JP4343895B2 - 軟ｘ線用多層膜ミラー - Google Patents

軟ｘ線用多層膜ミラー Download PDF

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Publication number
JP4343895B2
JP4343895B2 JP2005348344A JP2005348344A JP4343895B2 JP 4343895 B2 JP4343895 B2 JP 4343895B2 JP 2005348344 A JP2005348344 A JP 2005348344A JP 2005348344 A JP2005348344 A JP 2005348344A JP 4343895 B2 JP4343895 B2 JP 4343895B2
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JP
Japan
Prior art keywords
layer
refractive index
soft
multilayer
multilayer film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005348344A
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English (en)
Japanese (ja)
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JP2007155407A5 (enExample
JP2007155407A (ja
Inventor
隆幸 三浦
謙二 安藤
秀宏 金沢
香子 今井
康治 寺西
和枝 高田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005348344A priority Critical patent/JP4343895B2/ja
Publication of JP2007155407A publication Critical patent/JP2007155407A/ja
Publication of JP2007155407A5 publication Critical patent/JP2007155407A5/ja
Application granted granted Critical
Publication of JP4343895B2 publication Critical patent/JP4343895B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2005348344A 2005-12-01 2005-12-01 軟ｘ線用多層膜ミラー Expired - Fee Related JP4343895B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005348344A JP4343895B2 (ja) 2005-12-01 2005-12-01 軟ｘ線用多層膜ミラー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005348344A JP4343895B2 (ja) 2005-12-01 2005-12-01 軟ｘ線用多層膜ミラー

Publications (3)

Publication Number Publication Date
JP2007155407A JP2007155407A (ja) 2007-06-21
JP2007155407A5 JP2007155407A5 (enExample) 2009-01-22
JP4343895B2 true JP4343895B2 (ja) 2009-10-14

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ID=38239992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005348344A Expired - Fee Related JP4343895B2 (ja) 2005-12-01 2005-12-01 軟ｘ線用多層膜ミラー

Country Status (1)

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JP (1) JP4343895B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5669295B2 (ja) * 2010-01-05 2015-02-12 独立行政法人日本原子力研究開発機構 多層膜光学素子
JP5340321B2 (ja) 2011-01-01 2013-11-13 キヤノン株式会社 ミラーおよびその製造方法、露光装置、ならびに、デバイス製造方法

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Publication number Publication date
JP2007155407A (ja) 2007-06-21

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