NZ507946A - Electrocapacitive type force measuring apparatus with a sensor unit for detecting a change in an electrostatic capacitance - Google Patents

Electrocapacitive type force measuring apparatus with a sensor unit for detecting a change in an electrostatic capacitance

Info

Publication number
NZ507946A
NZ507946A NZ507946A NZ50794600A NZ507946A NZ 507946 A NZ507946 A NZ 507946A NZ 507946 A NZ507946 A NZ 507946A NZ 50794600 A NZ50794600 A NZ 50794600A NZ 507946 A NZ507946 A NZ 507946A
Authority
NZ
New Zealand
Prior art keywords
electrode
resiliently deforming
deforming portion
face
sensor unit
Prior art date
Application number
NZ507946A
Other languages
English (en)
Inventor
Yutaka Yamagata
Tsunehiko Ozarki
Victor Morozov
Kozo Noue
Original Assignee
Riken
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Riken filed Critical Riken
Publication of NZ507946A publication Critical patent/NZ507946A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Amplifiers (AREA)
  • Braking Elements And Transmission Devices (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
NZ507946A 1999-03-04 2000-03-03 Electrocapacitive type force measuring apparatus with a sensor unit for detecting a change in an electrostatic capacitance NZ507946A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP05738199A JP4362559B2 (ja) 1999-03-04 1999-03-04 電気容量式力測定装置
PCT/JP2000/001297 WO2000052439A1 (en) 1999-03-04 2000-03-03 Capacitive force gauge

Publications (1)

Publication Number Publication Date
NZ507946A true NZ507946A (en) 2004-02-27

Family

ID=13054041

Family Applications (1)

Application Number Title Priority Date Filing Date
NZ507946A NZ507946A (en) 1999-03-04 2000-03-03 Electrocapacitive type force measuring apparatus with a sensor unit for detecting a change in an electrostatic capacitance

Country Status (9)

Country Link
US (1) US6628124B1 (enExample)
EP (1) EP1077367B1 (enExample)
JP (1) JP4362559B2 (enExample)
AT (1) ATE282820T1 (enExample)
AU (1) AU743046B2 (enExample)
CA (1) CA2331699C (enExample)
DE (1) DE60015878T2 (enExample)
NZ (1) NZ507946A (enExample)
WO (1) WO2000052439A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006255847A (ja) * 2005-03-18 2006-09-28 Kagawa Univ ナノピンセット、これを備える微小力計測装置および方法
US20070141605A1 (en) * 2005-11-21 2007-06-21 Applera Corporation Portable preparation, analysis, and detection apparatus for nucleic acid processing
CN102539028B (zh) * 2012-01-04 2014-10-15 天津大学 基于静电力原理的垂直式超微力值测量装置及其溯源方法
US11641168B2 (en) * 2017-07-17 2023-05-02 Georgia Tech Research Corporation Parametric resonator for electrical transduction
US10925154B2 (en) 2019-01-31 2021-02-16 Texas Instruments Incorporated Tamper detection
CN116593043B (zh) * 2023-06-19 2025-09-30 黑龙江华安精益计量技术研究院有限公司 一种用于力传感器数据采集系统频率响应装置及测量方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3595084A (en) * 1970-02-27 1971-07-27 Continental Can Co Digital transducer system
US4051721A (en) 1976-01-13 1977-10-04 Scope Incorporated Capacitive force-measuring system
US4653508A (en) * 1976-06-21 1987-03-31 Cosman Eric R Pressure-balanced telemetric pressure sensing system and method therefore
CH662181A5 (de) 1983-09-16 1987-09-15 Mettler Instrumente Ag Kraftmesser.
DE3750408T2 (de) 1987-05-12 1995-03-30 International Business Machines Corp., Armonk, N.Y. Atomarer Kräftesensor zur Messung der Eigenschaften eines Datenträgers.
JPH01285247A (ja) * 1988-05-12 1989-11-16 Olympus Optical Co Ltd 医療用カプセル
JP2753283B2 (ja) 1988-11-24 1998-05-18 株式会社日立製作所 Ｎｍｒ装置
US5085070A (en) 1990-02-07 1992-02-04 At&T Bell Laboratories Capacitive force-balance system for measuring small forces and pressures
JP3025313B2 (ja) 1990-12-31 2000-03-27 株式会社ワコー 静電容量の変化を利用したセンサの製造方法
JP2971610B2 (ja) 1991-03-28 1999-11-08 和廣 岡田 力・加速度・磁気の検出装置およびその製造方法
JPH06265342A (ja) * 1992-01-30 1994-09-20 Seiko Instr Inc 微小変位測定用ヘッド
JPH0755615A (ja) * 1993-08-10 1995-03-03 Agency Of Ind Science & Technol 静電容量型力センサ
JPH09101106A (ja) * 1995-10-03 1997-04-15 Nissin Electric Co Ltd 容量センサ−と容量測定方法
NZ333413A (en) 1996-06-20 2000-01-28 Univ New York apparatus and method for measuring the effect of chemicals on a polymeric film sample
JPH1130623A (ja) * 1997-07-11 1999-02-02 Nikon Corp 走査型静電容量顕微鏡

Also Published As

Publication number Publication date
US6628124B1 (en) 2003-09-30
AU2828300A (en) 2000-09-21
JP4362559B2 (ja) 2009-11-11
EP1077367B1 (en) 2004-11-17
CA2331699C (en) 2005-12-13
EP1077367A1 (en) 2001-02-21
JP2000258260A (ja) 2000-09-22
AU743046B2 (en) 2002-01-17
CA2331699A1 (en) 2000-09-08
DE60015878T2 (de) 2005-03-17
WO2000052439A1 (en) 2000-09-08
ATE282820T1 (de) 2004-12-15
EP1077367A4 (en) 2002-05-22
DE60015878D1 (de) 2004-12-23

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