DE60320072D1 - Magnetische Lagervorrichtung mit Schwingungsbegrenzung, magnetische Lagervorrichtung mit Schätzungsfunktion für die Schwingung, und Pumpvorrichtung mit eingebauten magnetischen Lagervorrichtungen - Google Patents
Magnetische Lagervorrichtung mit Schwingungsbegrenzung, magnetische Lagervorrichtung mit Schätzungsfunktion für die Schwingung, und Pumpvorrichtung mit eingebauten magnetischen LagervorrichtungenInfo
- Publication number
- DE60320072D1 DE60320072D1 DE60320072T DE60320072T DE60320072D1 DE 60320072 D1 DE60320072 D1 DE 60320072D1 DE 60320072 T DE60320072 T DE 60320072T DE 60320072 T DE60320072 T DE 60320072T DE 60320072 D1 DE60320072 D1 DE 60320072D1
- Authority
- DE
- Germany
- Prior art keywords
- magnetic bearing
- vibration
- bearing device
- built
- limitation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002257538 | 2002-09-03 | ||
JP2002257538 | 2002-09-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60320072D1 true DE60320072D1 (de) | 2008-05-15 |
DE60320072T2 DE60320072T2 (de) | 2009-06-18 |
Family
ID=31712280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60320072T Expired - Fee Related DE60320072T2 (de) | 2002-09-03 | 2003-09-02 | Magnetische Lagervorrichtung mit Schwingungsbegrenzung, magnetische Lagervorrichtung mit Schätzungsfunktion für die Schwingung, und Pumpvorrichtung mit eingebauten magnetischen Lagervorrichtungen |
Country Status (5)
Country | Link |
---|---|
US (2) | US6806606B2 (de) |
EP (1) | EP1396649B1 (de) |
JP (1) | JP4287213B2 (de) |
KR (1) | KR20040020852A (de) |
DE (1) | DE60320072T2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2829200B1 (fr) * | 2001-09-06 | 2004-12-31 | Mecanique Magnetique Sa | Dispositif et procede de compensation automatique de perturbations synchrones |
US20030155882A1 (en) * | 2002-02-19 | 2003-08-21 | Nikon Corporation | Anti-gravity mount with air and magnets |
JP4287213B2 (ja) * | 2002-09-03 | 2009-07-01 | エドワーズ株式会社 | 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置 |
JP2005273802A (ja) | 2004-03-25 | 2005-10-06 | Boc Edwards Kk | 磁気軸受装置及び該磁気軸受装置を搭載したターボ分子ポンプ |
US7993113B2 (en) * | 2004-10-15 | 2011-08-09 | Boc Edwards Japan Limited | Damper and vacuum pump |
JP4962851B2 (ja) * | 2006-03-06 | 2012-06-27 | 株式会社島津製作所 | 真空ポンプ |
DE102006034478A1 (de) | 2006-07-26 | 2008-01-31 | Oerlikon Leybold Vacuum Gmbh | Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe |
JP4914165B2 (ja) * | 2006-10-06 | 2012-04-11 | エドワーズ株式会社 | 制振装置及び制振方法 |
JP2008229806A (ja) * | 2007-03-23 | 2008-10-02 | Jtekt Corp | 磁気軸受装置 |
US8279401B2 (en) * | 2008-04-25 | 2012-10-02 | Asml Netherlands B.V. | Position control system, a lithographic apparatus and a method for controlling a position of a movable object |
US8128649B2 (en) | 2008-12-16 | 2012-03-06 | Slater Charles R | Spring scissor blade |
JP5763885B2 (ja) * | 2010-01-29 | 2015-08-12 | 株式会社東芝 | 磁気浮上装置 |
JP5966651B2 (ja) * | 2012-06-19 | 2016-08-10 | 株式会社ジェイテクト | 主軸装置 |
DE102013219196A1 (de) | 2013-09-24 | 2015-03-26 | Siemens Aktiengesellschaft | Verfahren zum Kompensieren einer niederfrequenten Stör-Kraft eines Rotors mit aktiven Magnetlagern, aktives Magnetlager mit Kompensations-Regel-Kreis zur Durchführung des Kompensierens und Verwendung des Magnetlagers |
JP6015701B2 (ja) * | 2014-03-27 | 2016-10-26 | Jfeスチール株式会社 | 鋼板の制振制御方法及び制振制御装置 |
US9816965B2 (en) | 2014-11-14 | 2017-11-14 | General Electric Company | Method to detect vibration nodes between a sensor and an actuator in a rotatable component |
JP6574047B2 (ja) | 2015-08-10 | 2019-09-11 | エクソンモービル アップストリーム リサーチ カンパニー | 磁気制御式乾式ガスシールのためのデバイス及び方法 |
US10132412B2 (en) | 2016-08-05 | 2018-11-20 | Exxonmobil Upstream Research Company | Device and method for controlling rotating equipment seal without buffer support equipment |
