TW200606394A - Optical measuring method and optical measuring device - Google Patents

Optical measuring method and optical measuring device

Info

Publication number
TW200606394A
TW200606394A TW094121363A TW94121363A TW200606394A TW 200606394 A TW200606394 A TW 200606394A TW 094121363 A TW094121363 A TW 094121363A TW 94121363 A TW94121363 A TW 94121363A TW 200606394 A TW200606394 A TW 200606394A
Authority
TW
Taiwan
Prior art keywords
signal
optical measuring
noted
examined object
noise
Prior art date
Application number
TW094121363A
Other languages
Chinese (zh)
Other versions
TWI328673B (en
Inventor
Junichi Matsumura
Kenji Okubo
Original Assignee
Toray Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Eng Co Ltd filed Critical Toray Eng Co Ltd
Publication of TW200606394A publication Critical patent/TW200606394A/en
Application granted granted Critical
Publication of TWI328673B publication Critical patent/TWI328673B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/68—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G01N2021/95615—Inspecting patterns on the surface of objects using a comparative method with stored comparision signal

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

This invention provides a measuring method and a measuring device for preventing the degradation of measuring accuracy, which is occurred by the noise due to the surface characteristic of an examined object. Irradiating the examined object GL with light, receiving light obtained from the examined object GL and finally converting it to the 2D light brightness signal S1, extracting only the noted signal SB from the light brightness signal S1 by separating the noted signal SB and the noise signal SN, wherein the noted signal SB is necessary and the noise signal SN is unnecessary signal when measuring the surface condition IB, comparing the extracted noted signal SB with the determined threshold level. Substantially, by comparing the light brightness signal S1 with the threshold level followed by the noise signal SN, it can prevent the degradation of measuring accuracy, which is occurred by the noise due to the surface characteristic of an examined object.
TW094121363A 2004-07-16 2005-06-27 Optical measuring method and optical measuring device TWI328673B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004210448A JP4334429B2 (en) 2004-07-16 2004-07-16 Optical measuring method and optical measuring apparatus

Publications (2)

Publication Number Publication Date
TW200606394A true TW200606394A (en) 2006-02-16
TWI328673B TWI328673B (en) 2010-08-11

Family

ID=35896562

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094121363A TWI328673B (en) 2004-07-16 2005-06-27 Optical measuring method and optical measuring device

Country Status (4)

Country Link
JP (1) JP4334429B2 (en)
KR (1) KR100871634B1 (en)
CN (1) CN1721841B (en)
TW (1) TWI328673B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210527A (en) * 2009-03-11 2010-09-24 Horiba Ltd Apparatus and program for inspecting and removing foreign substance
JP5276525B2 (en) * 2009-06-12 2013-08-28 東レエンジニアリング株式会社 Optical measuring method and optical measuring apparatus
WO2012048263A1 (en) * 2010-10-08 2012-04-12 Authentec, Inc. Finger sensing device including differential measurement circuitry and related methods
CN109405735B (en) * 2017-08-18 2020-11-27 阿里巴巴集团控股有限公司 Three-dimensional scanning system and three-dimensional scanning method

Also Published As

Publication number Publication date
KR100871634B1 (en) 2008-12-02
KR20060046459A (en) 2006-05-17
CN1721841B (en) 2010-08-04
JP2006030024A (en) 2006-02-02
CN1721841A (en) 2006-01-18
JP4334429B2 (en) 2009-09-30
TWI328673B (en) 2010-08-11

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