JP4388804B2 - 基体材料およびバリヤー層材料からなる複合材料 - Google Patents
基体材料およびバリヤー層材料からなる複合材料 Download PDFInfo
- Publication number
- JP4388804B2 JP4388804B2 JP2003519542A JP2003519542A JP4388804B2 JP 4388804 B2 JP4388804 B2 JP 4388804B2 JP 2003519542 A JP2003519542 A JP 2003519542A JP 2003519542 A JP2003519542 A JP 2003519542A JP 4388804 B2 JP4388804 B2 JP 4388804B2
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- JP
- Japan
- Prior art keywords
- composite material
- coating
- barrier coating
- substrate
- hollow body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000004888 barrier function Effects 0.000 title claims abstract description 93
- 239000000463 material Substances 0.000 title claims abstract description 45
- 239000002131 composite material Substances 0.000 title claims abstract description 33
- 238000000576 coating method Methods 0.000 claims abstract description 97
- 239000011248 coating agent Substances 0.000 claims abstract description 93
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 239000000126 substance Substances 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 98
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 43
- 239000001301 oxygen Substances 0.000 claims description 43
- 229910052760 oxygen Inorganic materials 0.000 claims description 43
- 239000007789 gas Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 30
- 229920003023 plastic Polymers 0.000 claims description 25
- 239000004033 plastic Substances 0.000 claims description 25
- 239000002243 precursor Substances 0.000 claims description 20
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 17
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 17
- -1 Polycyclic hydrocarbons Chemical class 0.000 claims description 16
- 239000012298 atmosphere Substances 0.000 claims description 13
- 239000004417 polycarbonate Substances 0.000 claims description 10
- 229920000515 polycarbonate Polymers 0.000 claims description 10
- 229920001903 high density polyethylene Polymers 0.000 claims description 9
- 239000004700 high-density polyethylene Substances 0.000 claims description 9
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 claims description 7
- 239000004743 Polypropylene Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229920001155 polypropylene Polymers 0.000 claims description 6
- 239000004793 Polystyrene Substances 0.000 claims description 5
- 239000004695 Polyether sulfone Substances 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 229920006393 polyether sulfone Polymers 0.000 claims description 4
- 229920002223 polystyrene Polymers 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000004698 Polyethylene Substances 0.000 claims description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 2
- 229920000573 polyethylene Polymers 0.000 claims description 2
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims description 2
- 239000002346 layers by function Substances 0.000 claims 2
- 239000012299 nitrogen atmosphere Substances 0.000 claims 1
- 229920003208 poly(ethylene sulfide) Polymers 0.000 claims 1
- 125000003367 polycyclic group Chemical group 0.000 claims 1
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 claims 1
- 229910005103 Si3Ny Inorganic materials 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910006854 SnOx Inorganic materials 0.000 abstract 1
- 229910003087 TiOx Inorganic materials 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 abstract 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 72
- 230000005540 biological transmission Effects 0.000 description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 33
- 238000005259 measurement Methods 0.000 description 30
- 210000002381 plasma Anatomy 0.000 description 28
- 239000000203 mixture Substances 0.000 description 26
- 239000011230 binding agent Substances 0.000 description 13
- 230000035699 permeability Effects 0.000 description 13
- 230000009471 action Effects 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000006872 improvement Effects 0.000 description 5
- 229920002799 BoPET Polymers 0.000 description 4
