JP4407257B2 - 固体撮像装置 - Google Patents
固体撮像装置 Download PDFInfo
- Publication number
- JP4407257B2 JP4407257B2 JP2003396682A JP2003396682A JP4407257B2 JP 4407257 B2 JP4407257 B2 JP 4407257B2 JP 2003396682 A JP2003396682 A JP 2003396682A JP 2003396682 A JP2003396682 A JP 2003396682A JP 4407257 B2 JP4407257 B2 JP 4407257B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive region
- photodiode
- transfer gate
- drain
- imaging device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003384 imaging method Methods 0.000 title claims description 23
- 230000015572 biosynthetic process Effects 0.000 claims description 18
- 239000012535 impurity Substances 0.000 claims description 4
- 108091006146 Channels Proteins 0.000 description 37
- 239000000758 substrate Substances 0.000 description 10
- 230000004888 barrier function Effects 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 5
- 102000004129 N-Type Calcium Channels Human genes 0.000 description 4
- 108090000699 N-Type Calcium Channels Proteins 0.000 description 4
- 238000001444 catalytic combustion detection Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009751 slip forming Methods 0.000 description 3
- 206010047571 Visual impairment Diseases 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
16 フォトダイオードのn型導電領域
17 表面シールド領域
18 フォトダイオード(PD)
19a、19b、19c、19d 転送ゲート
20a、20b、20c、20d ドレイン(n)
21a、21b 貫通チャネル層(n)
22a、22b バリア層(n)
23、35、37、39 チャネル形成層(n)
25 信号電荷
30 電荷の流れ
Claims (1)
- 第1導電型のウェル及び前記ウェルに接続する第2導電型の導電領域を有するフォトダイオードと、
前記導電領域を囲って前記導電領域に接続し、前記導電領域よりも不純物濃度が高い第2導電型のチャネル形成層と、
前記導電領域に離間して設けられたドレインと、
前記導電領域と前記ドレインとの間でかつ前記ウェルの上方に、前記チャネル形成層が形成されている領域に亘って設けられた転送ゲートと、
前記導電領域に離間して設けられた他のドレインと、
前記導電領域と前記他のドレインとの間でかつ前記ウェルの上方に、前記チャネル形成層が形成されている領域に亘って設けられた他の転送ゲートと、
を有し、
前記転送ゲートがオンされることにより、前記フォトダイオードで光電変換された電荷を、前記チャネル形成層を介して前記ドレインに転送し、前記他の転送ゲートがオンされることにより、前記フォトダイオードで光電変換された電荷を、前記チャネル形成層を介して前記他のドレインに転送する構成としたことを特徴とする固体撮像装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003396682A JP4407257B2 (ja) | 2003-11-27 | 2003-11-27 | 固体撮像装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003396682A JP4407257B2 (ja) | 2003-11-27 | 2003-11-27 | 固体撮像装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005159067A JP2005159067A (ja) | 2005-06-16 |
JP2005159067A5 JP2005159067A5 (ja) | 2008-03-06 |
JP4407257B2 true JP4407257B2 (ja) | 2010-02-03 |
Family
ID=34722048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003396682A Expired - Lifetime JP4407257B2 (ja) | 2003-11-27 | 2003-11-27 | 固体撮像装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4407257B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4649623B2 (ja) * | 2006-01-18 | 2011-03-16 | 国立大学法人静岡大学 | 固体撮像装置及びその画素信号の読みだし方法 |
EP2445008B1 (en) | 2008-08-11 | 2015-03-04 | Honda Motor Co., Ltd. | Imaging device and image forming method |
KR101608903B1 (ko) | 2009-11-16 | 2016-04-20 | 삼성전자주식회사 | 적외선 이미지 센서 |
GB2477083A (en) * | 2010-01-13 | 2011-07-27 | Cmosis Nv | Pixel structure with multiple transfer gates to improve dynamic range |
KR102462912B1 (ko) * | 2015-12-04 | 2022-11-04 | 에스케이하이닉스 주식회사 | 수직 전송 게이트를 갖는 이미지 센서 |
-
2003
- 2003-11-27 JP JP2003396682A patent/JP4407257B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2005159067A (ja) | 2005-06-16 |
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