TW200601374A - Eximer lamp - Google Patents

Eximer lamp

Info

Publication number
TW200601374A
TW200601374A TW094109498A TW94109498A TW200601374A TW 200601374 A TW200601374 A TW 200601374A TW 094109498 A TW094109498 A TW 094109498A TW 94109498 A TW94109498 A TW 94109498A TW 200601374 A TW200601374 A TW 200601374A
Authority
TW
Taiwan
Prior art keywords
electrodes
inner tube
discharge
capacitor
internal
Prior art date
Application number
TW094109498A
Other languages
English (en)
Other versions
TWI335606B (zh
Inventor
Masahide Kiyose
Kenichi Hirose
Taku Sumitomo
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200601374A publication Critical patent/TW200601374A/zh
Application granted granted Critical
Publication of TWI335606B publication Critical patent/TWI335606B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/46—Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/10—Shields, screens, or guides for influencing the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/32—Sealing leading-in conductors
    • H01J9/323—Sealing leading-in conductors into a discharge lamp or a gas-filled discharge device

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
TW094109498A 2004-06-28 2005-03-25 Eximer lamp TW200601374A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004190081A JP4305298B2 (ja) 2004-06-28 2004-06-28 エキシマランプ

Publications (2)

Publication Number Publication Date
TW200601374A true TW200601374A (en) 2006-01-01
TWI335606B TWI335606B (zh) 2011-01-01

Family

ID=35779667

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094109498A TW200601374A (en) 2004-06-28 2005-03-25 Eximer lamp

Country Status (4)

Country Link
JP (1) JP4305298B2 (zh)
KR (1) KR100809200B1 (zh)
CN (1) CN1716515B (zh)
TW (1) TW200601374A (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4848879B2 (ja) * 2006-07-28 2011-12-28 ウシオ電機株式会社 希ガス蛍光ランプ
JP5019156B2 (ja) * 2006-08-21 2012-09-05 ウシオ電機株式会社 エキシマランプ装置
JP5223741B2 (ja) * 2009-03-16 2013-06-26 ウシオ電機株式会社 エキシマランプ
JP5504095B2 (ja) * 2010-08-10 2014-05-28 株式会社オーク製作所 放電ランプ
JP6212850B2 (ja) * 2012-10-12 2017-10-18 ウシオ電機株式会社 エキシマランプ
JP6775141B2 (ja) * 2016-09-08 2020-10-28 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6743599B2 (ja) * 2016-09-08 2020-08-19 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP7185521B2 (ja) * 2018-12-26 2022-12-07 株式会社オーク製作所 放電ランプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020025746A (ko) * 2000-09-28 2002-04-04 하리슨 도시바 라이팅 가부시키가이샤 방전램프 및 자외선 조사장치
JP2003317670A (ja) * 2002-04-19 2003-11-07 Hamamatsu Photonics Kk 誘電体バリア放電ランプ

Also Published As

Publication number Publication date
CN1716515B (zh) 2010-07-14
KR100809200B1 (ko) 2008-03-03
KR20060047354A (ko) 2006-05-18
CN1716515A (zh) 2006-01-04
TWI335606B (zh) 2011-01-01
JP2006012681A (ja) 2006-01-12
JP4305298B2 (ja) 2009-07-29

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees