JP4287213B2 - 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置 - Google Patents

振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置 Download PDF

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Publication number
JP4287213B2
JP4287213B2 JP2003207729A JP2003207729A JP4287213B2 JP 4287213 B2 JP4287213 B2 JP 4287213B2 JP 2003207729 A JP2003207729 A JP 2003207729A JP 2003207729 A JP2003207729 A JP 2003207729A JP 4287213 B2 JP4287213 B2 JP 4287213B2
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Japan
Prior art keywords
magnetic bearing
rotating body
vibration
displacement
acceleration
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JP2003207729A
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Japanese (ja)
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JP2004150628A (ja
JP2004150628A5 (enExample
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好伸 大立
英夫 深美
啓能 並木
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Edwards Japan Ltd
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Edwards Japan Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
JP2003207729A 2002-09-03 2003-08-18 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置 Expired - Fee Related JP4287213B2 (ja)

Priority Applications (1)

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JP2003207729A JP4287213B2 (ja) 2002-09-03 2003-08-18 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002257538 2002-09-03
JP2003207729A JP4287213B2 (ja) 2002-09-03 2003-08-18 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置

Publications (3)

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JP2004150628A JP2004150628A (ja) 2004-05-27
JP2004150628A5 JP2004150628A5 (enExample) 2006-02-02
JP4287213B2 true JP4287213B2 (ja) 2009-07-01

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JP2003207729A Expired - Fee Related JP4287213B2 (ja) 2002-09-03 2003-08-18 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置

Country Status (5)

Country Link
US (2) US6806606B2 (enExample)
EP (1) EP1396649B1 (enExample)
JP (1) JP4287213B2 (enExample)
KR (1) KR20040020852A (enExample)
DE (1) DE60320072T2 (enExample)

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FR2829200B1 (fr) * 2001-09-06 2004-12-31 Mecanique Magnetique Sa Dispositif et procede de compensation automatique de perturbations synchrones
US20030155882A1 (en) * 2002-02-19 2003-08-21 Nikon Corporation Anti-gravity mount with air and magnets
JP4287213B2 (ja) * 2002-09-03 2009-07-01 エドワーズ株式会社 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置
JP2005273802A (ja) * 2004-03-25 2005-10-06 Boc Edwards Kk 磁気軸受装置及び該磁気軸受装置を搭載したターボ分子ポンプ
KR101185265B1 (ko) * 2004-10-15 2012-09-21 에드워즈 가부시키가이샤 댐퍼 및 진공 펌프
JP4962851B2 (ja) * 2006-03-06 2012-06-27 株式会社島津製作所 真空ポンプ
DE102006034478A1 (de) * 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe
JP4914165B2 (ja) * 2006-10-06 2012-04-11 エドワーズ株式会社 制振装置及び制振方法
JP2008229806A (ja) * 2007-03-23 2008-10-02 Jtekt Corp 磁気軸受装置
JP4922338B2 (ja) * 2008-04-25 2012-04-25 エーエスエムエル ネザーランズ ビー．ブイ． 位置制御システム、リソグラフィ装置、および可動オブジェクトの位置を制御する方法
US8128649B2 (en) 2008-12-16 2012-03-06 Slater Charles R Spring scissor blade
JP5763885B2 (ja) * 2010-01-29 2015-08-12 株式会社東芝 磁気浮上装置
JP5966651B2 (ja) * 2012-06-19 2016-08-10 株式会社ジェイテクト 主軸装置
DE102013219196A1 (de) * 2013-09-24 2015-03-26 Siemens Aktiengesellschaft Verfahren zum Kompensieren einer niederfrequenten Stör-Kraft eines Rotors mit aktiven Magnetlagern, aktives Magnetlager mit Kompensations-Regel-Kreis zur Durchführung des Kompensierens und Verwendung des Magnetlagers
JP6015701B2 (ja) * 2014-03-27 2016-10-26 Ｊｆｅスチール株式会社 鋼板の制振制御方法及び制振制御装置
US9816965B2 (en) 2014-11-14 2017-11-14 General Electric Company Method to detect vibration nodes between a sensor and an actuator in a rotatable component
EP3334962B1 (en) 2015-08-10 2019-09-18 Exxonmobil Upstream Research Company Device and method for magnetically controlled dry gas seal
US10132412B2 (en) 2016-08-05 2018-11-20 Exxonmobil Upstream Research Company Device and method for controlling rotating equipment seal without buffer support equipment
JP6864447B2 (ja) * 2016-09-06 2021-04-28 キヤノン株式会社 リソグラフィ装置、および物品の製造方法
JP7148230B2 (ja) * 2017-08-31 2022-10-05 エドワーズ株式会社 真空ポンプ及び制御装置
CN111193454B (zh) * 2020-01-16 2023-05-09 江苏大学 开关磁阻轮毂电机减振及脉动抑制复合控制系统构造方法
CN111836013B (zh) * 2020-07-09 2022-04-12 河南中电投华新电力工程有限公司 一种基于vr的火电厂检修平台
US11698287B2 (en) * 2020-08-31 2023-07-11 Rolls-Royce Deutschland Ltd & Co Kg System and method for detecting vibrations in rotating machinery
CN113623239B (zh) * 2021-09-16 2024-06-25 北京航空航天大学宁波创新研究院 一种不平衡磁拉力控制方法、装置、系统、设备和介质
CN114235143B (zh) * 2021-12-16 2023-09-22 常州大学 一种磁悬浮多跨转子不对中振动的自适应检测系统
CN114371622B (zh) * 2022-01-07 2024-04-12 北京航空航天大学 基于多谐波逆Park变换的磁悬浮转子谐波振动力抑制方法
CN115514280B (zh) * 2022-10-20 2024-06-25 核工业西南物理研究院 一种磁悬浮电机加入低通滤波模块后控制启机振荡的方法
CN119419125B (zh) * 2024-08-15 2025-09-19 鑫益邦半导体(江苏)有限公司 阻力可变式减震键合设备
CN119675526B (zh) * 2024-12-18 2025-10-03 华中科技大学 一种磁悬浮电机电磁振动主动抑制方法及系统

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US6394769B1 (en) * 1996-05-03 2002-05-28 Medquest Products, Inc. Pump having a magnetically suspended rotor with one active control axis
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JP2002147454A (ja) * 2000-11-15 2002-05-22 Seiko Instruments Inc 磁気軸受装置を備える回転機械
FR2829200B1 (fr) * 2001-09-06 2004-12-31 Mecanique Magnetique Sa Dispositif et procede de compensation automatique de perturbations synchrones
JP2003166554A (ja) * 2001-11-28 2003-06-13 Mitsubishi Heavy Ind Ltd 回転装置の駆動軸
JP4287213B2 (ja) * 2002-09-03 2009-07-01 エドワーズ株式会社 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置

Also Published As

Publication number Publication date
EP1396649A3 (en) 2005-06-08
EP1396649B1 (en) 2008-04-02
JP2004150628A (ja) 2004-05-27
USRE41035E1 (en) 2009-12-15
DE60320072T2 (de) 2009-06-18
DE60320072D1 (de) 2008-05-15
KR20040020852A (ko) 2004-03-09
EP1396649A2 (en) 2004-03-10
US6806606B2 (en) 2004-10-19
US20040041478A1 (en) 2004-03-04

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