DE60320072T2 - Magnetische Lagervorrichtung mit Schwingungsbegrenzung, magnetische Lagervorrichtung mit Schätzungsfunktion für die Schwingung, und Pumpvorrichtung mit eingebauten magnetischen Lagervorrichtungen - Google Patents

Magnetische Lagervorrichtung mit Schwingungsbegrenzung, magnetische Lagervorrichtung mit Schätzungsfunktion für die Schwingung, und Pumpvorrichtung mit eingebauten magnetischen Lagervorrichtungen Download PDF

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Publication number
DE60320072T2
DE60320072T2 DE60320072T DE60320072T DE60320072T2 DE 60320072 T2 DE60320072 T2 DE 60320072T2 DE 60320072 T DE60320072 T DE 60320072T DE 60320072 T DE60320072 T DE 60320072T DE 60320072 T2 DE60320072 T2 DE 60320072T2
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DE
Germany
Prior art keywords
rotor
magnetic bearing
vibration
displacement
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60320072T
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German (de)
English (en)
Other versions
DE60320072D1 (de
Inventor
Yoshinobu BOC Edwards Japan Ltd Ohtachi
Hideo BOC Edwards Japan Ltd Fukami
Hirotaka BOC Edwards Japan Ltd Namiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd Yachiyo
Edwards Japan Ltd
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Publication date
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Publication of DE60320072D1 publication Critical patent/DE60320072D1/de
Application granted granted Critical
Publication of DE60320072T2 publication Critical patent/DE60320072T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
DE60320072T 2002-09-03 2003-09-02 Magnetische Lagervorrichtung mit Schwingungsbegrenzung, magnetische Lagervorrichtung mit Schätzungsfunktion für die Schwingung, und Pumpvorrichtung mit eingebauten magnetischen Lagervorrichtungen Expired - Fee Related DE60320072T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002257538 2002-09-03
JP2002257538 2002-09-03

Publications (2)

Publication Number Publication Date
DE60320072D1 DE60320072D1 (de) 2008-05-15
DE60320072T2 true DE60320072T2 (de) 2009-06-18

Family

ID=31712280

Family Applications (1)

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DE60320072T Expired - Fee Related DE60320072T2 (de) 2002-09-03 2003-09-02 Magnetische Lagervorrichtung mit Schwingungsbegrenzung, magnetische Lagervorrichtung mit Schätzungsfunktion für die Schwingung, und Pumpvorrichtung mit eingebauten magnetischen Lagervorrichtungen

Country Status (5)

Country Link
US (2) US6806606B2 (enExample)
EP (1) EP1396649B1 (enExample)
JP (1) JP4287213B2 (enExample)
KR (1) KR20040020852A (enExample)
DE (1) DE60320072T2 (enExample)

