JP2007155407A5 - - Google Patents
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- Publication number
- JP2007155407A5 JP2007155407A5 JP2005348344A JP2005348344A JP2007155407A5 JP 2007155407 A5 JP2007155407 A5 JP 2007155407A5 JP 2005348344 A JP2005348344 A JP 2005348344A JP 2005348344 A JP2005348344 A JP 2005348344A JP 2007155407 A5 JP2007155407 A5 JP 2007155407A5
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- layer
- multilayer film
- index layer
- multilayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005348344A JP4343895B2 (ja) | 2005-12-01 | 2005-12-01 | 軟ｘ線用多層膜ミラー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005348344A JP4343895B2 (ja) | 2005-12-01 | 2005-12-01 | 軟ｘ線用多層膜ミラー |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007155407A JP2007155407A (ja) | 2007-06-21 |
| JP2007155407A5 true JP2007155407A5 (enExample) | 2009-01-22 |
| JP4343895B2 JP4343895B2 (ja) | 2009-10-14 |
Family
ID=38239992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005348344A Expired - Fee Related JP4343895B2 (ja) | 2005-12-01 | 2005-12-01 | 軟ｘ線用多層膜ミラー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4343895B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5669295B2 (ja) * | 2010-01-05 | 2015-02-12 | 独立行政法人日本原子力研究開発機構 | 多層膜光学素子 |
| JP5340321B2 (ja) | 2011-01-01 | 2013-11-13 | キヤノン株式会社 | ミラーおよびその製造方法、露光装置、ならびに、デバイス製造方法 |
-
2005
- 2005-12-01 JP JP2005348344A patent/JP4343895B2/ja not_active Expired - Fee Related
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