JP4376225B2 - テーブル装置 - Google Patents
テーブル装置 Download PDFInfo
- Publication number
- JP4376225B2 JP4376225B2 JP2005344238A JP2005344238A JP4376225B2 JP 4376225 B2 JP4376225 B2 JP 4376225B2 JP 2005344238 A JP2005344238 A JP 2005344238A JP 2005344238 A JP2005344238 A JP 2005344238A JP 4376225 B2 JP4376225 B2 JP 4376225B2
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- linear
- moving
- sliding means
- sliding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
2 不動部
3 直動部
4 第一アクチュエータ
5 不動部
6 直動部
7 第二アクチュエータ
8 第一摺動手段
9 第二摺動手段
10 第三摺動手段
10a・10b 摺動手段
12 第四摺動手段
Claims (3)
- ワークが載置されるテーブルを具備したテーブル装置であって、第一方向X及び第二方向Yに移動するテーブルと、不動部と該不動部に対して直動する直動部とから成り前記テーブルを第一方向Xに移動させるための第一アクチュエータと、この第一アクチュエータの直動部の直動方向に平行若しくは該直動方向と同一直線上に配される不動部と該不動部に対して直動する直動部とから成り該第一アクチュエータと略同一平面上に配され前記テーブルを第二方向Yに移動させるための第二アクチュエータと、前記第一アクチュエータの直動部と連設され前記テーブルを第一方向Xに摺動させるための第一摺動手段と、この第一摺動手段と連設され前記テーブルを第二方向Yに摺動させるための第二摺動手段と、前記第二アクチュエータの直動部と連設される摺動手段及び前記テーブルに前記第二アクチュエータの直動部の直動方向に対して所定の角度θ1を有する状態で設けられ前記摺動手段と組み合わせられる摺動手段から成り前記第二摺動手段と協働して前記テーブルを第二方向Yに摺動させる第三摺動手段と、前記第二アクチュエータの直動部の直動をガイドする第四摺動手段とで構成されていることを特徴とするテーブル装置。
- 請求項1記載のテーブル装置において、前記所定の角度θ1は45°に設定されていることを特徴とするテーブル装置。
- 請求項1,2いずれか1項に記載のテーブル装置において、前記第二アクチュエータの前記不動部は前記第一アクチュエータの前記直動部の直動方向に平行に設けられていることを特徴とするテーブル装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005344238A JP4376225B2 (ja) | 2005-11-29 | 2005-11-29 | テーブル装置 |
US11/531,763 US7823516B2 (en) | 2005-11-29 | 2006-09-14 | Table apparatus |
EP06019569A EP1790430A1 (en) | 2005-11-29 | 2006-09-19 | Table apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005344238A JP4376225B2 (ja) | 2005-11-29 | 2005-11-29 | テーブル装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007144584A JP2007144584A (ja) | 2007-06-14 |
JP4376225B2 true JP4376225B2 (ja) | 2009-12-02 |
Family
ID=37776808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005344238A Expired - Fee Related JP4376225B2 (ja) | 2005-11-29 | 2005-11-29 | テーブル装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7823516B2 (ja) |
EP (1) | EP1790430A1 (ja) |
JP (1) | JP4376225B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112006003352B4 (de) * | 2005-12-06 | 2017-05-11 | Thk Co., Ltd. | XY-Tisch-Stellglied |
US8104752B2 (en) * | 2006-03-20 | 2012-01-31 | Boaz Eidelberg | Integrated large XY rotary positioning table with virtual center of rotation |
DE102008063996A1 (de) * | 2008-12-19 | 2010-06-24 | Rudi Broghammer | Tisch für Objekte |
CN102554638B (zh) * | 2010-12-31 | 2016-06-29 | 富泰华工业(深圳)有限公司 | 定位机台 |
GB201204413D0 (en) * | 2012-03-13 | 2012-04-25 | Elopak Systems | Improvements in or relating to rotary die cutting apparatus |
