4)の内方端(4c)の先端部(4d)を折り曲げて上方へ偏位させ、前記第1リード(3)と第2リード(4)と間の沿面距離を長くし、
前記第2リード(4)の内方端(4c)のうち、上方へ偏位せしめられている先端部(4d)以外の部分の上面に半導体ペレット(5)を固着させたことを特徴とする樹脂封止型半導体装置。A first lead (3) and a second lead (4) connected to the semiconductor pellet (5), the semiconductor pellet (5), the inner end (3c) of the first lead (3), and the first lead (3) In the resin-encapsulated semiconductor device in which the periphery of the inner end (4c) of the two leads (4) is sealed with resin to form the resin-encapsulated portion (2),
The lower surface of the outer end (3a) of the first lead (3) is flush with the lower surface of the resin sealing portion (2) and continues to the outer end (3a) of the first lead (3). The rising portion (3b), which is embedded in the resin sealing portion (2), is connected to the rising portion (3b) of the first lead (3) and is formed in the horizontal direction (3c). The second lead (4) has an outer end (4a) that is electrically connected to the semiconductor pellet (5) and continues to the inner end (4c), and is external to the second lead (4). One end of the side end (4a) is exposed from the resin sealing portion (2), and the entire lower surface of the second lead (4) is flush with the lower surface of the resin sealing portion (2). Formed as
The tip (4d) of the inner end (4c) of the second lead (4) is bent and displaced upward, and the creepage distance between the first lead (3) and the second lead (4) is increased. And
A semiconductor pellet (5) is fixed to the upper surface of the inner lead (4c) of the second lead (4) other than the tip (4d) that is deflected upward. Resin-sealed semiconductor device.
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US7148564B2 (en) * | 2004-02-17 | 2006-12-12 | Delphi Technologies, Inc. | Dual-sided substrate integrated circuit package including a leadframe having leads with increased thickness |
JP2006339568A (en) * | 2005-06-06 | 2006-12-14 | Nippon Inter Electronics Corp | Manufacturing method of semiconductor device |
CN101882646B (en) * | 2010-06-11 | 2012-01-25 | 深圳市创益科技发展有限公司 | Deposition clamp of film solar cell |
CN101859801B (en) * | 2010-06-11 | 2013-02-20 | 深圳市创益科技发展有限公司 | Discharge electrode plate array for thin film solar cell settling |
EP2720263A4 (en) | 2011-06-09 | 2015-04-22 | Mitsubishi Electric Corp | Semiconductor device |
DE102016107792B4 (en) | 2016-04-27 | 2022-01-27 | Infineon Technologies Ag | Pack and semi-finished product with a vertical connection between support and bracket and method of making a pack and a batch of packs |
JP7281267B2 (en) * | 2017-11-06 | 2023-05-25 | ローム株式会社 | Semiconductor device, method for manufacturing semiconductor device |
JP7173487B2 (en) * | 2018-11-30 | 2022-11-16 | ローム株式会社 | semiconductor equipment |
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