JP4387392B2 - シールドケースおよびこれを有するmemsマイクロホン - Google Patents
シールドケースおよびこれを有するmemsマイクロホン Download PDFInfo
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- JP4387392B2 JP4387392B2 JP2006250915A JP2006250915A JP4387392B2 JP 4387392 B2 JP4387392 B2 JP 4387392B2 JP 2006250915 A JP2006250915 A JP 2006250915A JP 2006250915 A JP2006250915 A JP 2006250915A JP 4387392 B2 JP4387392 B2 JP 4387392B2
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- Prior art keywords
- top plate
- shield case
- mems microphone
- plate
- mems
- Prior art date
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- Expired - Fee Related
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0077—Other packages not provided for in groups B81B7/0035 - B81B7/0074
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/01—Electrostatic transducers characterised by the use of electrets
- H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0257—Microphones or microspeakers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/163—Connection portion, e.g. seal
- H01L2924/16315—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2499/00—Aspects covered by H04R or H04S not otherwise provided for in their subgroups
- H04R2499/10—General applications
- H04R2499/11—Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's
Description
図1は、本実施の形態1のMEMSマイクロホン100の外観斜視図を示す。図2は、MEMSマイクロホン100の縦断面図(図1のB−B線断面図)を示している。図1・図2に示すように、MEMSマイクロホン100は、基板101と、MEMSチップ102と、シールドケース103とを有するものである。
天板の端部に角を形成し且つ側面板を偏肉構造にして天板303aの平坦部の面積を拡大したことで、音孔103cの位置を、チャッキングエリアSと重ならない場所に配置し、かつ、音孔103cから天板103aの各端までの距離L1・L2がそれぞれ1[mm]以上の間隔を有する位置に設定することが可能となる。
次に、MEMSマイクロホン100を携帯電話に使用する例について説明する。図4は、MEMSマイクロホン100が搭載された携帯電話150の外観斜視図である。図5は、携帯電話150のマイク部付近の要部断面図(図4中のE−E線断面図)である。
101 基板
102 MEMSチップ
103 シールドケース
103a 天板
103b 側面板
103c 音孔
103d R形状部
103e はんだフィレット
103f 折曲部
150 携帯電話
151 筐体
152 筐体上の音孔
154 ガスケット
155 携帯電話の主基板
Claims (20)
- 基板と、
前記基板に実装されるMEMSチップと、
前記MEMSチップを外部から遮蔽するシールドケースであって、天板と側面板とを有し、前記側面板の肉厚が前記天板の肉厚より厚いシールドケースと、を備え、
前記シールドケースの重心位置は、側面板と天板の肉厚が均一であるシールドケースの重心位置と比較して安定しているMEMSマイクロホン。 - 前記側面板の端部は、前記基板における前記MEMSチップが実装される面に固着されていることを特徴とする請求項1に記載のMEMSマイクロホン。
- 前記シールドケースの天板の端部と前記側面板とで形成される折曲部が、角を有する形状である請求項1又は2に記載のMEMSマイクロホン。
- 前記側面板の端部が、前記シールドケースの内側に向けてR形状部を有する請求項1〜3のいずれか1項に記載のMEMSマイクロホン。
- 前記側面板の端部に形成された前記R形状部と前記基板との間に半田が形成されていることを特徴とする請求項4に記載のMEMSマイクロホン。
- 前記シールドケースの天板の端部は角を有する形状であって、前記側面板上には前記天板の平坦部分があることを特徴とする請求項1〜5のいずれか1項に記載のMEMSマイクロホン。
- 前記シールドケースはNiメッキを有することを特徴とする請求項1〜6のいずれか1項に記載のMEMSマイクロホン。
- 前記天板の厚さは0.1mm、前記側面板の厚さは0.25mmであることを特徴とする請求項1〜7のいずれか1項に記載のMEMSマイクロホン。
- 前記天板は、音孔を有することを特徴とする請求項1〜8のいずれか1項に記載のMEMSマイクロホン。
- 前記基板の実装面が3mm×4mmであって、前記音孔から前記天板の各端までの距離がそれぞれ1mm以上有することを特徴とする請求項9に記載のMEMSマイクロホン。
- 前記基板の実装面が3mm×4mmであることを特徴とする請求項1〜9のいずれか1項に記載のMEMSマイクロホン。
- 前記音孔から前記天板の各端までの距離がそれぞれ1mm以上であることを特徴とする請求項9に記載のMEMSマイクロホン。
- 前記基板の実装面が3mm×4mm以下であることを特徴とする請求項1〜8のいずれか1項に記載のMEMSマイクロホン。
- 前記天板は音孔を有し、前記音孔から前記天板の各端までの距離がそれぞれ1mm以上であることを特徴とする請求項13に記載のMEMSマイクロホン。
- 前記天板と前記側面板は、一体となっており、
前記天板及び前記側面板は、金属材料からなることを特徴とする請求項1〜14のいずれか1項に記載のMEMSマイクロホン。 - 筐体とMEMSマイクロホンとを有する携帯電話であって、
前記MEMSマイクロホンは、MEMSチップと、前記MEMSチップが実装される基板と、前記MEMSチップを覆うシールドケースを有し、
