JP4264667B2 - 振動検出装置 - Google Patents

振動検出装置 Download PDF

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Publication number
JP4264667B2
JP4264667B2 JP2007036410A JP2007036410A JP4264667B2 JP 4264667 B2 JP4264667 B2 JP 4264667B2 JP 2007036410 A JP2007036410 A JP 2007036410A JP 2007036410 A JP2007036410 A JP 2007036410A JP 4264667 B2 JP4264667 B2 JP 4264667B2
Authority
JP
Japan
Prior art keywords
light
optical path
polarization
photoelectric conversion
beam splitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007036410A
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English (en)
Japanese (ja)
Other versions
JP2008202958A5 (enExample
JP2008202958A (ja
Inventor
照二 平田
和利 野本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2007036410A priority Critical patent/JP4264667B2/ja
Priority to US12/068,394 priority patent/US7880894B2/en
Publication of JP2008202958A publication Critical patent/JP2008202958A/ja
Publication of JP2008202958A5 publication Critical patent/JP2008202958A5/ja
Application granted granted Critical
Publication of JP4264667B2 publication Critical patent/JP4264667B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02016—Interferometers characterised by the beam path configuration contacting two or more objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2007036410A 2007-02-16 2007-02-16 振動検出装置 Expired - Fee Related JP4264667B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007036410A JP4264667B2 (ja) 2007-02-16 2007-02-16 振動検出装置
US12/068,394 US7880894B2 (en) 2007-02-16 2008-02-06 Vibration detection device and vibration detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007036410A JP4264667B2 (ja) 2007-02-16 2007-02-16 振動検出装置

Publications (3)

Publication Number Publication Date
JP2008202958A JP2008202958A (ja) 2008-09-04
JP2008202958A5 JP2008202958A5 (enExample) 2008-10-16
JP4264667B2 true JP4264667B2 (ja) 2009-05-20

Family

ID=39706372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007036410A Expired - Fee Related JP4264667B2 (ja) 2007-02-16 2007-02-16 振動検出装置

Country Status (2)

Country Link
US (1) US7880894B2 (enExample)
JP (1) JP4264667B2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8934104B2 (en) * 2010-01-22 2015-01-13 Universitaet Stuttgart Method and arrangement for robust interferometry for detecting a feature of an object
US9261800B2 (en) 2011-03-30 2016-02-16 Mapper Lithography Ip B.V. Alignment of an interferometer module for use in an exposure tool
DE102011085599B3 (de) * 2011-11-02 2012-12-13 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts
WO2013082247A1 (en) * 2011-12-01 2013-06-06 University Of Rochester Interferometer, system, and method of use
JP6181189B2 (ja) 2012-09-27 2017-08-16 マッパー・リソグラフィー・アイピー・ビー．ブイ． 多軸微分干渉計
WO2015116999A1 (en) * 2014-01-30 2015-08-06 Wayne Leonard Rodenhausen Stereo imaging with rotational-shear interferometry
KR101609548B1 (ko) * 2014-10-31 2016-04-06 서울과학기술대학교 산학협력단 다중 빔 리플렉터를 이용한 다중 광경로 레이저 광학계
EP3408625B1 (en) * 2016-01-26 2020-04-08 Tubitak Dual-channel laser audio monitoring system
US9992581B2 (en) 2016-03-25 2018-06-05 Northrop Grumman Systems Corporation Optical microphone system
GB2566284A (en) * 2017-09-07 2019-03-13 Univ Aston Laser detection system
CN107907980B (zh) * 2017-12-06 2019-04-23 南京大学 一种干涉仪
EP3734267A1 (en) * 2019-05-01 2020-11-04 Northrop Grumman Innovation Systems, Inc. Inspection devices with laser emitters and optical microphones, and related systems and methods
US11079230B2 (en) 2019-05-10 2021-08-03 Northrop Grumman Systems Corporation Fiber-optic gyroscope (FOG) assembly

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172186A (en) * 1990-07-03 1992-12-15 Konica Corporation Laser interferometry length measuring an apparatus employing a beam slitter
JPH0540011A (ja) * 1991-08-06 1993-02-19 Olympus Optical Co Ltd 干渉測長器
JPH0761199B2 (ja) 1992-02-12 1995-06-28 工業技術院長 マイクロフォン
JPH07112318B2 (ja) 1992-02-12 1995-11-29 工業技術院長 マイクロフォン
JP3382644B2 (ja) * 1992-09-17 2003-03-04 アンリツ株式会社 直交偏光ヘテロダイン干渉計
JP3543101B2 (ja) 1995-03-24 2004-07-14 学校法人東海大学 光マイクロホン
JPH10308998A (ja) 1997-05-07 1998-11-17 Sony Corp マイクロホン装置
US5949546A (en) * 1997-05-14 1999-09-07 Ahead Optoelectronics, Inc. Interference apparatus for measuring absolute and differential motions of same or different testing surface
GB2330725B (en) 1997-10-24 2001-08-15 Sony Uk Ltd Microphone
US7006562B2 (en) * 2000-03-17 2006-02-28 Chien Chou Phase demodulator, phase difference detector, and interferometric system using the phase difference detector
JP4112505B2 (ja) 2004-01-14 2008-07-02 株式会社東芝 光マイクロフォン及びその製造方法

Also Published As

Publication number Publication date
JP2008202958A (ja) 2008-09-04
US7880894B2 (en) 2011-02-01
US20080198386A1 (en) 2008-08-21

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