JP4323579B2 - 変位情報検出装置 - Google Patents

変位情報検出装置 Download PDF

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Publication number
JP4323579B2
JP4323579B2 JP08268798A JP8268798A JP4323579B2 JP 4323579 B2 JP4323579 B2 JP 4323579B2 JP 08268798 A JP08268798 A JP 08268798A JP 8268798 A JP8268798 A JP 8268798A JP 4323579 B2 JP4323579 B2 JP 4323579B2
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JP
Japan
Prior art keywords
light
region
light beam
optical
optical scale
Prior art date
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Expired - Fee Related
Application number
JP08268798A
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English (en)
Japanese (ja)
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JPH11258001A5 (https=
JPH11258001A (ja
Inventor
学 高山
正彦 井垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP08268798A priority Critical patent/JP4323579B2/ja
Publication of JPH11258001A publication Critical patent/JPH11258001A/ja
Publication of JPH11258001A5 publication Critical patent/JPH11258001A5/ja
Application granted granted Critical
Publication of JP4323579B2 publication Critical patent/JP4323579B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP08268798A 1998-03-13 1998-03-13 変位情報検出装置 Expired - Fee Related JP4323579B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08268798A JP4323579B2 (ja) 1998-03-13 1998-03-13 変位情報検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08268798A JP4323579B2 (ja) 1998-03-13 1998-03-13 変位情報検出装置

Publications (3)

Publication Number Publication Date
JPH11258001A JPH11258001A (ja) 1999-09-24
JPH11258001A5 JPH11258001A5 (https=) 2005-09-02
JP4323579B2 true JP4323579B2 (ja) 2009-09-02

Family

ID=13781340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08268798A Expired - Fee Related JP4323579B2 (ja) 1998-03-13 1998-03-13 変位情報検出装置

Country Status (1)

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JP (1) JP4323579B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2606314A2 (de) * 2010-08-19 2013-06-26 ELESTA relays GmbH Positionsmessvorrichtung und verfahren zur ermittlung einer absoluten position
WO2025057418A1 (ja) * 2023-09-15 2025-03-20 株式会社トヨテック 光学素子および投受光系

Also Published As

Publication number Publication date
JPH11258001A (ja) 1999-09-24

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