JP4324989B2 - 露光装置 - Google Patents

露光装置 Download PDF

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Publication number
JP4324989B2
JP4324989B2 JP14727098A JP14727098A JP4324989B2 JP 4324989 B2 JP4324989 B2 JP 4324989B2 JP 14727098 A JP14727098 A JP 14727098A JP 14727098 A JP14727098 A JP 14727098A JP 4324989 B2 JP4324989 B2 JP 4324989B2
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JP
Japan
Prior art keywords
mask
optical
stage
optical system
integrator
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Expired - Lifetime
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JP14727098A
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English (en)
Japanese (ja)
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JPH11338162A5 (https=
JPH11338162A (ja
Inventor
新一郎 永井
立夫 山中
雅裕 斉田
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NSK Ltd
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NSK Ltd
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Priority to JP14727098A priority Critical patent/JP4324989B2/ja
Publication of JPH11338162A publication Critical patent/JPH11338162A/ja
Publication of JPH11338162A5 publication Critical patent/JPH11338162A5/ja
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Publication of JP4324989B2 publication Critical patent/JP4324989B2/ja
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JP14727098A 1998-05-28 1998-05-28 露光装置 Expired - Lifetime JP4324989B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14727098A JP4324989B2 (ja) 1998-05-28 1998-05-28 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14727098A JP4324989B2 (ja) 1998-05-28 1998-05-28 露光装置

Publications (3)

Publication Number Publication Date
JPH11338162A JPH11338162A (ja) 1999-12-10
JPH11338162A5 JPH11338162A5 (https=) 2005-10-06
JP4324989B2 true JP4324989B2 (ja) 2009-09-02

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ID=15426425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14727098A Expired - Lifetime JP4324989B2 (ja) 1998-05-28 1998-05-28 露光装置

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JP (1) JP4324989B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003076030A (ja) * 2001-09-06 2003-03-14 Hitachi Electronics Eng Co Ltd 露光装置における光照射装置
JP5057382B2 (ja) * 2007-12-18 2012-10-24 Ｎｓｋテクノロジー株式会社 露光装置及び基板の製造方法
JP5105167B2 (ja) * 2007-12-26 2012-12-19 Ｎｓｋテクノロジー株式会社 近接露光装置及び近接露光装置用マスクアダプタ
JP5141648B2 (ja) * 2009-07-29 2013-02-13 大日本印刷株式会社 プロキシミティ露光装置及びこのプロキシミティ露光装置を用いた露光方法
JP2018045060A (ja) * 2016-09-13 2018-03-22 キヤノン株式会社 照明装置、露光装置及び物品の製造方法

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Publication number Publication date
JPH11338162A (ja) 1999-12-10

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