JP6864447B2 (ja) * | 2016-09-06 | 2021-04-28 | キヤノン株式会社 | リソグラフィ装置、および物品の製造方法 |
JP7148230B2 (ja) * | 2017-08-31 | 2022-10-05 | エドワーズ株式会社 | 真空ポンプ及び制御装置 |
CN111193454B (zh) * | 2020-01-16 | 2023-05-09 | 江苏大学 | 开关磁阻轮毂电机减振及脉动抑制复合控制系统构造方法 |
CN111836013B (zh) * | 2020-07-09 | 2022-04-12 | 河南中电投华新电力工程有限公司 | 一种基于vr的火电厂检修平台 |
US11698287B2 (en) * | 2020-08-31 | 2023-07-11 | Rolls-Royce Deutschland Ltd & Co Kg | System and method for detecting vibrations in rotating machinery |
CN113623239A (zh) * | 2021-09-16 | 2021-11-09 | 北京航空航天大学宁波创新研究院 | 一种不平衡磁拉力控制方法、装置、系统、设备和介质 |
CN114235143B (zh) * | 2021-12-16 | 2023-09-22 | 常州大学 | 一种磁悬浮多跨转子不对中振动的自适应检测系统 |
CN114371622B (zh) * | 2022-01-07 | 2024-04-12 | 北京航空航天大学 | 基于多谐波逆Park变换的磁悬浮转子谐波振动力抑制方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2561738B1 (fr) * | 1984-03-26 | 1986-08-22 | Europ Propulsion | Procede et dispositif de reduction des vibrations des machines tournantes equipees d'une suspension magnetique active |
US4795927A (en) * | 1986-05-02 | 1989-01-03 | Mitsubishi Jukogyo Kabushiki Kaisha | Control system for a magnetic type bearing |
US4999534A (en) * | 1990-01-19 | 1991-03-12 | Contraves Goerz Corporation | Active vibration reduction in apparatus with cross-coupling between control axes |
JPH0720359B2 (ja) * | 1990-03-16 | 1995-03-06 | 株式会社荏原製作所 | 回転体のアンバランス修正装置 |
WO1991017368A2 (de) * | 1990-05-08 | 1991-11-14 | Teldix Gmbh | Vibrationsisolation eines magnetisch gelagerten körpers |
US5202824A (en) * | 1990-06-21 | 1993-04-13 | Mechanical Technology Incorporated | Rotating force generator for magnetic bearings |
JPH0676808B2 (ja) * | 1991-07-02 | 1994-09-28 | 株式会社荏原製作所 | 磁気軸受装置 |
JP3182197B2 (ja) * | 1992-03-16 | 2001-07-03 | 株式会社荏原製作所 | 磁気軸受装置 |
JP3296074B2 (ja) * | 1994-03-18 | 2002-06-24 | 株式会社日立製作所 | 高速回転体およびそれに用いる磁気軸受の制御装置 |
US5736801A (en) * | 1995-08-18 | 1998-04-07 | Ebara Corporation | Filter circuit and control circuit for controlling a rotor |
US6394769B1 (en) * | 1996-05-03 | 2002-05-28 | Medquest Products, Inc. | Pump having a magnetically suspended rotor with one active control axis |
US6074180A (en) * | 1996-05-03 | 2000-06-13 | Medquest Products, Inc. | Hybrid magnetically suspended and rotated centrifugal pumping apparatus and method |
JP2002147454A (ja) * | 2000-11-15 | 2002-05-22 | Seiko Instruments Inc | 磁気軸受装置を備える回転機械 |
FR2829200B1 (fr) * | 2001-09-06 | 2004-12-31 | Mecanique Magnetique Sa | Dispositif et procede de compensation automatique de perturbations synchrones |
JP2003166554A (ja) * | 2001-11-28 | 2003-06-13 | Mitsubishi Heavy Ind Ltd | 回転装置の駆動軸 |
JP4287213B2 (ja) * | 2002-09-03 | 2009-07-01 | エドワーズ株式会社 | 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置 |
-
2003
- 2003-08-18 JP JP2003207729A patent/JP4287213B2/ja not_active Expired - Fee Related
- 2003-08-29 US US10/651,518 patent/US6806606B2/en not_active Ceased
- 2003-09-02 EP EP03255465A patent/EP1396649B1/de not_active Expired - Fee Related
- 2003-09-02 DE DE60320072T patent/DE60320072T2/de not_active Expired - Fee Related
- 2003-09-03 KR KR1020030061419A patent/KR20040020852A/ko not_active Application Discontinuation
-
2005
- 2005-12-29 US US11/322,207 patent/USRE41035E1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE60320072T2 (de) | 2009-06-18 |
KR20040020852A (ko) | 2004-03-09 |
USRE41035E1 (en) | 2009-12-15 |
US20040041478A1 (en) | 2004-03-04 |
EP1396649A3 (de) | 2005-06-08 |
US6806606B2 (en) | 2004-10-19 |
EP1396649A2 (de) | 2004-03-10 |
JP4287213B2 (ja) | 2009-07-01 |
JP2004150628A (ja) | 2004-05-27 |
EP1396649B1 (de) | 2008-04-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: EDWARDS JAPAN LTD., YACHIYO, CHIBA, JP |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: WEICKMANN & WEICKMANN, 81679 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |