JP4379902B2 - 光導波路デバイスの製造方法 - Google Patents

光導波路デバイスの製造方法 Download PDF

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Publication number
JP4379902B2
JP4379902B2 JP2000208580A JP2000208580A JP4379902B2 JP 4379902 B2 JP4379902 B2 JP 4379902B2 JP 2000208580 A JP2000208580 A JP 2000208580A JP 2000208580 A JP2000208580 A JP 2000208580A JP 4379902 B2 JP4379902 B2 JP 4379902B2
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Japan
Prior art keywords
optical waveguide
substrate
cutting
waveguide device
dicing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000208580A
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English (en)
Japanese (ja)
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JP2002022993A (ja
JP2002022993A5 (enrdf_load_stackoverflow
Inventor
宏 増田
信生 宮寺
亨 高橋
正利 山口
敏裕 黒田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Resonac Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Showa Denko Materials Co Ltd, Resonac Corp filed Critical Hitachi Chemical Co Ltd
Priority to JP2000208580A priority Critical patent/JP4379902B2/ja
Publication of JP2002022993A publication Critical patent/JP2002022993A/ja
Publication of JP2002022993A5 publication Critical patent/JP2002022993A5/ja
Application granted granted Critical
Publication of JP4379902B2 publication Critical patent/JP4379902B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000208580A 2000-07-10 2000-07-10 光導波路デバイスの製造方法 Expired - Lifetime JP4379902B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000208580A JP4379902B2 (ja) 2000-07-10 2000-07-10 光導波路デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000208580A JP4379902B2 (ja) 2000-07-10 2000-07-10 光導波路デバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2002022993A JP2002022993A (ja) 2002-01-23
JP2002022993A5 JP2002022993A5 (enrdf_load_stackoverflow) 2007-04-26
JP4379902B2 true JP4379902B2 (ja) 2009-12-09

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ID=18705138

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JP2000208580A Expired - Lifetime JP4379902B2 (ja) 2000-07-10 2000-07-10 光導波路デバイスの製造方法

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JP (1) JP4379902B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100632281B1 (ko) 2001-12-28 2006-10-12 히다치 가세고교 가부시끼가이샤 폴리머 광도파로 필름
JP4440697B2 (ja) * 2004-04-22 2010-03-24 浜松ホトニクス株式会社 光導波路基板及びその製造方法
JP2006145902A (ja) * 2004-11-19 2006-06-08 Fujitsu Ltd 光伝送用チップおよびその製造方法
JP4780532B2 (ja) * 2005-11-18 2011-09-28 日立化成工業株式会社 光デバイス
JP4905176B2 (ja) * 2007-02-22 2012-03-28 Ｊｓｒ株式会社 フィルム状光導波路の製造方法
JP7070572B2 (ja) * 2017-08-16 2022-05-18 Ａｇｃ株式会社 ポリマー光導波路

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JP2002022993A (ja) 2002-01-23

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