JP4305298B2 - エキシマランプ - Google Patents

エキシマランプ Download PDF

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Publication number
JP4305298B2
JP4305298B2 JP2004190081A JP2004190081A JP4305298B2 JP 4305298 B2 JP4305298 B2 JP 4305298B2 JP 2004190081 A JP2004190081 A JP 2004190081A JP 2004190081 A JP2004190081 A JP 2004190081A JP 4305298 B2 JP4305298 B2 JP 4305298B2
Authority
JP
Japan
Prior art keywords
inner tube
discharge
electrode
excimer lamp
creeping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004190081A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006012681A (ja
Inventor
正秀 清瀬
賢一 廣瀬
卓 住友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP2004190081A priority Critical patent/JP4305298B2/ja
Priority to TW094109498A priority patent/TW200601374A/zh
Priority to KR1020050033215A priority patent/KR100809200B1/ko
Priority to CN2005100791812A priority patent/CN1716515B/zh
Publication of JP2006012681A publication Critical patent/JP2006012681A/ja
Application granted granted Critical
Publication of JP4305298B2 publication Critical patent/JP4305298B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/46—Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/10—Shields, screens, or guides for influencing the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/32—Sealing leading-in conductors
    • H01J9/323—Sealing leading-in conductors into a discharge lamp or a gas-filled discharge device

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP2004190081A 2004-06-28 2004-06-28 エキシマランプ Expired - Fee Related JP4305298B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004190081A JP4305298B2 (ja) 2004-06-28 2004-06-28 エキシマランプ
TW094109498A TW200601374A (en) 2004-06-28 2005-03-25 Eximer lamp
KR1020050033215A KR100809200B1 (ko) 2004-06-28 2005-04-21 엑시머 램프
CN2005100791812A CN1716515B (zh) 2004-06-28 2005-06-28 受激准分子灯

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004190081A JP4305298B2 (ja) 2004-06-28 2004-06-28 エキシマランプ

Publications (2)

Publication Number Publication Date
JP2006012681A JP2006012681A (ja) 2006-01-12
JP4305298B2 true JP4305298B2 (ja) 2009-07-29

Family

ID=35779667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004190081A Expired - Fee Related JP4305298B2 (ja) 2004-06-28 2004-06-28 エキシマランプ

Country Status (4)

Country Link
JP (1) JP4305298B2 (zh)
KR (1) KR100809200B1 (zh)
CN (1) CN1716515B (zh)
TW (1) TW200601374A (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4848879B2 (ja) * 2006-07-28 2011-12-28 ウシオ電機株式会社 希ガス蛍光ランプ
JP5019156B2 (ja) * 2006-08-21 2012-09-05 ウシオ電機株式会社 エキシマランプ装置
JP5223741B2 (ja) * 2009-03-16 2013-06-26 ウシオ電機株式会社 エキシマランプ
JP5504095B2 (ja) * 2010-08-10 2014-05-28 株式会社オーク製作所 放電ランプ
JP6212850B2 (ja) * 2012-10-12 2017-10-18 ウシオ電機株式会社 エキシマランプ
JP6743599B2 (ja) * 2016-09-08 2020-08-19 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6775141B2 (ja) * 2016-09-08 2020-10-28 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP7185521B2 (ja) * 2018-12-26 2022-12-07 株式会社オーク製作所 放電ランプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020025746A (ko) * 2000-09-28 2002-04-04 하리슨 도시바 라이팅 가부시키가이샤 방전램프 및 자외선 조사장치
JP2003317670A (ja) * 2002-04-19 2003-11-07 Hamamatsu Photonics Kk 誘電体バリア放電ランプ

Also Published As

Publication number Publication date
CN1716515A (zh) 2006-01-04
KR20060047354A (ko) 2006-05-18
KR100809200B1 (ko) 2008-03-03
JP2006012681A (ja) 2006-01-12
TW200601374A (en) 2006-01-01
CN1716515B (zh) 2010-07-14
TWI335606B (zh) 2011-01-01

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