JP4257354B2 - 相変化メモリ - Google Patents
相変化メモリ Download PDFInfo
- Publication number
- JP4257354B2 JP4257354B2 JP2006254480A JP2006254480A JP4257354B2 JP 4257354 B2 JP4257354 B2 JP 4257354B2 JP 2006254480 A JP2006254480 A JP 2006254480A JP 2006254480 A JP2006254480 A JP 2006254480A JP 4257354 B2 JP4257354 B2 JP 4257354B2
- Authority
- JP
- Japan
- Prior art keywords
- phase change
- layer
- slit
- change memory
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000015654 memory Effects 0.000 title claims description 39
- 239000010410 layer Substances 0.000 claims description 155
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 29
- 239000012790 adhesive layer Substances 0.000 claims description 13
- 239000012782 phase change material Substances 0.000 claims description 8
- 239000011229 interlayer Substances 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000012535 impurity Substances 0.000 description 10
- 229910052814 silicon oxide Inorganic materials 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 10
- 239000010937 tungsten Substances 0.000 description 10
- 229910052721 tungsten Inorganic materials 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000010936 titanium Substances 0.000 description 7
- 229910052719 titanium Inorganic materials 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 5
- 238000002955 isolation Methods 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 150000004770 chalcogenides Chemical class 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001787 chalcogens Chemical group 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910021476 group 6 element Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000006386 memory function Effects 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- WNUPENMBHHEARK-UHFFFAOYSA-N silicon tungsten Chemical compound [Si].[W] WNUPENMBHHEARK-UHFFFAOYSA-N 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Patterning of the switching material
- H10N70/063—Patterning of the switching material by etching of pre-deposited switching material layers, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8413—Electrodes adapted for resistive heating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
Description
10 下層
11 絶縁層
12 相変化層
13 金属層
14 接着層
15 ヒータ電極
16 上層
20 シリコン基板
21 不純物拡散領域
22 素子分離領域
23 絶縁膜
24 ゲート電極
25 ソース/ドレイン領域
26 第1の層間絶縁膜
27 第1のコンタクトプラグ
28 配線層
29 第2の層間絶縁膜
30 第2のコンタクトプラグ
40 パッド
41 線状領域
42 中央領域
43 周辺領域
44 スリット群
51、52 第1、第2の方向
60 スリット群
61、62 第1、2のグループ
70 スリット群
71〜73 第1〜3のグループ
80 スリット群
81〜83 第1〜第3のスリット
90 スリット群
91、92 第1、2のスリット
100 スリット群
101〜105 第1〜第5のスリット
111〜114 第1〜第4の領域
Claims (5)
- 絶縁層と、
前記絶縁層上に相変化材料を積層した相変化層と、
前記相変化層上に積層された前記金属層と、を備え、
前記相変化層は、線状部位と、前記線状部位に接続されて前記線状部位よりも幅広に形成され、いずれも積層方向に直交するとともに互いに直交する第1の方向及び第2の方向に沿った4辺をもつ面状部位とを有し、
前記面状部位は、前記第1の方向に平行で前記第2の方向に並んだ複数の線状のスリットを有する、
相変化メモリ。 - 前記相変化層と前記金属層は、互いに前記積層方向に重なるように同じ形状を有する、
請求項1の相変化メモリ。 - 前記絶縁層と前記相変化層との間に更に接着層を備える、
請求項1及び請求項2のいずれかの相変化メモリ。 - 前記相変化層の熱膨張率は、前記金属層の熱膨張率より大きく、
前記相変化層の熱膨張率は、前記絶縁層の熱膨張率より大きい、
請求項1から請求項3のいずれかの相変化メモリ。 - 複数の前記スリットには、前記第1の方向に延びた第1のスリットと、前記第2の方向に延びた第2のスリットとが含まれる、
請求項1から請求項4のいずれかの相変化メモリ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006254480A JP4257354B2 (ja) | 2006-09-20 | 2006-09-20 | 相変化メモリ |
US11/857,707 US7696504B2 (en) | 2006-09-20 | 2007-09-19 | Phase change memory device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006254480A JP4257354B2 (ja) | 2006-09-20 | 2006-09-20 | 相変化メモリ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008078307A JP2008078307A (ja) | 2008-04-03 |
JP4257354B2 true JP4257354B2 (ja) | 2009-04-22 |
Family
ID=39187631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006254480A Active JP4257354B2 (ja) | 2006-09-20 | 2006-09-20 | 相変化メモリ |
Country Status (2)
Country | Link |
---|---|
US (1) | US7696504B2 (ja) |
JP (1) | JP4257354B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4257354B2 (ja) * | 2006-09-20 | 2009-04-22 | エルピーダメモリ株式会社 | 相変化メモリ |
WO2008150902A1 (en) * | 2007-05-29 | 2008-12-11 | Lab Partners Associates, Inc. | System and method for maintaining hot shoe communications between a camera and a wireless device |
JP6120738B2 (ja) * | 2013-09-17 | 2017-04-26 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004022653A (ja) | 2002-06-13 | 2004-01-22 | Denso Corp | 半導体装置 |
KR20050084319A (ko) | 2002-12-19 | 2005-08-26 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 전기 디바이스 |
JP4934276B2 (ja) | 2004-11-15 | 2012-05-16 | ルネサスエレクトロニクス株式会社 | 半導体メモリおよびその製造方法 |
JP4257354B2 (ja) * | 2006-09-20 | 2009-04-22 | エルピーダメモリ株式会社 | 相変化メモリ |
-
2006
- 2006-09-20 JP JP2006254480A patent/JP4257354B2/ja active Active
-
2007
- 2007-09-19 US US11/857,707 patent/US7696504B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7696504B2 (en) | 2010-04-13 |
US20080067487A1 (en) | 2008-03-20 |
JP2008078307A (ja) | 2008-04-03 |
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