JP4251279B2 - 板状体搬送装置 - Google Patents

板状体搬送装置 Download PDF

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Publication number
JP4251279B2
JP4251279B2 JP2003274874A JP2003274874A JP4251279B2 JP 4251279 B2 JP4251279 B2 JP 4251279B2 JP 2003274874 A JP2003274874 A JP 2003274874A JP 2003274874 A JP2003274874 A JP 2003274874A JP 4251279 B2 JP4251279 B2 JP 4251279B2
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Japan
Prior art keywords
air
glass substrate
plate
conveyance
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003274874A
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English (en)
Japanese (ja)
Other versions
JP2004331395A5 (enrdf_load_stackoverflow
JP2004331395A (ja
Inventor
進 森屋
繁人 村山
雄一 森本
淑照 池畑
隆佳 大野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP2003274874A priority Critical patent/JP4251279B2/ja
Priority to TW093107979A priority patent/TWI327985B/zh
Priority to KR1020040025090A priority patent/KR100966131B1/ko
Priority to US10/823,408 priority patent/US7108474B2/en
Priority to CNB2004100329689A priority patent/CN100482555C/zh
Publication of JP2004331395A publication Critical patent/JP2004331395A/ja
Publication of JP2004331395A5 publication Critical patent/JP2004331395A5/ja
Application granted granted Critical
Publication of JP4251279B2 publication Critical patent/JP4251279B2/ja
Priority to KR1020100011389A priority patent/KR101051681B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2003274874A 2003-04-14 2003-07-15 板状体搬送装置 Expired - Fee Related JP4251279B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2003274874A JP4251279B2 (ja) 2003-04-14 2003-07-15 板状体搬送装置
TW093107979A TWI327985B (en) 2003-04-14 2004-03-24 Apparatus for transporting plate-shaped work piece
KR1020040025090A KR100966131B1 (ko) 2003-04-14 2004-04-12 판형체 반송 장치
US10/823,408 US7108474B2 (en) 2003-04-14 2004-04-13 Apparatus for transporting plate-shaped work piece
CNB2004100329689A CN100482555C (zh) 2003-04-14 2004-04-14 板状体输送装置
KR1020100011389A KR101051681B1 (ko) 2003-04-14 2010-02-08 판형체 반송 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003109137 2003-04-14
JP2003274874A JP4251279B2 (ja) 2003-04-14 2003-07-15 板状体搬送装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008054912A Division JP4186129B2 (ja) 2003-04-14 2008-03-05 板状体搬送装置

Publications (3)

Publication Number Publication Date
JP2004331395A JP2004331395A (ja) 2004-11-25
JP2004331395A5 JP2004331395A5 (enrdf_load_stackoverflow) 2008-04-24
JP4251279B2 true JP4251279B2 (ja) 2009-04-08

Family

ID=33513129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003274874A Expired - Fee Related JP4251279B2 (ja) 2003-04-14 2003-07-15 板状体搬送装置

Country Status (1)

Country Link
JP (1) JP4251279B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006186251A (ja) * 2004-12-28 2006-07-13 Kumamoto Technology & Industry Foundation 塗布装置
JP4830339B2 (ja) * 2005-04-27 2011-12-07 株式会社Ｉｈｉ 搬送装置
KR100721939B1 (ko) 2006-02-08 2007-05-25 주식회사 태성기연 판유리 이송장치
JP5239606B2 (ja) * 2007-10-04 2013-07-17 株式会社Ｉｈｉ 浮上搬送装置及び浮上ユニット
JP4752858B2 (ja) * 2008-04-11 2011-08-17 株式会社日立プラントテクノロジー 板状体搬送装置及びその制御方法
JP5440875B2 (ja) * 2010-12-06 2014-03-12 株式会社ダイフク 板状体搬送装置

Also Published As

Publication number Publication date
JP2004331395A (ja) 2004-11-25

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