JP4345132B2 - 振動アクチュエータおよびその駆動方法 - Google Patents

振動アクチュエータおよびその駆動方法 Download PDF

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Publication number
JP4345132B2
JP4345132B2 JP12740899A JP12740899A JP4345132B2 JP 4345132 B2 JP4345132 B2 JP 4345132B2 JP 12740899 A JP12740899 A JP 12740899A JP 12740899 A JP12740899 A JP 12740899A JP 4345132 B2 JP4345132 B2 JP 4345132B2
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Prior art keywords
frequency
relative motion
vibrator
vibration
drive
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Expired - Lifetime
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JP12740899A
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Japanese (ja)
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JP2000324860A5 (https=
JP2000324860A (ja
Inventor
智明 鈴木
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Nikon Corp
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Nikon Corp
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP12740899A 1999-05-07 1999-05-07 振動アクチュエータおよびその駆動方法 Expired - Lifetime JP4345132B2 (ja)

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JP12740899A JP4345132B2 (ja) 1999-05-07 1999-05-07 振動アクチュエータおよびその駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12740899A JP4345132B2 (ja) 1999-05-07 1999-05-07 振動アクチュエータおよびその駆動方法

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JP2000324860A JP2000324860A (ja) 2000-11-24
JP2000324860A5 JP2000324860A5 (https=) 2006-06-15
JP4345132B2 true JP4345132B2 (ja) 2009-10-14

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JP12740899A Expired - Lifetime JP4345132B2 (ja) 1999-05-07 1999-05-07 振動アクチュエータおよびその駆動方法

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4770043B2 (ja) * 2001-03-27 2011-09-07 セイコーエプソン株式会社 圧電アクチュエータの駆動装置、圧電アクチュエータの駆動方法、時計および携帯機器
US7396336B2 (en) 2003-10-30 2008-07-08 Sherwood Services Ag Switched resonant ultrasonic power amplifier system

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Publication number Publication date
JP2000324860A (ja) 2000-11-24

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