JP4398183B2 - 共焦点顕微鏡 - Google Patents

共焦点顕微鏡 Download PDF

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Publication number
JP4398183B2
JP4398183B2 JP2003173367A JP2003173367A JP4398183B2 JP 4398183 B2 JP4398183 B2 JP 4398183B2 JP 2003173367 A JP2003173367 A JP 2003173367A JP 2003173367 A JP2003173367 A JP 2003173367A JP 4398183 B2 JP4398183 B2 JP 4398183B2
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JP
Japan
Prior art keywords
sample
objective lens
measurement
light intensity
mode
Prior art date
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Expired - Fee Related
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JP2003173367A
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English (en)
Japanese (ja)
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JP2004078175A5 (enExample
JP2004078175A (ja
Inventor
章広 北原
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Olympus Corp
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Olympus Corp
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Priority to JP2003173367A priority Critical patent/JP4398183B2/ja
Publication of JP2004078175A publication Critical patent/JP2004078175A/ja
Publication of JP2004078175A5 publication Critical patent/JP2004078175A5/ja
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Publication of JP4398183B2 publication Critical patent/JP4398183B2/ja
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  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2003173367A 2002-06-18 2003-06-18 共焦点顕微鏡 Expired - Fee Related JP4398183B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003173367A JP4398183B2 (ja) 2002-06-18 2003-06-18 共焦点顕微鏡

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002177047 2002-06-18
JP2003173367A JP4398183B2 (ja) 2002-06-18 2003-06-18 共焦点顕微鏡

Publications (3)

Publication Number Publication Date
JP2004078175A JP2004078175A (ja) 2004-03-11
JP2004078175A5 JP2004078175A5 (enExample) 2006-06-29
JP4398183B2 true JP4398183B2 (ja) 2010-01-13

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ID=32032473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003173367A Expired - Fee Related JP4398183B2 (ja) 2002-06-18 2003-06-18 共焦点顕微鏡

Country Status (1)

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JP (1) JP4398183B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4996304B2 (ja) * 2007-03-28 2012-08-08 オリンパス株式会社 走査型顕微鏡とその調節方法
JP5043629B2 (ja) * 2007-12-17 2012-10-10 オリンパス株式会社 レーザ走査型顕微鏡及びその表面形状の測定方法
JP5572464B2 (ja) * 2010-07-14 2014-08-13 オリンパス株式会社 共焦点顕微鏡装置
CN102053047B (zh) * 2010-11-12 2012-07-04 北京理工大学 可兼顾分辨力和量程的激光差动共焦theta扫描检测方法
JP6132650B2 (ja) * 2013-04-30 2017-05-24 オリンパス株式会社 共焦点顕微鏡装置

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Publication number Publication date
JP2004078175A (ja) 2004-03-11

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