JP2008202958A5 - - Google Patents

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Publication number
JP2008202958A5
JP2008202958A5 JP2007036410A JP2007036410A JP2008202958A5 JP 2008202958 A5 JP2008202958 A5 JP 2008202958A5 JP 2007036410 A JP2007036410 A JP 2007036410A JP 2007036410 A JP2007036410 A JP 2007036410A JP 2008202958 A5 JP2008202958 A5 JP 2008202958A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2007036410A
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Japanese (ja)
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JP2008202958A (ja
JP4264667B2 (ja
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Publication date
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Priority to JP2007036410A priority Critical patent/JP4264667B2/ja
Priority claimed from JP2007036410A external-priority patent/JP4264667B2/ja
Priority to US12/068,394 priority patent/US7880894B2/en
Publication of JP2008202958A publication Critical patent/JP2008202958A/ja
Publication of JP2008202958A5 publication Critical patent/JP2008202958A5/ja
Application granted granted Critical
Publication of JP4264667B2 publication Critical patent/JP4264667B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007036410A 2007-02-16 2007-02-16 振動検出装置 Expired - Fee Related JP4264667B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007036410A JP4264667B2 (ja) 2007-02-16 2007-02-16 振動検出装置
US12/068,394 US7880894B2 (en) 2007-02-16 2008-02-06 Vibration detection device and vibration detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007036410A JP4264667B2 (ja) 2007-02-16 2007-02-16 振動検出装置

Publications (3)

Publication Number Publication Date
JP2008202958A JP2008202958A (ja) 2008-09-04
JP2008202958A5 true JP2008202958A5 (enExample) 2008-10-16
JP4264667B2 JP4264667B2 (ja) 2009-05-20

Family

ID=39706372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007036410A Expired - Fee Related JP4264667B2 (ja) 2007-02-16 2007-02-16 振動検出装置

Country Status (2)

Country Link
US (1) US7880894B2 (enExample)
JP (1) JP4264667B2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8934104B2 (en) * 2010-01-22 2015-01-13 Universitaet Stuttgart Method and arrangement for robust interferometry for detecting a feature of an object
US9261800B2 (en) 2011-03-30 2016-02-16 Mapper Lithography Ip B.V. Alignment of an interferometer module for use in an exposure tool
DE102011085599B3 (de) * 2011-11-02 2012-12-13 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts
WO2013082247A1 (en) * 2011-12-01 2013-06-06 University Of Rochester Interferometer, system, and method of use
JP6181189B2 (ja) 2012-09-27 2017-08-16 マッパー・リソグラフィー・アイピー・ビー．ブイ． 多軸微分干渉計
WO2015116999A1 (en) * 2014-01-30 2015-08-06 Wayne Leonard Rodenhausen Stereo imaging with rotational-shear interferometry
KR101609548B1 (ko) * 2014-10-31 2016-04-06 서울과학기술대학교 산학협력단 다중 빔 리플렉터를 이용한 다중 광경로 레이저 광학계
EP3408625B1 (en) * 2016-01-26 2020-04-08 Tubitak Dual-channel laser audio monitoring system
US9992581B2 (en) 2016-03-25 2018-06-05 Northrop Grumman Systems Corporation Optical microphone system
GB2566284A (en) * 2017-09-07 2019-03-13 Univ Aston Laser detection system
CN107907980B (zh) * 2017-12-06 2019-04-23 南京大学 一种干涉仪
EP3734267A1 (en) * 2019-05-01 2020-11-04 Northrop Grumman Innovation Systems, Inc. Inspection devices with laser emitters and optical microphones, and related systems and methods
US11079230B2 (en) 2019-05-10 2021-08-03 Northrop Grumman Systems Corporation Fiber-optic gyroscope (FOG) assembly

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172186A (en) * 1990-07-03 1992-12-15 Konica Corporation Laser interferometry length measuring an apparatus employing a beam slitter
JPH0540011A (ja) * 1991-08-06 1993-02-19 Olympus Optical Co Ltd 干渉測長器
JPH0761199B2 (ja) 1992-02-12 1995-06-28 工業技術院長 マイクロフォン
JPH07112318B2 (ja) 1992-02-12 1995-11-29 工業技術院長 マイクロフォン
JP3382644B2 (ja) * 1992-09-17 2003-03-04 アンリツ株式会社 直交偏光ヘテロダイン干渉計
JP3543101B2 (ja) 1995-03-24 2004-07-14 学校法人東海大学 光マイクロホン
JPH10308998A (ja) 1997-05-07 1998-11-17 Sony Corp マイクロホン装置
US5949546A (en) * 1997-05-14 1999-09-07 Ahead Optoelectronics, Inc. Interference apparatus for measuring absolute and differential motions of same or different testing surface
GB2330725B (en) 1997-10-24 2001-08-15 Sony Uk Ltd Microphone
US7006562B2 (en) * 2000-03-17 2006-02-28 Chien Chou Phase demodulator, phase difference detector, and interferometric system using the phase difference detector
JP4112505B2 (ja) 2004-01-14 2008-07-02 株式会社東芝 光マイクロフォン及びその製造方法

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