JP4243546B2 - 空間的光変調器（ｓｌｍ）の可動素子のアドレス指定方法 - Google Patents

空間的光変調器（ｓｌｍ）の可動素子のアドレス指定方法 Download PDF

Info

Publication number
JP4243546B2
JP4243546B2 JP2003577037A JP2003577037A JP4243546B2 JP 4243546 B2 JP4243546 B2 JP 4243546B2 JP 2003577037 A JP2003577037 A JP 2003577037A JP 2003577037 A JP2003577037 A JP 2003577037A JP 4243546 B2 JP4243546 B2 JP 4243546B2
Authority
JP
Japan
Prior art keywords
force
deflection
movable element
electrode
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003577037A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005521078A5 (enExample
JP2005521078A (ja
Inventor
リュングブラッド、ウーリック
Original Assignee
マイクロニック レーザー システムズ アクチボラゲット
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by マイクロニック レーザー システムズ アクチボラゲット filed Critical マイクロニック レーザー システムズ アクチボラゲット
Publication of JP2005521078A publication Critical patent/JP2005521078A/ja
Publication of JP2005521078A5 publication Critical patent/JP2005521078A5/ja
Application granted granted Critical
Publication of JP4243546B2 publication Critical patent/JP4243546B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Micromachines (AREA)
  • Liquid Crystal (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2003577037A 2002-03-15 2003-03-14 空間的光変調器（ｓｌｍ）の可動素子のアドレス指定方法 Expired - Fee Related JP4243546B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE0200787A SE0200787D0 (sv) 2002-03-15 2002-03-15 Improved addressing method
PCT/SE2003/000427 WO2003079090A1 (en) 2002-03-15 2003-03-14 IMPROVED ADDRESSING METHOD OF MOVABLE ELEMENTS IN A SPATIAL LIGHT MODULATOR (slm)

Publications (3)

Publication Number Publication Date
JP2005521078A JP2005521078A (ja) 2005-07-14
JP2005521078A5 JP2005521078A5 (enExample) 2009-01-22
JP4243546B2 true JP4243546B2 (ja) 2009-03-25

Family

ID=20287276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003577037A Expired - Fee Related JP4243546B2 (ja) 2002-03-15 2003-03-14 空間的光変調器（ｓｌｍ）の可動素子のアドレス指定方法

Country Status (9)

