JP4362559B2 - 電気容量式力測定装置 - Google Patents

電気容量式力測定装置 Download PDF

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Publication number
JP4362559B2
JP4362559B2 JP05738199A JP5738199A JP4362559B2 JP 4362559 B2 JP4362559 B2 JP 4362559B2 JP 05738199 A JP05738199 A JP 05738199A JP 5738199 A JP5738199 A JP 5738199A JP 4362559 B2 JP4362559 B2 JP 4362559B2
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JP
Japan
Prior art keywords
measuring device
force measuring
elastic deformation
circuit
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP05738199A
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English (en)
Japanese (ja)
Other versions
JP2000258260A (ja
JP2000258260A5 (enExample
Inventor
豊 山形
亘彦 尾崎
モロゾフ ビクター
浩三 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP05738199A priority Critical patent/JP4362559B2/ja
Application filed by RIKEN filed Critical RIKEN
Priority to AU28283/00A priority patent/AU743046B2/en
Priority to EP00906687A priority patent/EP1077367B1/en
Priority to US09/674,387 priority patent/US6628124B1/en
Priority to CA002331699A priority patent/CA2331699C/en
Priority to AT00906687T priority patent/ATE282820T1/de
Priority to DE60015878T priority patent/DE60015878T2/de
Priority to PCT/JP2000/001297 priority patent/WO2000052439A1/ja
Priority to NZ507946A priority patent/NZ507946A/xx
Publication of JP2000258260A publication Critical patent/JP2000258260A/ja
Publication of JP2000258260A5 publication Critical patent/JP2000258260A5/ja
Application granted granted Critical
Publication of JP4362559B2 publication Critical patent/JP4362559B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Amplifiers (AREA)
  • Braking Elements And Transmission Devices (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP05738199A 1999-03-04 1999-03-04 電気容量式力測定装置 Expired - Fee Related JP4362559B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP05738199A JP4362559B2 (ja) 1999-03-04 1999-03-04 電気容量式力測定装置
NZ507946A NZ507946A (en) 1999-03-04 2000-03-03 Electrocapacitive type force measuring apparatus with a sensor unit for detecting a change in an electrostatic capacitance
US09/674,387 US6628124B1 (en) 1999-03-04 2000-03-03 Electrocapacitive force measuring apparatus
CA002331699A CA2331699C (en) 1999-03-04 2000-03-03 Electrocapasitive type force measuring apparatus
AT00906687T ATE282820T1 (de) 1999-03-04 2000-03-03 Kapazitiver kraftwandler
DE60015878T DE60015878T2 (de) 1999-03-04 2000-03-03 Kapazitiver kraftwandler
AU28283/00A AU743046B2 (en) 1999-03-04 2000-03-03 Capacitive force gauge
EP00906687A EP1077367B1 (en) 1999-03-04 2000-03-03 Capacitive force gauge
PCT/JP2000/001297 WO2000052439A1 (en) 1999-03-04 2000-03-03 Capacitive force gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05738199A JP4362559B2 (ja) 1999-03-04 1999-03-04 電気容量式力測定装置

Publications (3)

Publication Number Publication Date
JP2000258260A JP2000258260A (ja) 2000-09-22
JP2000258260A5 JP2000258260A5 (enExample) 2006-03-23
JP4362559B2 true JP4362559B2 (ja) 2009-11-11

Family

ID=13054041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05738199A Expired - Fee Related JP4362559B2 (ja) 1999-03-04 1999-03-04 電気容量式力測定装置

Country Status (9)

Country Link
US (1) US6628124B1 (enExample)
EP (1) EP1077367B1 (enExample)
JP (1) JP4362559B2 (enExample)
AT (1) ATE282820T1 (enExample)
AU (1) AU743046B2 (enExample)
CA (1) CA2331699C (enExample)
DE (1) DE60015878T2 (enExample)
NZ (1) NZ507946A (enExample)
WO (1) WO2000052439A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006255847A (ja) * 2005-03-18 2006-09-28 Kagawa Univ ナノピンセット、これを備える微小力計測装置および方法
US20070141605A1 (en) * 2005-11-21 2007-06-21 Applera Corporation Portable preparation, analysis, and detection apparatus for nucleic acid processing
CN102539028B (zh) * 2012-01-04 2014-10-15 天津大学 基于静电力原理的垂直式超微力值测量装置及其溯源方法
US11641168B2 (en) * 2017-07-17 2023-05-02 Georgia Tech Research Corporation Parametric resonator for electrical transduction
US10925154B2 (en) 2019-01-31 2021-02-16 Texas Instruments Incorporated Tamper detection
CN116593043B (zh) * 2023-06-19 2025-09-30 黑龙江华安精益计量技术研究院有限公司 一种用于力传感器数据采集系统频率响应装置及测量方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3595084A (en) * 1970-02-27 1971-07-27 Continental Can Co Digital transducer system
US4051721A (en) 1976-01-13 1977-10-04 Scope Incorporated Capacitive force-measuring system
US4653508A (en) * 1976-06-21 1987-03-31 Cosman Eric R Pressure-balanced telemetric pressure sensing system and method therefore
CH662181A5 (de) 1983-09-16 1987-09-15 Mettler Instrumente Ag Kraftmesser.
DE3750408T2 (de) 1987-05-12 1995-03-30 International Business Machines Corp., Armonk, N.Y. Atomarer Kräftesensor zur Messung der Eigenschaften eines Datenträgers.
JPH01285247A (ja) * 1988-05-12 1989-11-16 Olympus Optical Co Ltd 医療用カプセル
JP2753283B2 (ja) 1988-11-24 1998-05-18 株式会社日立製作所 Ｎｍｒ装置
US5085070A (en) 1990-02-07 1992-02-04 At&T Bell Laboratories Capacitive force-balance system for measuring small forces and pressures
JP3025313B2 (ja) 1990-12-31 2000-03-27 株式会社ワコー 静電容量の変化を利用したセンサの製造方法
JP2971610B2 (ja) 1991-03-28 1999-11-08 和廣 岡田 力・加速度・磁気の検出装置およびその製造方法
JPH06265342A (ja) * 1992-01-30 1994-09-20 Seiko Instr Inc 微小変位測定用ヘッド
JPH0755615A (ja) * 1993-08-10 1995-03-03 Agency Of Ind Science & Technol 静電容量型力センサ
JPH09101106A (ja) * 1995-10-03 1997-04-15 Nissin Electric Co Ltd 容量センサ−と容量測定方法
NZ333413A (en) 1996-06-20 2000-01-28 Univ New York apparatus and method for measuring the effect of chemicals on a polymeric film sample
JPH1130623A (ja) * 1997-07-11 1999-02-02 Nikon Corp 走査型静電容量顕微鏡

Also Published As

Publication number Publication date
US6628124B1 (en) 2003-09-30
AU2828300A (en) 2000-09-21
EP1077367B1 (en) 2004-11-17
CA2331699C (en) 2005-12-13
EP1077367A1 (en) 2001-02-21
JP2000258260A (ja) 2000-09-22
AU743046B2 (en) 2002-01-17
CA2331699A1 (en) 2000-09-08
DE60015878T2 (de) 2005-03-17
WO2000052439A1 (en) 2000-09-08
ATE282820T1 (de) 2004-12-15
NZ507946A (en) 2004-02-27
EP1077367A4 (en) 2002-05-22
DE60015878D1 (de) 2004-12-23

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