前記ケースは天板と側面板から構成され、
前記側面板の肉厚が前記天板の肉厚より厚く、
前記シールドケースの重心位置は、側面板と天板の肉厚が均一であるシールドケースの重心位置と比較して安定している携帯電話。 - 前記側面板の端部は、前記基板における前記MEMSチップが実装される面に固着されていることを特徴とする請求項16に記載の携帯電話。
- 前記MEMSマイクロホンと前記筐体との間に、ガスケットが形成されていることを特徴とする請求項16または17に記載の携帯電話。
- 前記天板に形成された音孔と、前記筐体に形成された音孔が繋がっていることを特徴とする請求項16〜18のいずれか1項に記載の携帯電話。
- 前記天板に形成された音孔と前記筐体に形成された音孔との間には、音響抵抗材が形成されていることを特徴とする請求項16〜19のいずれか1項に記載の携帯電話。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006250915A JP4387392B2 (ja) | 2006-09-15 | 2006-09-15 | シールドケースおよびこれを有するmemsマイクロホン |
CNA2007800041936A CN101379869A (zh) | 2006-09-15 | 2007-09-13 | 屏蔽壳和具有屏蔽壳的微机电系统传声器 |
US12/160,663 US7904123B2 (en) | 2006-09-15 | 2007-09-13 | Shield case and MEMS microphone having it |
PCT/JP2007/067846 WO2008032785A1 (fr) | 2006-09-15 | 2007-09-13 | Boîtier de protection et microphone mems ayant celui-ci |
US13/014,340 US20110116661A1 (en) | 2006-09-15 | 2011-01-26 | Shield case and mems microphone having it |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006250915A JP4387392B2 (ja) | 2006-09-15 | 2006-09-15 | シールドケースおよびこれを有するmemsマイクロホン |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009174336A Division JP2009247007A (ja) | 2009-07-27 | 2009-07-27 | シールドケースおよびこれを有するmemsマイクロホン |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008072580A JP2008072580A (ja) | 2008-03-27 |
JP2008072580A5 JP2008072580A5 (ja) | 2009-06-18 |
JP4387392B2 true JP4387392B2 (ja) | 2009-12-16 |
Family
ID=39183839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006250915A Expired - Fee Related JP4387392B2 (ja) | 2006-09-15 | 2006-09-15 | シールドケースおよびこれを有するmemsマイクロホン |
Country Status (4)
Country | Link |
---|---|
US (2) | US7904123B2 (ja) |
JP (1) | JP4387392B2 (ja) |
CN (1) | CN101379869A (ja) |
WO (1) | WO2008032785A1 (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
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US8570886B2 (en) | 2008-03-19 | 2013-10-29 | Nec Corporation | Communication system, mobile station, base station, response decision method, resource configuration decision method, and program |
US8450817B2 (en) * | 2008-08-14 | 2013-05-28 | Knowles Electronics Llc | Microelectromechanical system package with strain relief bridge |
JP2010081192A (ja) * | 2008-09-25 | 2010-04-08 | Rohm Co Ltd | Memsセンサ |
JP5481852B2 (ja) | 2008-12-12 | 2014-04-23 | 船井電機株式会社 | マイクロホンユニット及びそれを備えた音声入力装置 |
JP2010161271A (ja) * | 2009-01-09 | 2010-07-22 | Panasonic Corp | 半導体パッケージ |
JP5321111B2 (ja) | 2009-02-13 | 2013-10-23 | 船井電機株式会社 | マイクロホンユニット |
JP2010258720A (ja) * | 2009-04-23 | 2010-11-11 | Murata Mfg Co Ltd | 音響的トランスデューサユニット |
US8340735B2 (en) | 2010-08-06 | 2012-12-25 | Research In Motion Limited | Electromagnetic shielding and an acoustic chamber for a microphone in a mobile electronic device |
JP6034619B2 (ja) * | 2011-08-22 | 2016-11-30 | パナソニック株式会社 | Mems素子およびそれを用いた電気機器 |
CN103002390A (zh) * | 2011-09-08 | 2013-03-27 | 苏州恒听电子有限公司 | 用于助听器的传声器电磁屏蔽壳 |
DE102012101505B4 (de) * | 2012-02-24 | 2016-03-03 | Epcos Ag | Verfahren zur Herstellung eines Sensors |
