JPH11338162A5 - - Google Patents

Info

Publication number
JPH11338162A5
JPH11338162A5 JP1998147270A JP14727098A JPH11338162A5 JP H11338162 A5 JPH11338162 A5 JP H11338162A5 JP 1998147270 A JP1998147270 A JP 1998147270A JP 14727098 A JP14727098 A JP 14727098A JP H11338162 A5 JPH11338162 A5 JP H11338162A5
Authority
JP
Japan
Prior art keywords
mask
stage
optical system
exposure apparatus
illumination optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998147270A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11338162A (ja
JP4324989B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP14727098A priority Critical patent/JP4324989B2/ja
Priority claimed from JP14727098A external-priority patent/JP4324989B2/ja
Publication of JPH11338162A publication Critical patent/JPH11338162A/ja
Publication of JPH11338162A5 publication Critical patent/JPH11338162A5/ja
Application granted granted Critical
Publication of JP4324989B2 publication Critical patent/JP4324989B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP14727098A 1998-05-28 1998-05-28 露光装置 Expired - Lifetime JP4324989B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14727098A JP4324989B2 (ja) 1998-05-28 1998-05-28 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14727098A JP4324989B2 (ja) 1998-05-28 1998-05-28 露光装置

Publications (3)

Publication Number Publication Date
JPH11338162A JPH11338162A (ja) 1999-12-10
JPH11338162A5 true JPH11338162A5 (https=) 2005-10-06
JP4324989B2 JP4324989B2 (ja) 2009-09-02

Family

ID=15426425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14727098A Expired - Lifetime JP4324989B2 (ja) 1998-05-28 1998-05-28 露光装置

Country Status (1)

Country Link
JP (1) JP4324989B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003076030A (ja) * 2001-09-06 2003-03-14 Hitachi Electronics Eng Co Ltd 露光装置における光照射装置
JP5057382B2 (ja) * 2007-12-18 2012-10-24 Ｎｓｋテクノロジー株式会社 露光装置及び基板の製造方法
JP5105167B2 (ja) * 2007-12-26 2012-12-19 Ｎｓｋテクノロジー株式会社 近接露光装置及び近接露光装置用マスクアダプタ
JP5141648B2 (ja) * 2009-07-29 2013-02-13 大日本印刷株式会社 プロキシミティ露光装置及びこのプロキシミティ露光装置を用いた露光方法
JP2018045060A (ja) * 2016-09-13 2018-03-22 キヤノン株式会社 照明装置、露光装置及び物品の製造方法

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