JP4298301B2 - 保持装置、当該保持装置を有する光学系及び露光装置 - Google Patents

保持装置、当該保持装置を有する光学系及び露光装置 Download PDF

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Publication number
JP4298301B2
JP4298301B2 JP2003000432A JP2003000432A JP4298301B2 JP 4298301 B2 JP4298301 B2 JP 4298301B2 JP 2003000432 A JP2003000432 A JP 2003000432A JP 2003000432 A JP2003000432 A JP 2003000432A JP 4298301 B2 JP4298301 B2 JP 4298301B2
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Japan
Prior art keywords
optical element
holding device
optical
optical system
holding
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Expired - Fee Related
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JP2003000432A
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Japanese (ja)
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JP2004214454A (ja
JP2004214454A5 (enExample
Inventor
康宏 岸川
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Canon Inc
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Canon Inc
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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2003000432A 2003-01-06 2003-01-06 保持装置、当該保持装置を有する光学系及び露光装置 Expired - Fee Related JP4298301B2 (ja)

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JP2003000432A JP4298301B2 (ja) 2003-01-06 2003-01-06 保持装置、当該保持装置を有する光学系及び露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003000432A JP4298301B2 (ja) 2003-01-06 2003-01-06 保持装置、当該保持装置を有する光学系及び露光装置

Publications (3)

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JP2004214454A JP2004214454A (ja) 2004-07-29
JP2004214454A5 JP2004214454A5 (enExample) 2006-03-02
JP4298301B2 true JP4298301B2 (ja) 2009-07-15

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JP2003000432A Expired - Fee Related JP4298301B2 (ja) 2003-01-06 2003-01-06 保持装置、当該保持装置を有する光学系及び露光装置

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JP (1) JP4298301B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10732336B2 (en) * 2017-02-02 2020-08-04 Corning Incorporated Method of assembling optical systems and minimizing retardance distortions in optical assemblies

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Publication number Publication date
JP2004214454A (ja) 2004-07-29

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