JP4309287B2 - エチレンジアミン塩を再利用するｎ−［２−アミノエチル］アミノアルキルアルコキシシランの製造方法 - Google Patents

エチレンジアミン塩を再利用するｎ−［２−アミノエチル］アミノアルキルアルコキシシランの製造方法 Download PDF

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Publication number
JP4309287B2
JP4309287B2 JP2003567907A JP2003567907A JP4309287B2 JP 4309287 B2 JP4309287 B2 JP 4309287B2 JP 2003567907 A JP2003567907 A JP 2003567907A JP 2003567907 A JP2003567907 A JP 2003567907A JP 4309287 B2 JP4309287 B2 JP 4309287B2
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Prior art keywords
ethylenediamine
phase
reactor
aminoethyl
salt
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Expired - Fee Related
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JP2003567907A
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English (en)
Japanese (ja)
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JP2005517707A5 (enExample
JP2005517707A (ja
Inventor
ウィリアム シー． マキ
ハワード バンク
スティーブン エイチ． ワイアー
ブライアン シー． マクドナルド
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Dow Silicones Corp
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Dow Corning Corp
Dow Silicones Corp
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Publication of JP2005517707A publication Critical patent/JP2005517707A/ja
Publication of JP2005517707A5 publication Critical patent/JP2005517707A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
    • C07F7/1804—Compounds having Si-O-C linkages
    • C07F7/1872—Preparation; Treatments not provided for in C07F7/20
    • C07F7/1892—Preparation; Treatments not provided for in C07F7/20 by reactions not provided for in C07F7/1876 - C07F7/1888
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
JP2003567907A 2002-02-11 2003-01-16 エチレンジアミン塩を再利用するｎ−［２−アミノエチル］アミノアルキルアルコキシシランの製造方法 Expired - Fee Related JP4309287B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/073,444 US6452033B1 (en) 2002-02-11 2002-02-11 Method of making N-[2-aminoethyl] aminoalkylalkoxysilanes with ethyenediamine salt recycle
PCT/US2003/001296 WO2003068780A1 (en) 2002-02-11 2003-01-16 Method of making n- [2-aminoethyl] aminoalkylalkoxysilanes with ethylene diamine salt recycle

Publications (3)

Publication Number Publication Date
JP2005517707A JP2005517707A (ja) 2005-06-16
JP2005517707A5 JP2005517707A5 (enExample) 2005-12-22
JP4309287B2 true JP4309287B2 (ja) 2009-08-05

Family

ID=22113713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003567907A Expired - Fee Related JP4309287B2 (ja) 2002-02-11 2003-01-16 エチレンジアミン塩を再利用するｎ−［２−アミノエチル］アミノアルキルアルコキシシランの製造方法

Country Status (9)

Country Link
US (1) US6452033B1 (enExample)
EP (1) EP1476450B1 (enExample)
JP (1) JP4309287B2 (enExample)
KR (1) KR100893688B1 (enExample)
CN (1) CN1267440C (enExample)
AT (1) ATE459629T1 (enExample)
AU (1) AU2003207577A1 (enExample)
DE (1) DE60331526D1 (enExample)
WO (1) WO2003068780A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100413555C (zh) * 2003-02-10 2008-08-27 严晓东 含β-氨乙基-γ-氨丙基基团的有机硅烷偶联剂的生产废料的回收处理方法
DE102007037193A1 (de) 2007-08-07 2009-02-12 Wacker Chemie Ag Verfahren zur Herstellung von Aminoorganosilanen
DE102009000500A1 (de) * 2009-01-30 2010-08-05 Wacker Chemie Ag Verfahren zur Herstellung von Bis- und Tris(silylorgano)aminen
DE102009026755A1 (de) * 2009-06-04 2010-12-09 Wacker Chemie Ag Verfahren zur Herstellung von Aminoorganosilanen
DE102015225879A1 (de) 2015-12-18 2017-06-22 Evonik Degussa Gmbh Tris-(alkylalkoxysilyl)amin-reiche Zusammensetzungen, deren Herstellung und deren Verwendung
DE102015225883A1 (de) 2015-12-18 2017-06-22 Evonik Degussa Gmbh Bis(alkylalkoxysilyl)amin-reiche Zusammensetzungen, ein Verfahren zur deren Herstellung und deren Verwendung
DE102016215260A1 (de) 2016-08-16 2018-02-22 Evonik Degussa Gmbh Verwendung einer (Alkylalkoxysily)amin-, Bis-(alkylalkoxysilyl)amin und/oder Tris-(alkylalkoxysilyl)amin-enthaltenden Zusammensetzung
WO2018033199A1 (de) 2016-08-16 2018-02-22 Wacker Chemie Ag Verfahren zur herstellung von sekundären aminoorganosiliciumverbindungen
JP7077966B2 (ja) * 2019-01-07 2022-05-31 信越化学工業株式会社 アミノ基含有有機ケイ素化合物の製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB889001A (en) 1959-07-17 1962-02-07 Midland Silicones Ltd Aminated organosilicon compounds
US3146250A (en) 1961-10-11 1964-08-25 Dow Corning Nitrogen-containing cyclic silanes, their preparation and hydrolysis
US4064155A (en) * 1975-12-22 1977-12-20 Dow Corning Corporation Preparation of silylamine hydrochlorides
JPS56104891A (en) 1980-01-28 1981-08-20 Toray Ind Inc Preparation of (n-aminoethyl)aminoalkylsilane
US4448694A (en) * 1981-09-04 1984-05-15 Dow Corning Corporation Metal extraction from solution and immobilized chelating agents used therefor
US4546996A (en) 1984-06-18 1985-10-15 J. I. Case Company Multi-surface stabilizer pad assembly
US4526996A (en) * 1984-06-19 1985-07-02 Union Carbide Corporation Process for the preparation of N-substituted aminoalkylsilanes
JPH053177A (ja) * 1991-06-25 1993-01-08 Sony Corp ドライエツチング方法
JP2687787B2 (ja) * 1991-10-02 1997-12-08 ソニー株式会社 ドライエッチング方法
JP2785622B2 (ja) 1992-10-26 1998-08-13 信越化学工業株式会社 ３−［ｎ−（２−アミノエチル）］アミノプロピルアルコキシシランの製造方法及びその製造装置
JP3761918B2 (ja) * 1994-09-13 2006-03-29 株式会社東芝 半導体装置の製造方法
EP0702017B1 (de) * 1994-09-14 2001-11-14 Degussa AG Verfahren zur Herstellung von chloridarmen bzw. chloridfreien aminofunktionellen Organosilanen
JP2842284B2 (ja) * 1995-02-14 1998-12-24 日本電気株式会社 半導体装置の製造方法
US6165910A (en) * 1997-12-29 2000-12-26 Lam Research Corporation Self-aligned contacts for semiconductor device

Also Published As

Publication number Publication date
KR20040097125A (ko) 2004-11-17
US6452033B1 (en) 2002-09-17
JP2005517707A (ja) 2005-06-16
CN1267440C (zh) 2006-08-02
CN1630660A (zh) 2005-06-22
WO2003068780A1 (en) 2003-08-21
AU2003207577A1 (en) 2003-09-04
DE60331526D1 (de) 2010-04-15
EP1476450A1 (en) 2004-11-17
ATE459629T1 (de) 2010-03-15
KR100893688B1 (ko) 2009-04-17
EP1476450A4 (en) 2008-02-13
EP1476450B1 (en) 2010-03-03

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