JP4300179B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4300179B2 JP4300179B2 JP2004336503A JP2004336503A JP4300179B2 JP 4300179 B2 JP4300179 B2 JP 4300179B2 JP 2004336503 A JP2004336503 A JP 2004336503A JP 2004336503 A JP2004336503 A JP 2004336503A JP 4300179 B2 JP4300179 B2 JP 4300179B2
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- Prior art keywords
- copper
- concentration
- plating
- conductive layer
- semiconductor device
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- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
102 層間絶縁膜; 104,106 導電層; 108 層間絶縁膜; 112 第1領域; 122 第2領域; 124 バリアメタル; 126 シード; 130 導電層; 132 キャップ層;
302 めっきセル; 304 めっきタンク; 305,307 バルブ; 306 コントローラ; 308 添加剤タンク; 312 不純物タンク; 316 アノード; 318 電源; 320 基板
Claims (4)
- 絶縁膜に配線溝を形成し、硫酸銅の基本浴(VMS)を用いて電解めっきにより銅の導電層を成膜し、前記導電層の膜厚を減らす配線工程を有する半導体装置の製造方法において、
硫酸銅の基本浴(VMS)のめっき液は、40g/Lの銅、40g/Lの硫酸及び50ppmの塩素を主成分として含み、鉄イオンを50乃至500ppbの範囲内の濃度で含み、且つ銅、塩素及び硫黄以外の無機金属イオンを100ppb以下の濃度で含む、
ことを特徴とする半導体装置の製造方法。 - 前記鉄イオンの濃度が、100乃至350ppbの範囲内にある
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記硫酸銅の基本浴に含まれる硫化銅、硫酸及び塩素以外の不純物無機金属イオンの濃度を50ppbより低くし、鉄イオンの濃度を50ppb以上に増やすことで、前記めっき液が作成される
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記配線工程が、ダマシン法により行われる
ことを特徴とする請求項1記載の半導体装置の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004336503A JP4300179B2 (ja) | 2004-11-19 | 2004-11-19 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
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JP2004336503A JP4300179B2 (ja) | 2004-11-19 | 2004-11-19 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006147882A JP2006147882A (ja) | 2006-06-08 |
JP4300179B2 true JP4300179B2 (ja) | 2009-07-22 |
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Family Applications (1)
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JP2004336503A Expired - Fee Related JP4300179B2 (ja) | 2004-11-19 | 2004-11-19 | 半導体装置の製造方法 |
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JP (1) | JP4300179B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6080009B2 (ja) * | 2013-05-13 | 2017-02-15 | 国立大学法人茨城大学 | 半導体集積回路装置及びその製造方法、並びに該半導体集積回路装置に使用する低抵抗率銅配線の探索方法 |
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2004
- 2004-11-19 JP JP2004336503A patent/JP4300179B2/ja not_active Expired - Fee Related
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JP2006147882A (ja) | 2006-06-08 |
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