JP4319556B2 - プラズマ生成装置 - Google Patents
プラズマ生成装置 Download PDFInfo
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- JP4319556B2 JP4319556B2 JP2004019340A JP2004019340A JP4319556B2 JP 4319556 B2 JP4319556 B2 JP 4319556B2 JP 2004019340 A JP2004019340 A JP 2004019340A JP 2004019340 A JP2004019340 A JP 2004019340A JP 4319556 B2 JP4319556 B2 JP 4319556B2
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- 230000005291 magnetic effect Effects 0.000 claims description 80
- 238000012545 processing Methods 0.000 claims description 55
- 238000010891 electric arc Methods 0.000 claims description 44
- 239000002245 particle Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 12
- 239000010406 cathode material Substances 0.000 claims description 11
- 238000004381 surface treatment Methods 0.000 claims description 9
- 230000007423 decrease Effects 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 27
- 230000006698 induction Effects 0.000 description 22
- 238000010586 diagram Methods 0.000 description 19
- 239000010408 film Substances 0.000 description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 238000000151 deposition Methods 0.000 description 8
- 238000003672 processing method Methods 0.000 description 8
- 239000007787 solid Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 230000001012 protector Effects 0.000 description 7
- 230000001154 acute effect Effects 0.000 description 6
- 238000005452 bending Methods 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 230000000087 stabilizing effect Effects 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 239000003575 carbonaceous material Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 150000002484 inorganic compounds Chemical class 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 229910052755 nonmetal Inorganic materials 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 230000002079 cooperative effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010892 electric spark Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910019912 CrN Inorganic materials 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910010038 TiAl Inorganic materials 0.000 description 1
- 229910010041 TiAlC Inorganic materials 0.000 description 1
- 229910034327 TiC Inorganic materials 0.000 description 1
- -1 TiN Chemical class 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
- H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
T 被処理物
D ドロップレット
P プラズマ流
Ph 高密度プラズマ流
b 磁界
1 アーク放電部
1a 陰極
1b 陰極プロテクタ
1c 陽極
1d トリガ電極
1e アーク安定化磁界発生器
1f アーク安定化磁界発生器
1h 絶縁導入端子
1i アーク電源
1m 制限用抵抗
2 主進行路
2A 第1主進行路
2B 第2主進行路
3 ドロップレット捕集部
3a 捕集部開口面
3b ドロップレット堆積部
3A ドロップレット捕集部
3B ドロップレット捕集部
4 ドロップレット進行路
5 第1プラズマ進行路
6 プラズマ加工部
6a 加工部前方
6b 加工部後方
7 制限板
7A 制限板
7B 制限板
8 斜行壁
9 反射板
10 第1プラズマ誘導磁界発生器
11 第2プラズマ誘導磁界発生器
12 第1ガイド部
13 第2ガイド部
14 第3プラズマ誘導磁界発生部
15 プラズマセンタリング絞り部
16 第4プラズマ誘導磁界発生部
17 ドロップレット緩衝板
18 第1補助プラズマ誘導磁界発生器
19 第2プラズマ進行路
19A 第2プラズマ進行路
20 補助ドロップレット捕集部
20a 捕集部開口面
20B 補助ドロップレット捕集部
21 第5プラズマ誘導磁界発生部
22 偏向コイル
22a、22b、22c、22d 電磁石
24 プラズマ流走査部
26a 磁界発生器
26b 磁界発生器
Claims (4)
- 真空雰囲気下に設定されたアーク放電部で真空アーク放電を行ってプラズマを発生させ、プラズマの発生時に陰極から副生する陰極材料粒子(以下「ドロップレット」という)をドロップレット捕集部に捕集するようにしたプラズマ生成装置において、前記プラズマと前記ドロップレットが混合状態で進行する主進行路を設け、この主進行路の途中部に前記プラズマと前記ドロップレットの進行を制限するための制限板が内方に向けて設けられ、この制限板を通過後に前記主進行路を、前記ドロップレットが主進行路方向に進行するドロップレット進行路と前記プラズマが磁界により屈曲されて進行する第1プラズマ進行路とに略T字形に分岐し、前記ドロップレット捕集部と前記アーク放電部が前記第1プラズマ進行路の両側に位置するように前記第1プラズマ進行路の一端に夫々が前記ドロップレット進行路と前記主進行路を介して接続され、前記分岐部分における前記ドロップレット進行路の側壁部と前記第1プラズマ進行路の側壁部の接続部に傾斜配置された斜行壁が設けられ、前記斜行壁により反射されたドロップレットが回収されるように前記ドロップレット捕集部が前記接続部に対向する側にある前記ドロップレット進行路の側壁部に配置され、前記ドロップレット進行路における前記ドロップレット捕集部の近傍に、反射板が前記斜行壁に対し折曲して連続するように配置され、前記第1プラズマ進行路にプラズマの進行路の断面径が徐々に縮径するプラズマセンタリング絞り部が付設され、前記プラズマセンタリング絞り部の出力側に偏向コイルが付設され、前記制限板を通過し、前記分岐部分に進入したドロップレットを前記斜行壁と前記反射板により前記ドロップレット捕集部に向けて反射させ、前記プラズマセンタリング絞り部によりプラズマ流の断面径を絞り込み、プラズマの進行方向をz軸方向、垂直な平面をxy平面とした場合において、前記偏向コイルにより前記プラズマセンタリング絞り部を通過したプラズマをxy平面上に走査することを特徴とするプラズマ生成装置。
