JP4358777B2 - ジルコニアセッター及びセラミック基板の製造方法 - Google Patents

ジルコニアセッター及びセラミック基板の製造方法 Download PDF

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Publication number
JP4358777B2
JP4358777B2 JP2005125470A JP2005125470A JP4358777B2 JP 4358777 B2 JP4358777 B2 JP 4358777B2 JP 2005125470 A JP2005125470 A JP 2005125470A JP 2005125470 A JP2005125470 A JP 2005125470A JP 4358777 B2 JP4358777 B2 JP 4358777B2
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Prior art keywords
zirconia
ceramic substrate
ceramic green
zirconia setter
setter
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Expired - Lifetime
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JP2005125470A
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Japanese (ja)
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JP2006008497A (ja
Inventor
誠志 佐々木
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TDK Corp
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TDK Corp
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Priority to JP2005125470A priority Critical patent/JP4358777B2/ja
Priority to US11/125,261 priority patent/US7125600B2/en
Priority to TW094115621A priority patent/TW200602289A/zh
Publication of JP2006008497A publication Critical patent/JP2006008497A/ja
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3294—Antimony oxides, antimonates, antimonites or oxide forming salts thereof, indium antimonate
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    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
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    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
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    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP2005125470A 2004-05-24 2005-04-22 ジルコニアセッター及びセラミック基板の製造方法 Expired - Lifetime JP4358777B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005125470A JP4358777B2 (ja) 2004-05-24 2005-04-22 ジルコニアセッター及びセラミック基板の製造方法
US11/125,261 US7125600B2 (en) 2004-05-24 2005-05-10 Setter, method for manufacturing ceramic substrate, and ceramic substrate
TW094115621A TW200602289A (en) 2004-05-24 2005-05-13 Setter, method for manufacturing ceramic substrate, and ceramic substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004153808 2004-05-24
JP2005125470A JP4358777B2 (ja) 2004-05-24 2005-04-22 ジルコニアセッター及びセラミック基板の製造方法

Publications (2)

Publication Number Publication Date
JP2006008497A JP2006008497A (ja) 2006-01-12
JP4358777B2 true JP4358777B2 (ja) 2009-11-04

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JP2005125470A Expired - Lifetime JP4358777B2 (ja) 2004-05-24 2005-04-22 ジルコニアセッター及びセラミック基板の製造方法

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Country Link
US (1) US7125600B2 (enExample)
JP (1) JP4358777B2 (enExample)
TW (1) TW200602289A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7780905B2 (en) * 2008-03-04 2010-08-24 Pcc Airfoils, Inc. Supporting ceramic articles during firing
TWI531107B (zh) * 2010-08-17 2016-04-21 博隆能源股份有限公司 固態氧化物燃料電池之製造方法
WO2012133529A1 (ja) 2011-03-30 2012-10-04 日本碍子株式会社 圧電体基板の製造方法
US10627905B2 (en) * 2015-03-26 2020-04-21 Tianma Microelectronics Co., Ltd. Tactile sense presentation device, electronic apparatus, and method of driving tactile sense presentation device
DE102022103671A1 (de) * 2022-02-16 2023-08-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren zur Herstellung eines gesinterten Bauteils und Sinterunterlage zur Anordnung eines Bauteilrohlings innerhalb einer Sintereinheit

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2609318A (en) * 1949-12-08 1952-09-02 Carborundum Co Silicon carbide refractory article
JPS62128973A (ja) 1985-11-25 1987-06-11 松下電工株式会社 セラミツクス基板の焼成法
JPH01282157A (ja) 1988-05-07 1989-11-14 Matsushita Electric Works Ltd セラミック基板の製造法
JPH0891944A (ja) 1994-09-19 1996-04-09 Matsushita Electric Ind Co Ltd セラミックスの製造方法
US6001761A (en) * 1994-09-27 1999-12-14 Nippon Shokubai Co., Ltd. Ceramics sheet and production method for same
JPH09157038A (ja) 1995-12-06 1997-06-17 Tosoh Corp 焼成用セッター
JP4062845B2 (ja) 1999-02-26 2008-03-19 三菱マテリアル株式会社 脱脂・焼成用セッター及びその製造方法
JP2002104891A (ja) 2000-09-27 2002-04-10 Toray Ind Inc 電子部品焼成用治具

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US20060014038A1 (en) 2006-01-19
JP2006008497A (ja) 2006-01-12
TWI314546B (enExample) 2009-09-11
US7125600B2 (en) 2006-10-24
TW200602289A (en) 2006-01-16

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