- 239000004812 Fluorinated ethylene propylene Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 229920009441 perflouroethylene propylene Polymers 0.000 description 4
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229920006262 high density polyethylene film Polymers 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- WKBPZYKAUNRMKP-UHFFFAOYSA-N 1-[2-(2,4-dichlorophenyl)pentyl]1,2,4-triazole Chemical compound C=1C=C(Cl)C=C(Cl)C=1C(CCC)CN1C=NC=N1 WKBPZYKAUNRMKP-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910007991 Si-N Inorganic materials 0.000 description 1
- 229910006294 Si—N Inorganic materials 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003925 fat Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000011129 pharmaceutical packaging material Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000006120 scratch resistant coating Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229920013744 specialty plastic Polymers 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31507—Of polycarbonate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
- Y10T428/31565—Next to polyester [polyethylene terephthalate, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
- Y10T428/31573—Next to addition polymer of ethylenically unsaturated monomer
- Y10T428/31587—Hydrocarbon polymer [polyethylene, polybutadiene, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31667—Next to addition polymer from unsaturated monomers, or aldehyde or ketone condensation product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
- Medical Preparation Storing Or Oral Administration Devices (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packages (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10139305A DE10139305A1 (de) | 2001-08-07 | 2001-08-07 | Verbundmaterial aus einem Substratmaterial und einem Barriereschichtmaterial |
| PCT/EP2002/008853 WO2003014415A1 (de) | 2001-08-07 | 2002-08-07 | Verbundmaterial aus einem substratmaterial und einem barriereschichtmaterial |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004538176A JP2004538176A (ja) | 2004-12-24 |
| JP2004538176A5 JP2004538176A5 (https=) | 2005-12-22 |
| JP4388804B2 true JP4388804B2 (ja) | 2009-12-24 |
Family
ID=7695019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003519542A Expired - Fee Related JP4388804B2 (ja) | 2001-08-07 | 2002-08-07 | 基体材料およびバリヤー層材料からなる複合材料 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7931955B2 (https=) |
| EP (1) | EP1415018B1 (https=) |
| JP (1) | JP4388804B2 (https=) |
| AT (1) | ATE411411T1 (https=) |
| DE (2) | DE10139305A1 (https=) |
| WO (1) | WO2003014415A1 (https=) |
Families Citing this family (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004001603B4 (de) * | 2004-01-09 | 2009-03-05 | Schott Ag | Behälter mit Innendekor |
| DE102004017241B4 (de) | 2004-04-05 | 2012-09-27 | Schott Ag | Verbundmaterial und Verfahren zu seiner Herstellung |
| DE102004032013B4 (de) * | 2004-07-02 | 2007-05-16 | Rehau Ag & Co | Multilagenschichtaufbau für Polymere, Verfahren zu dessen Herstellung und die Verwendung von Kunststoffformteilen mit dem Multilagenschichtaufbau |
| DE102004036063A1 (de) * | 2004-07-24 | 2006-02-16 | Krones Ag | Vorrichtung und Verfahren zur Plasmabeschichtung/Sterilisation |
| JP4586495B2 (ja) * | 2004-08-25 | 2010-11-24 | 東洋製罐株式会社 | マイクロ波処理装置、マイクロ波供給・処理システム及びマイクロ波処理方法 |
| DE102004045046B4 (de) * | 2004-09-15 | 2007-01-04 | Schott Ag | Verfahren und Vorrichtung zum Aufbringen einer elektrisch leitfähigen transparenten Beschichtung auf ein Substrat |
| AU2006216352A1 (en) * | 2005-02-22 | 2006-08-31 | Toyo Seikan Kaisha, Ltd. | Vapor deposited film by plasma CVD method |
| DE102005025083B4 (de) * | 2005-05-30 | 2007-05-24 | Infineon Technologies Ag | Thermoplast-Duroplast-Verbund und Verfahren zum Verbinden eines thermoplastischen Materials mit einem duroplastischen Material |
| DE102006035979A1 (de) * | 2005-12-19 | 2007-06-28 | Robert Bosch Gmbh | Verfahren und Anordnung zur Abreicherung von Verunreinigungen an Behältnissen und/oder zu deren Sterilisation |
| US8025915B2 (en) | 2006-01-11 | 2011-09-27 | Schott Ag | Method of preparing a macromolecule deterrent surface on a pharmaceutical package |
| EP1918965A1 (en) * | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method and apparatus for forming a film by deposition from a plasma |
| EP1918966A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma |
| EP1921178A1 (en) * | 2006-11-02 | 2008-05-14 | Dow Corning Corporation | Film deposition of amorphous films by electron cyclotron resonance |
| EP1923483A1 (en) * | 2006-11-02 | 2008-05-21 | Dow Corning Corporation | Deposition of amorphous silicon films by electron cyclotron resonance |
| EP1919264A1 (en) * | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Device for forming a film by deposition from a plasma |
| EP1918967B1 (en) * | 2006-11-02 | 2013-12-25 | Dow Corning Corporation | Method of forming a film by deposition from a plasma |
| EP1918414A1 (en) * | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
| US20080295885A1 (en) * | 2007-05-30 | 2008-12-04 | Shing Man Lee | Thick Crystalline Silicon Film On Large Substrates for Solar Applications |
| CN101688302A (zh) * | 2008-05-30 | 2010-03-31 | 东洋制罐株式会社 | 蒸镀装置 |
| MX350703B (es) | 2009-05-13 | 2017-09-14 | Sio2 Medical Products Inc | Metodo de gasificacion para inspeccionar una superficie revestida. |
| WO2013170052A1 (en) | 2012-05-09 | 2013-11-14 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
| US7985188B2 (en) * | 2009-05-13 | 2011-07-26 | Cv Holdings Llc | Vessel, coating, inspection and processing apparatus |
| US20140004022A1 (en) * | 2009-07-02 | 2014-01-02 | Sio2 Medical Products, Inc. | Pecvd coating of chromatography vials |
| US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
| US8968473B2 (en) * | 2009-09-21 | 2015-03-03 | Silevo, Inc. | Stackable multi-port gas nozzles |
| US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
| DE102010048960A1 (de) * | 2010-10-18 | 2012-04-19 | Khs Corpoplast Gmbh | Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken |
| US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
| US10081864B2 (en) | 2011-03-10 | 2018-09-25 | Kaiatech, Inc | Method and apparatus for treating containers |
| US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
| EP2570453A1 (en) * | 2011-09-14 | 2013-03-20 | Center of Excellence Polymer Materials and Technologies (Polimat) | Antimicrobial polymeric substrates |
| US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
| EP2776603B1 (en) | 2011-11-11 | 2019-03-06 | SiO2 Medical Products, Inc. | PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS |
| US20150297800A1 (en) | 2012-07-03 | 2015-10-22 | Sio2 Medical Products, Inc. | SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS |
| CA2890066C (en) | 2012-11-01 | 2021-11-09 | Sio2 Medical Products, Inc. | Coating inspection method |
| US9903782B2 (en) | 2012-11-16 | 2018-02-27 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
| US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
| JP6382830B2 (ja) | 2012-11-30 | 2018-08-29 | エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド | 医療シリンジ、カートリッジ等上でのｐｅｃｖｄ堆積の均一性制御 |
| US9662450B2 (en) | 2013-03-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
| US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
| EP2971228B1 (en) | 2013-03-11 | 2023-06-21 | Si02 Medical Products, Inc. | Coated packaging |
| US20160017490A1 (en) | 2013-03-15 | 2016-01-21 | Sio2 Medical Products, Inc. | Coating method |
| WO2015148471A1 (en) | 2014-03-28 | 2015-10-01 | Sio2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
| KR102130470B1 (ko) * | 2014-08-14 | 2020-07-06 | 케이씨에프테크놀로지스 주식회사 | 배리어 필름 구조체 및 이를 구비하는 유기전자소자 |
| EP3337915B1 (en) | 2015-08-18 | 2021-11-03 | SiO2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
| KR20170048787A (ko) * | 2015-10-27 | 2017-05-10 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
| GB201614332D0 (en) * | 2016-08-22 | 2016-10-05 | Innano As | Method and system for treating a surface |
