JP4334429B2 - 光学的測定方法及び光学的測定装置 - Google Patents

光学的測定方法及び光学的測定装置 Download PDF

Info

Publication number
JP4334429B2
JP4334429B2 JP2004210448A JP2004210448A JP4334429B2 JP 4334429 B2 JP4334429 B2 JP 4334429B2 JP 2004210448 A JP2004210448 A JP 2004210448A JP 2004210448 A JP2004210448 A JP 2004210448A JP 4334429 B2 JP4334429 B2 JP 4334429B2
Authority
JP
Japan
Prior art keywords
signal
pixel
light intensity
interest
target pixel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004210448A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006030024A (ja
Inventor
淳一 松村
憲治 大久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Engineering Co Ltd
Original Assignee
Toray Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Engineering Co Ltd filed Critical Toray Engineering Co Ltd
Priority to JP2004210448A priority Critical patent/JP4334429B2/ja
Priority to KR1020050051696A priority patent/KR100871634B1/ko
Priority to TW094121363A priority patent/TWI328673B/zh
Priority to CN2005100860244A priority patent/CN1721841B/zh
Publication of JP2006030024A publication Critical patent/JP2006030024A/ja
Application granted granted Critical
Publication of JP4334429B2 publication Critical patent/JP4334429B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/68—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to defects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Multimedia (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2004210448A 2004-07-16 2004-07-16 光学的測定方法及び光学的測定装置 Expired - Lifetime JP4334429B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004210448A JP4334429B2 (ja) 2004-07-16 2004-07-16 光学的測定方法及び光学的測定装置
KR1020050051696A KR100871634B1 (ko) 2004-07-16 2005-06-16 광학적 측정방법 및 그 장치
TW094121363A TWI328673B (en) 2004-07-16 2005-06-27 Optical measuring method and optical measuring device
CN2005100860244A CN1721841B (zh) 2004-07-16 2005-07-18 光学测量方法及光学测量装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004210448A JP4334429B2 (ja) 2004-07-16 2004-07-16 光学的測定方法及び光学的測定装置

Publications (2)

Publication Number Publication Date
JP2006030024A JP2006030024A (ja) 2006-02-02
JP4334429B2 true JP4334429B2 (ja) 2009-09-30

Family

ID=35896562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004210448A Expired - Lifetime JP4334429B2 (ja) 2004-07-16 2004-07-16 光学的測定方法及び光学的測定装置

Country Status (4)

Country Link
JP (1) JP4334429B2 (ko)
KR (1) KR100871634B1 (ko)
CN (1) CN1721841B (ko)
TW (1) TWI328673B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210527A (ja) * 2009-03-11 2010-09-24 Horiba Ltd 異物検査除去装置及び異物検査除去プログラム
JP5276525B2 (ja) * 2009-06-12 2013-08-28 東レエンジニアリング株式会社 光学的測定方法及び光学的測定装置
CN103548035B (zh) * 2010-10-08 2018-01-02 苹果公司 包括差分测量电路的手指感测设备和相关方法
CN109405735B (zh) * 2017-08-18 2020-11-27 阿里巴巴集团控股有限公司 三维扫描系统和三维扫描方法

Also Published As

Publication number Publication date
KR100871634B1 (ko) 2008-12-02
KR20060046459A (ko) 2006-05-17
TW200606394A (en) 2006-02-16
TWI328673B (en) 2010-08-11
CN1721841A (zh) 2006-01-18
JP2006030024A (ja) 2006-02-02
CN1721841B (zh) 2010-08-04

Similar Documents

Publication Publication Date Title
JP5190405B2 (ja) ガラス表面の異物検査装置及びその方法
JP5994419B2 (ja) 検査方法及び検査装置
JP2008153119A (ja) 電池検査システム、及び電池検査方法
JP2010091361A (ja) 画像検査方法および画像検査装置
JP4334429B2 (ja) 光学的測定方法及び光学的測定装置
JP2002290994A (ja) 小型カメラモジュールの異物検査方法およびその異物検査装置
JP2008249413A (ja) 欠陥検出方法および装置
JP6031751B2 (ja) ガラス基板検査装置及びガラス基板製造方法
JP2009097959A (ja) 欠陥検出装置及び欠陥検出方法
JP2021064215A (ja) 表面性状検査装置及び表面性状検査方法
JP2005265467A (ja) 欠陥検出装置
JP4244046B2 (ja) 画像処理方法および画像処理装置
JP5276525B2 (ja) 光学的測定方法及び光学的測定装置
JP4403036B2 (ja) 疵検出方法及び装置
JP2000161929A (ja) 電子部品の外観検査方法、外観検査装置及び外観検査処理をコンピュータに実現させるためのプログラムを記録した記録媒体
JP5231779B2 (ja) 外観検査装置
JP2007081513A (ja) 固体撮像素子のシミ欠陥検査方法
JP6185539B2 (ja) 光コネクタのフェルール端面検査装置および検査用のプログラム
JP2000258137A (ja) 電子部品の外観検査方法、外観検査装置及び外観検査処理をコンピュータに実現させるためのプログラムを記録した記録媒体
JP2016109437A (ja) 画像処理装置及び方法、並びに欠陥検査装置
JP3367450B2 (ja) 電子部品の外観検査方法、外観検査装置及び外観検査処理をコンピュータに実現させるためのプログラムを記録した記録媒体
JP2012122964A (ja) 表面欠陥検知方法
JP2009047513A (ja) 検査装置
JP4121628B2 (ja) 画面検査方法及びその装置
JP5372618B2 (ja) パターン付き基板検査装置およびパターン付き基板検査方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060404

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090129

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090219

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090406

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090508

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090527

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090623

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090623

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120703

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4334429

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120703

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130703

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term