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FR2829200B1 (fr) * 2001-09-06 2004-12-31 Mecanique Magnetique Sa Dispositif et procede de compensation automatique de perturbations synchrones
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JP2005273802A (ja) 2004-03-25 2005-10-06 Boc Edwards Kk 磁気軸受装置及び該磁気軸受装置を搭載したターボ分子ポンプ
JP5046647B2 (ja) * 2004-10-15 2012-10-10 エドワーズ株式会社 ダンパおよび真空ポンプ
JP4962851B2 (ja) * 2006-03-06 2012-06-27 株式会社島津製作所 真空ポンプ
DE102006034478A1 (de) 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe
JP4914165B2 (ja) * 2006-10-06 2012-04-11 エドワーズ株式会社 制振装置及び制振方法
JP2008229806A (ja) * 2007-03-23 2008-10-02 Jtekt Corp 磁気軸受装置
US8279401B2 (en) * 2008-04-25 2012-10-02 Asml Netherlands B.V. Position control system, a lithographic apparatus and a method for controlling a position of a movable object
US8128649B2 (en) 2008-12-16 2012-03-06 Slater Charles R Spring scissor blade
JP5763885B2 (ja) * 2010-01-29 2015-08-12 株式会社東芝 磁気浮上装置
JP5966651B2 (ja) * 2012-06-19 2016-08-10 株式会社ジェイテクト 主軸装置
DE102013219196A1 (de) * 2013-09-24 2015-03-26 Siemens Aktiengesellschaft Verfahren zum Kompensieren einer niederfrequenten Stör-Kraft eines Rotors mit aktiven Magnetlagern, aktives Magnetlager mit Kompensations-Regel-Kreis zur Durchführung des Kompensierens und Verwendung des Magnetlagers
JP6015701B2 (ja) * 2014-03-27 2016-10-26 Ｊｆｅスチール株式会社 鋼板の制振制御方法及び制振制御装置
US9816965B2 (en) 2014-11-14 2017-11-14 General Electric Company Method to detect vibration nodes between a sensor and an actuator in a rotatable component
JP6574047B2 (ja) 2015-08-10 2019-09-11 エクソンモービル アップストリーム リサーチ カンパニー 磁気制御式乾式ガスシールのためのデバイス及び方法
US10132412B2 (en) 2016-08-05 2018-11-20 Exxonmobil Upstream Research Company Device and method for controlling rotating equipment seal without buffer support equipment
JP6864447B2 (ja) * 2016-09-06 2021-04-28 キヤノン株式会社 リソグラフィ装置、および物品の製造方法
JP7148230B2 (ja) * 2017-08-31 2022-10-05 エドワーズ株式会社 真空ポンプ及び制御装置
CN111193454B (zh) * 2020-01-16 2023-05-09 江苏大学 开关磁阻轮毂电机减振及脉动抑制复合控制系统构造方法
CN111836013B (zh) * 2020-07-09 2022-04-12 河南中电投华新电力工程有限公司 一种基于vr的火电厂检修平台
EP3992594A1 (en) * 2020-10-29 2022-05-04 Rolls-Royce Deutschland Ltd & Co KG System and method for detecting vibrations in rotating machinery
CN113623239B (zh) * 2021-09-16 2024-06-25 北京航空航天大学宁波创新研究院 一种不平衡磁拉力控制方法、装置、系统、设备和介质
CN114235143B (zh) * 2021-12-16 2023-09-22 常州大学 一种磁悬浮多跨转子不对中振动的自适应检测系统
CN114371622B (zh) * 2022-01-07 2024-04-12 北京航空航天大学 基于多谐波逆Park变换的磁悬浮转子谐波振动力抑制方法
CN115514280B (zh) * 2022-10-20 2024-06-25 核工业西南物理研究院 一种磁悬浮电机加入低通滤波模块后控制启机振荡的方法
CN119419125B (zh) * 2024-08-15 2025-09-19 鑫益邦半导体(江苏)有限公司 阻力可变式减震键合设备
CN119675526B (zh) * 2024-12-18 2025-10-03 华中科技大学 一种磁悬浮电机电磁振动主动抑制方法及系统

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JP4287213B2 (ja) * 2002-09-03 2009-07-01 エドワーズ株式会社 振動抑制機能を有する磁気軸受装置、振動推定機能を有する磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置

Also Published As

Publication number Publication date
USRE41035E1 (en) 2009-12-15
US20040041478A1 (en) 2004-03-04
KR20040020852A (ko) 2004-03-09
DE60320072D1 (de) 2008-05-15
JP4287213B2 (ja) 2009-07-01
EP1396649A3 (en) 2005-06-08
US6806606B2 (en) 2004-10-19
JP2004150628A (ja) 2004-05-27
EP1396649A2 (en) 2004-03-10
EP1396649B1 (en) 2008-04-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., YACHIYO, CHIBA, JP

8328 Change in the person/name/address of the agent

Representative=s name: WEICKMANN & WEICKMANN, 81679 MUENCHEN

8339 Ceased/non-payment of the annual fee