US9402118B2 (en) * | 2012-07-27 | 2016-07-26 | Knowles Electronics, Llc | Housing and method to control solder creep on housing |
KR102008374B1 (ko) * | 2012-08-03 | 2019-10-23 | 삼성전자주식회사 | 휴대용 단말기의 입력장치 |
US9521499B2 (en) * | 2013-06-26 | 2016-12-13 | Infineon Technologies Ag | Electronic device with large back volume for electromechanical transducer |
KR102161546B1 (ko) * | 2014-02-05 | 2020-10-05 | 삼성전자 주식회사 | 전자 기기 및 그의 운용 방법 |
DE102015100757B3 (de) * | 2015-01-20 | 2016-06-16 | Epcos Ag | Modul mit spannungsfrei befestigtem MEMS-Bauelement |
KR101703628B1 (ko) * | 2015-09-25 | 2017-02-07 | 현대자동차 주식회사 | 마이크로폰 및 그 제조방법 |
US20170240418A1 (en) * | 2016-02-18 | 2017-08-24 | Knowles Electronics, Llc | Low-cost miniature mems vibration sensor |
KR101893056B1 (ko) * | 2016-11-15 | 2018-10-04 | 소스트 주식회사 | 멤스 마이크로폰 칩 구조체 및 마이크로폰 패키지 |
CN107426638B (zh) * | 2017-07-06 | 2023-08-25 | 深圳市欢太科技有限公司 | 麦克风组件及具有其的终端 |
US11805342B2 (en) | 2019-09-22 | 2023-10-31 | xMEMS Labs, Inc. | Sound producing package structure and manufacturing method thereof |
US11252511B2 (en) | 2019-12-27 | 2022-02-15 | xMEMS Labs, Inc. | Package structure and methods of manufacturing sound producing chip, forming package structure and forming sound producing apparatus |
US11395073B2 (en) * | 2020-04-18 | 2022-07-19 | xMEMS Labs, Inc. | Sound producing package structure and method for packaging sound producing package structure |
USD905022S1 (en) | 2020-07-22 | 2020-12-15 | Crown Tech Llc | Microphone isolation shield |
USD910604S1 (en) | 2020-07-22 | 2021-02-16 | Crown Tech Llc | Microphone isolation shield |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1202713A (en) | 1984-03-16 | 1986-04-01 | Beverley W. Gumb | Transmitter assembly for a telephone handset |
JP3113832B2 (ja) | 1997-02-20 | 2000-12-04 | 松下電器産業株式会社 | マイクロホン・ホルダー |
US7023066B2 (en) | 2001-11-20 | 2006-04-04 | Knowles Electronics, Llc. | Silicon microphone |
JP3956356B2 (ja) | 2002-05-20 | 2007-08-08 | シチズン電子株式会社 | マイクロホン |
JP4309643B2 (ja) | 2002-11-29 | 2009-08-05 | 日本特殊陶業株式会社 | セラミック電子部品の製造方法 |
JP4264103B2 (ja) | 2004-03-03 | 2009-05-13 | パナソニック株式会社 | エレクトレットコンデンサーマイクロホン |
JP3926350B2 (ja) | 2004-06-10 | 2007-06-06 | Necアクセステクニカ株式会社 | 携帯端末の前面外装カバー、携帯端末及び携帯電話機 |
JP4483514B2 (ja) | 2004-10-08 | 2010-06-16 | 株式会社村田製作所 | 金属ケース付き電子部品の製造方法および製造装置 |
JP2006211468A (ja) | 2005-01-31 | 2006-08-10 | Sanyo Electric Co Ltd | 半導体センサ |
-
2006
- 2006-09-15 JP JP2006250915A patent/JP4387392B2/ja not_active Expired - Fee Related
-
2007
- 2007-09-13 US US12/160,663 patent/US7904123B2/en active Active
- 2007-09-13 WO PCT/JP2007/067846 patent/WO2008032785A1/ja active Application Filing
- 2007-09-13 CN CNA2007800041936A patent/CN101379869A/zh active Pending
-
2011
- 2011-01-26 US US13/014,340 patent/US20110116661A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20110116661A1 (en) | 2011-05-19 |
US7904123B2 (en) | 2011-03-08 |
US20100167799A1 (en) | 2010-07-01 |
WO2008032785A1 (fr) | 2008-03-20 |
JP2008072580A (ja) | 2008-03-27 |
CN101379869A (zh) | 2009-03-04 |
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