- 前記プラズマセンタリング絞り部の外側に絞り磁界発生器が設置され、この絞り磁界発生器を構成するコイルの巻数がプラズマの進行方向に従って増加する請求項1に記載のプラズマ生成装置。
- 上記した請求項1又は2に記載のプラズマ生成装置において、プラズマ進行路の進行方向最終端部に、このプラズマ進行路を進行したプラズマを流入させるプラズマ加工部が配置され、このプラズマ加工部に配置された被処理物に対し前記プラズマにより表面処理加工が行われるようにしたことを特徴とするプラズマ生成装置。
- 前記プラズマ加工部に被処理物を配置する場合に、プラズマの流れに沿った被処理物の前後の外周に磁界発生器が付設される請求項3に記載のプラズマ生成装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004019340A JP4319556B2 (ja) | 2004-01-28 | 2004-01-28 | プラズマ生成装置 |
PCT/JP2005/001010 WO2005074334A1 (ja) | 2004-01-28 | 2005-01-26 | プラズマ生成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004019340A JP4319556B2 (ja) | 2004-01-28 | 2004-01-28 | プラズマ生成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005216575A JP2005216575A (ja) | 2005-08-11 |
JP4319556B2 true JP4319556B2 (ja) | 2009-08-26 |
Family
ID=34823712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004019340A Expired - Lifetime JP4319556B2 (ja) | 2004-01-28 | 2004-01-28 | プラズマ生成装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4319556B2 (ja) |
WO (1) | WO2005074334A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4660452B2 (ja) * | 2006-09-30 | 2011-03-30 | 株式会社フェローテック | 拡径管型プラズマ生成装置 |
JP5189784B2 (ja) * | 2007-03-30 | 2013-04-24 | 株式会社フェローテック | プラズマガン周辺を電気的中性にしたプラズマ生成装置 |
US8003957B2 (en) * | 2008-02-11 | 2011-08-23 | Varian Semiconductor Equipment Associates, Inc. | Ethane implantation with a dilution gas |
JP4568768B2 (ja) * | 2008-03-27 | 2010-10-27 | 株式会社フェローテック | プラズマ生成装置及びプラズマ処理装置 |
JP5104576B2 (ja) * | 2008-06-18 | 2012-12-19 | 富士通株式会社 | 成膜装置 |
US7914603B2 (en) * | 2008-06-26 | 2011-03-29 | Mks Instruments, Inc. | Particle trap for a plasma source |
JP4576467B2 (ja) * | 2009-03-31 | 2010-11-10 | 株式会社フェローテック | 絶縁体介装型プラズマ処理装置 |
JP5644085B2 (ja) * | 2009-06-10 | 2014-12-24 | 富士通株式会社 | 成膜装置及び成膜方法 |
JP4690477B2 (ja) * | 2009-07-01 | 2011-06-01 | 株式会社フェローテック | 陽極壁多分割型プラズマ発生装置及びプラズマ処理装置 |
JP5606777B2 (ja) * | 2010-04-22 | 2014-10-15 | 株式会社フェローテック | プラズマ流生成方法、プラズマ処理方法、プラズマ発生装置及びプラズマ処理装置 |
GB201016501D0 (en) * | 2010-10-01 | 2010-11-17 | Nanofilm Technologies Internat Pte Ltd | Filter for removing macro-particles from a plasma beam |
US20150179404A1 (en) | 2012-08-21 | 2015-06-25 | Canon Kabushiki Kaisha | Plasma processing apparatus |
JP6188294B2 (ja) * | 2012-08-21 | 2017-08-30 | キヤノン株式会社 | プラズマ処理装置 |
EP4066272B1 (en) | 2020-06-19 | 2023-06-07 | Nanofilm Technologies International Limited | Improved cathode arc source, filters thereof and method of filtering macroparticles |
JP7439357B2 (ja) * | 2020-07-22 | 2024-02-28 | 株式会社神戸製鋼所 | アーク蒸発源 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07150340A (ja) * | 1993-11-29 | 1995-06-13 | Nissin Electric Co Ltd | 薄膜形成装置 |
US5480527A (en) * | 1994-04-25 | 1996-01-02 | Vapor Technologies, Inc. | Rectangular vacuum-arc plasma source |
KR100230279B1 (ko) * | 1997-03-31 | 1999-11-15 | 윤종용 | 음극 아크 방전을 이용한 박막 증착장치 |
JP3865570B2 (ja) * | 2000-06-16 | 2007-01-10 | 伊藤光学工業株式会社 | プラズマ加工法 |
-
2004
- 2004-01-28 JP JP2004019340A patent/JP4319556B2/ja not_active Expired - Lifetime
-
2005
- 2005-01-26 WO PCT/JP2005/001010 patent/WO2005074334A1/ja active Application Filing
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Publication number | Publication date |
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JP2005216575A (ja) | 2005-08-11 |
WO2005074334A1 (ja) | 2005-08-11 |
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