| DE102022105041A1 (de) | 2022-03-03 | 2023-09-07 | IonKraft GmbH | Beschichtungstechnik für Kunststoffbehälter |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3441948A1 (de) * | 1984-11-16 | 1986-05-28 | Bayer Ag, 5090 Leverkusen | Antireflex beschichtete, transparente abdeckung von zeichen, insbesondere fuer anzeigegeraete |
| US5670224A (en) * | 1992-11-13 | 1997-09-23 | Energy Conversion Devices, Inc. | Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates |
| CH685755A5 (de) * | 1993-06-03 | 1995-09-29 | Tetra Pak Suisse Sa | Verfahren zur Herstellung eines Schichtstoffes. |
| US5679412A (en) * | 1993-10-28 | 1997-10-21 | Manfred R. Kuehnle | Method and apparatus for producing gas impermeable, chemically inert container structures for food and volatile substances |
| JP2788412B2 (ja) * | 1994-08-11 | 1998-08-20 | 麒麟麦酒株式会社 | 炭素膜コーティングプラスチック容器の製造装置および製造方法 |
| DE4438359C2 (de) | 1994-10-27 | 2001-10-04 | Schott Glas | Behälter aus Kunststoff mit einer Sperrbeschichtung |
| DE4445427C2 (de) * | 1994-12-20 | 1997-04-30 | Schott Glaswerke | Plasma-CVD-Verfahren zur Herstellung einer Gradientenschicht |
| WO1996033098A2 (en) | 1995-04-13 | 1996-10-24 | Xmx Corporation | Gas-impermeable, chemically inert container structure and method of producingthe same |
| EP0782042B1 (en) * | 1995-12-27 | 1999-12-01 | Fuji Photo Film Co., Ltd. | Hydrazine compound and silver halide photographic photosensitive material comprising the same |
| US5702770A (en) * | 1996-01-30 | 1997-12-30 | Becton, Dickinson And Company | Method for plasma processing |
| DE69736790T2 (de) * | 1996-06-27 | 2007-08-16 | Nissin Electric Co., Ltd. | Mit einem Kohlenstofffilm beschichteter Gegenstand und Verfahren zu dessen Herstellung |
| DE19634795C2 (de) * | 1996-08-29 | 1999-11-04 | Schott Glas | Plasma-CVD-Anlage mit einem Array von Mikrowellen-Plasmaelektroden und Plasma-CVD-Verfahren |
| US6001429A (en) * | 1997-08-07 | 1999-12-14 | Becton Dickinson And Company | Apparatus and method for plasma processing |
| JP3906325B2 (ja) | 1997-10-09 | 2007-04-18 | テトラ ラバル ホールデイングス アンド ファイナンス エス エイ | 気体及び芳香バリア特性を備える包装積層体 |
| JPH11170611A (ja) | 1997-12-05 | 1999-06-29 | Konica Corp | 画像記録装置 |
| JP4121619B2 (ja) | 1998-06-08 | 2008-07-23 | 大日本印刷株式会社 | 透明バリア性フィルムおよびそれを使用した積層体 |
| DE19901834A1 (de) | 1999-01-19 | 2000-07-20 | Leybold Systems Gmbh | Verfahren zum Beschichten von Substraten aus Kunststoff |
| US20010038894A1 (en) * | 2000-03-14 | 2001-11-08 | Minoru Komada | Gas barrier film |
| CN100529256C (zh) * | 2000-06-09 | 2009-08-19 | 宝洁公司 | 可生物降解的涂敷基材 |
| US6398960B1 (en) * | 2000-10-31 | 2002-06-04 | Solutions Industrial & Environmental Services, Inc. | Method for remediation of aquifers |
| JP3730508B2 (ja) * | 2000-11-13 | 2006-01-05 | 株式会社東芝 | 半導体記憶装置およびその動作方法 |
| US7109070B2 (en) * | 2002-08-07 | 2006-09-19 | Schot Glas | Production of a composite material having a biodegradable plastic substrate and at least one coating |
| KR100506941B1 (ko) * | 2003-08-19 | 2005-08-05 | 삼성전자주식회사 | 더미 셀들을 갖는 플래쉬 메모리소자 및 그것의 소거방법들 |
| KR100754894B1 (ko) * | 2005-04-20 | 2007-09-04 | 삼성전자주식회사 | 더미 메모리 셀을 가지는 낸드 플래시 메모리 장치 |
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- 2002-08-07 JP JP2003519542A patent/JP4388804B2/ja not_active Expired - Fee Related
- 2002-08-07 DE DE50212906T patent/DE50212906D1/de not_active Expired - Lifetime
- 2002-08-07 WO PCT/EP2002/008853 patent/WO2003014415A1/de not_active Ceased
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- 2002-08-07 US US10/486,056 patent/US7931955B2/en not_active Expired - Fee Related
- 2002-08-07 EP EP02762433A patent/EP1415018B1/de not_active Expired - Lifetime
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| Publication number | Publication date |
|---|---|
| US7931955B2 (en) | 2011-04-26 |
| DE10139305A1 (de) | 2003-03-06 |
| JP2004538176A (ja) | 2004-12-24 |
| EP1415018A1 (de) | 2004-05-06 |
| ATE411411T1 (de) | 2008-10-15 |
| DE50212906D1 (de) | 2008-11-27 |
| US20040247948A1 (en) | 2004-12-09 |
| EP1415018B1 (de) | 2008-10-15 |
| WO2003014415A1 (de) | 2003-02-20 |
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