JP4407586B2 - 枚葉搬送用トレイ - Google Patents

枚葉搬送用トレイ Download PDF

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Publication number
JP4407586B2
JP4407586B2 JP2005214158A JP2005214158A JP4407586B2 JP 4407586 B2 JP4407586 B2 JP 4407586B2 JP 2005214158 A JP2005214158 A JP 2005214158A JP 2005214158 A JP2005214158 A JP 2005214158A JP 4407586 B2 JP4407586 B2 JP 4407586B2
Authority
JP
Japan
Prior art keywords
outer frame
tray
crosspiece
wafer carrying
resin block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005214158A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007035763A (ja
Inventor
博 深沢
良祐 田原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Priority to JP2005214158A priority Critical patent/JP4407586B2/ja
Priority to KR1020060008796A priority patent/KR100965526B1/ko
Publication of JP2007035763A publication Critical patent/JP2007035763A/ja
Application granted granted Critical
Publication of JP4407586B2 publication Critical patent/JP4407586B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333—Trays for chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D21/00—Nestable, stackable or joinable containers; Containers of variable capacity
    • B65D21/02—Containers specially shaped, or provided with fittings or attachments, to facilitate nesting, stacking, or joining together
    • B65D21/0209—Containers specially shaped, or provided with fittings or attachments, to facilitate nesting, stacking, or joining together stackable or joined together one-upon-the-other in the upright or upside-down position
    • B65D21/0213—Containers presenting a continuous stacking profile along the upper or lower edge of at least two opposite side walls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68313—Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Stackable Containers (AREA)
  • Rigid Containers With Two Or More Constituent Elements (AREA)
JP2005214158A 2005-07-25 2005-07-25 枚葉搬送用トレイ Expired - Fee Related JP4407586B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005214158A JP4407586B2 (ja) 2005-07-25 2005-07-25 枚葉搬送用トレイ
KR1020060008796A KR100965526B1 (ko) 2005-07-25 2006-01-27 매엽반송용 트레이

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005214158A JP4407586B2 (ja) 2005-07-25 2005-07-25 枚葉搬送用トレイ

Publications (2)

Publication Number Publication Date
JP2007035763A JP2007035763A (ja) 2007-02-08
JP4407586B2 true JP4407586B2 (ja) 2010-02-03

Family

ID=37794679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005214158A Expired - Fee Related JP4407586B2 (ja) 2005-07-25 2005-07-25 枚葉搬送用トレイ

Country Status (2)

Country Link
JP (1) JP4407586B2 (ko)
KR (1) KR100965526B1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5281874B2 (ja) * 2008-11-21 2013-09-04 サイデック株式会社 検査用搬送トレイ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623212Y2 (ko) * 1974-10-08 1981-06-01
JPS603070Y2 (ja) * 1977-12-15 1985-01-28 株式会社日軽技研 パレツト
JPS57123737U (ko) * 1981-01-26 1982-08-02
JPH0435595A (ja) * 1990-05-31 1992-02-06 Sanyo Electric Co Ltd 色輪郭補正回路
JP3977481B2 (ja) * 1997-04-11 2007-09-19 淀川ヒューテック株式会社 基板用トレイカセット
JP2001185610A (ja) * 1999-12-24 2001-07-06 Kanegafuchi Chem Ind Co Ltd 基板搬送トレー
JP2005053493A (ja) * 2003-08-04 2005-03-03 Yodogawa Hu-Tech Kk 基板用カセット

Also Published As

Publication number Publication date
KR20070013186A (ko) 2007-01-30
KR100965526B1 (ko) 2010-06-23
JP2007035763A (ja) 2007-02-08

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