TW200606394A - Optical measuring method and optical measuring device - Google Patents
Optical measuring method and optical measuring deviceInfo
- Publication number
- TW200606394A TW200606394A TW094121363A TW94121363A TW200606394A TW 200606394 A TW200606394 A TW 200606394A TW 094121363 A TW094121363 A TW 094121363A TW 94121363 A TW94121363 A TW 94121363A TW 200606394 A TW200606394 A TW 200606394A
- Authority
- TW
- Taiwan
- Prior art keywords
- signal
- optical measuring
- noted
- examined object
- noise
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 title 2
- 230000015556 catabolic process Effects 0.000 abstract 2
- 238000006731 degradation reaction Methods 0.000 abstract 2
- 230000001678 irradiating effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/68—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to defects
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Multimedia (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
This invention provides a measuring method and a measuring device for preventing the degradation of measuring accuracy, which is occurred by the noise due to the surface characteristic of an examined object. Irradiating the examined object GL with light, receiving light obtained from the examined object GL and finally converting it to the 2D light brightness signal S1, extracting only the noted signal SB from the light brightness signal S1 by separating the noted signal SB and the noise signal SN, wherein the noted signal SB is necessary and the noise signal SN is unnecessary signal when measuring the surface condition IB, comparing the extracted noted signal SB with the determined threshold level. Substantially, by comparing the light brightness signal S1 with the threshold level followed by the noise signal SN, it can prevent the degradation of measuring accuracy, which is occurred by the noise due to the surface characteristic of an examined object.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004210448A JP4334429B2 (en) | 2004-07-16 | 2004-07-16 | Optical measuring method and optical measuring apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200606394A true TW200606394A (en) | 2006-02-16 |
TWI328673B TWI328673B (en) | 2010-08-11 |
Family
ID=35896562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094121363A TWI328673B (en) | 2004-07-16 | 2005-06-27 | Optical measuring method and optical measuring device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4334429B2 (en) |
KR (1) | KR100871634B1 (en) |
CN (1) | CN1721841B (en) |
TW (1) | TWI328673B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010210527A (en) * | 2009-03-11 | 2010-09-24 | Horiba Ltd | Apparatus and program for inspecting and removing foreign substance |
JP5276525B2 (en) * | 2009-06-12 | 2013-08-28 | 東レエンジニアリング株式会社 | Optical measuring method and optical measuring apparatus |
US8888004B2 (en) * | 2010-10-08 | 2014-11-18 | Authentec, Inc. | Finger sensing device including differential measurement circuitry and related methods |
CN109405735B (en) * | 2017-08-18 | 2020-11-27 | 阿里巴巴集团控股有限公司 | Three-dimensional scanning system and three-dimensional scanning method |
-
2004
- 2004-07-16 JP JP2004210448A patent/JP4334429B2/en not_active Expired - Lifetime
-
2005
- 2005-06-16 KR KR1020050051696A patent/KR100871634B1/en active IP Right Grant
- 2005-06-27 TW TW094121363A patent/TWI328673B/en active
- 2005-07-18 CN CN2005100860244A patent/CN1721841B/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR100871634B1 (en) | 2008-12-02 |
JP2006030024A (en) | 2006-02-02 |
JP4334429B2 (en) | 2009-09-30 |
KR20060046459A (en) | 2006-05-17 |
CN1721841B (en) | 2010-08-04 |
CN1721841A (en) | 2006-01-18 |
TWI328673B (en) | 2010-08-11 |
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