EP3103581B1 (de) * | 2015-06-11 | 2019-10-30 | Schneeberger Holding AG | Positioniervorrichtung |
FR3046451B1 (fr) * | 2016-01-06 | 2018-07-06 | Micro-Controle - Spectra-Physics | Systeme de generation de deplacement d'une plaque de support selon six degres de liberte. |
CN107290119A (zh) * | 2016-04-13 | 2017-10-24 | 富泰华工业(深圳)有限公司 | 抗摔损测试机构及具有该测试机构的测试装置 |
JP6690516B2 (ja) * | 2016-12-13 | 2020-04-28 | 株式会社デンソー | 移送装置 |
US11938677B2 (en) * | 2020-05-14 | 2024-03-26 | John Martin Harra | Positioning system |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3495519A (en) * | 1967-02-01 | 1970-02-17 | Microform Data Systems | Xy table |
JPS55134414A (en) | 1979-04-06 | 1980-10-20 | Hitachi Ltd | Precise moving unit |
JPS61230829A (ja) | 1985-04-04 | 1986-10-15 | Toshiba Mach Co Ltd | ステ−ジ装置 |
NL8700445A (nl) | 1986-02-28 | 1987-09-16 | Nippon Seiko Kk | Positioneertafel voor een samengestelde beweging. |
KR0129662B1 (ko) * | 1987-10-30 | 1998-04-07 | 고다까 토시오 | 이동 테이블 장치 |
JP2557316Y2 (ja) * | 1990-02-28 | 1997-12-10 | エヌティエヌ 株式会社 | 移動テーブル |
DE4107881C2 (de) * | 1990-03-13 | 1997-04-17 | Ntn Toyo Bearing Co Ltd | Verstellbarer Tisch |
JPH05277870A (ja) * | 1992-03-27 | 1993-10-26 | Nippon Thompson Co Ltd | 駆動装置及びこれを具備したxy駆動装置 |
JPH05280610A (ja) * | 1992-03-31 | 1993-10-26 | Nippon Seiko Kk | 位置決めテーブル装置 |
JPH0818210B2 (ja) * | 1992-05-15 | 1996-02-28 | 健 柳沢 | 2次元運動機構 |
JP3346838B2 (ja) * | 1993-06-29 | 2002-11-18 | 有限会社創造庵 | 回転運動機構 |
JP3459315B2 (ja) * | 1994-07-11 | 2003-10-20 | 日本トムソン株式会社 | ボールねじを具備した駆動装置及び該駆動装置を含むxy駆動装置 |
JP3878252B2 (ja) * | 1996-07-19 | 2007-02-07 | 日本ベアリング株式会社 | テーブル装置 |
JP3966921B2 (ja) | 1996-07-19 | 2007-08-29 | 日本ベアリング株式会社 | テーブル装置 |
US5724893A (en) * | 1996-10-15 | 1998-03-10 | Taichung Machinery Works Co. Ltd. | Servo-type shaking table assembly |
JPH11300557A (ja) * | 1998-04-15 | 1999-11-02 | Thk Co Ltd | 移動テーブル装置 |
ES2210703T3 (es) * | 1998-07-14 | 2004-07-01 | Kummer Freres Sa, Fabrique De Machines | Dispositivo de accionamiento de una plataforma para desplazamiento en un plano. |
JP2000230991A (ja) * | 1999-02-12 | 2000-08-22 | Takeshi Yanagisawa | 2次元運動機構 |
JP4485138B2 (ja) * | 2003-03-31 | 2010-06-16 | 日本トムソン株式会社 | 2軸直動・旋回案内ユニット及びそれを用いたテーブル装置 |
-
2005
- 2005-11-29 JP JP2005344238A patent/JP4376225B2/ja not_active Expired - Fee Related
-
2006
- 2006-09-14 US US11/531,763 patent/US7823516B2/en not_active Expired - Fee Related
- 2006-09-19 EP EP06019569A patent/EP1790430A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2007144584A (ja) | 2007-06-14 |
US7823516B2 (en) | 2010-11-02 |
US20070119347A1 (en) | 2007-05-31 |
EP1790430A1 (en) | 2007-05-30 |
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