Country Link
US (2) US7075693B2 (enExample)
EP (1) EP1485746B1 (enExample)
JP (1) JP4243546B2 (enExample)
CN (1) CN1324344C (enExample)
AT (1) ATE403175T1 (enExample)
AU (1) AU2003215999A1 (enExample)
DE (1) DE60322517D1 (enExample)
SE (1) SE0200787D0 (enExample)
WO (1) WO2003079090A1 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE0100336L (sv) 2001-02-05 2002-08-06 Micronic Laser Systems Ab Adresseringsmetod och apparat som använder densamma tekniskt område
US7410736B2 (en) 2003-09-30 2008-08-12 Asml Holding N.V. Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones
US6876440B1 (en) 2003-09-30 2005-04-05 Asml Holding N.V. Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region
US7023526B2 (en) 2003-09-30 2006-04-04 Asml Holding N.V. Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap without an explicit attenuation
US7839561B2 (en) * 2007-02-26 2010-11-23 Silicon Quest Kabushiki-Kaisha Micromirror device with a single address electrode
US20090033878A1 (en) * 2003-11-01 2009-02-05 Akira Shirai System configurations and methods for controlling image projection apparatuses and mirror device
US7336290B2 (en) 2004-01-07 2008-02-26 Texas Instruments Incorporated Method and apparatus for increasing a perceived resolution of a display
JP4073886B2 (ja) * 2004-03-30 2008-04-09 アンリツ株式会社 可変波長光源
US7072090B2 (en) * 2004-04-22 2006-07-04 Micronic Laser Systems Ab Addressing of an SLM
US7499146B2 (en) * 2005-03-14 2009-03-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping
US7372617B2 (en) * 2005-07-06 2008-05-13 Peter Enoksson Hidden hinge MEMS device
JP2007033787A (ja) * 2005-07-26 2007-02-08 Fujifilm Corp 微小薄膜可動素子および微小薄膜可動素子アレイ並びに微小薄膜可動素子アレイの駆動方法
US7443568B2 (en) * 2006-05-04 2008-10-28 Miradia Inc. Method and system for resonant operation of a reflective spatial light modulator
US7505195B2 (en) 2006-05-04 2009-03-17 Miradia Inc. Reflective spatial light modulator with high stiffness torsion spring hinge
US20080231936A1 (en) * 2007-03-02 2008-09-25 Taro Endo Display system comprising a mirror device with micromirrors controlled to operate in intermediate oscillating state
US7961161B2 (en) * 2007-03-02 2011-06-14 Silicon Quest Kabushiki-Kaisha Display system comprising a mirror device with micromirrors controlled to operate in intermediate oscillating state
US9250536B2 (en) 2007-03-30 2016-02-02 Asml Netherlands B.V. Lithographic apparatus and method
US8937706B2 (en) * 2007-03-30 2015-01-20 Asml Netherlands B.V. Lithographic apparatus and method
JP5239594B2 (ja) * 2008-07-30 2013-07-17 富士通株式会社 クリップ検出装置及び方法
US8861066B2 (en) 2009-02-16 2014-10-14 Micronic Ab Oversized micro-mechanical light modulator with redundant elements, device and method
NL2006625A (en) * 2010-05-26 2011-11-29 Asml Netherlands Bv Illumination system and lithographic apparatus.
DE102011081042B4 (de) * 2011-08-16 2021-05-27 Robert Bosch Gmbh Steuervorrichtung für einen Mikrospiegel, Verfahren zum Ansteuern eines Mikrospiegels und Bildprojektionssystem
CN102354050B (zh) * 2011-09-28 2013-01-02 哈尔滨工业大学 柔性辅助臂跟随超高角灵敏度高频响微角摆控制反射镜
US20130286463A1 (en) * 2011-10-24 2013-10-31 Texas Instruments Incorporated Dynamic actuation waveform for a digital micromirror device
FR2985320B1 (fr) * 2011-12-29 2014-02-14 Alpao Systeme a etalonnage commun et procede correspondant
DE102015205404A1 (de) * 2015-03-25 2016-09-29 Carl Zeiss Smt Gmbh Vielspiegel-Anordnung
CN109557661B (zh) * 2018-10-15 2021-02-26 武汉光迅科技股份有限公司 驱动光学转镜转动的方法及用于驱动光学转镜转动的装置
CN111552072B (zh) * 2020-04-28 2022-07-12 安徽中科米微电子技术有限公司 大尺寸mems垂直梳齿微镜及其制备方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5032924A (en) * 1989-04-10 1991-07-16 Nilford Laboratories, Inc. System for producing an image from a sequence of pixels
US5285196A (en) * 1992-10-15 1994-02-08 Texas Instruments Incorporated Bistable DMD addressing method
US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US6044705A (en) * 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
US5949570A (en) * 1995-06-20 1999-09-07 Matsushita Electric Industrial Co., Ltd. Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator
US5771116A (en) 1996-10-21 1998-06-23 Texas Instruments Incorporated Multiple bias level reset waveform for enhanced DMD control
US6323982B1 (en) * 1998-05-22 2001-11-27 Texas Instruments Incorporated Yield superstructure for digital micromirror device
KR100311032B1 (ko) * 1999-10-29 2001-11-02 윤종용 마이크로미러 가동장치
JP2001228552A (ja) * 2000-02-17 2001-08-24 Fuji Photo Film Co Ltd プリンタ
US6600591B2 (en) * 2001-06-12 2003-07-29 Network Photonics, Inc. Micromirror array having adjustable mirror angles
US7190509B2 (en) * 2001-11-07 2007-03-13 Trex Enterprises Corp. Optically addressed MEMS
US6757092B2 (en) * 2001-12-10 2004-06-29 Nayef M. Abu-Ageel Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof
KR100630029B1 (ko) * 2002-11-06 2006-09-27 마츠시타 덴끼 산교 가부시키가이샤 변위 검출 기능을 구비한 마이크로 액츄에이터, 및 당해마이크로 액츄에이터를 구비한 가변형 미러
US6956683B2 (en) * 2003-06-11 2005-10-18 Texas Instruments Incorporated Pivoting platform having a piezoelectric drive
US20070132681A1 (en) * 2005-12-09 2007-06-14 Chih-Liang Chen Passive micro-mirror-array spatial light modulation

Also Published As

Publication number Publication date
ATE403175T1 (de) 2008-08-15
WO2003079090A1 (en) 2003-09-25
US20050122558A1 (en) 2005-06-09
CN1324344C (zh) 2007-07-04
EP1485746B1 (en) 2008-07-30
SE0200787D0 (sv) 2002-03-15
AU2003215999A1 (en) 2003-09-29
DE60322517D1 (de) 2008-09-11
US20060187517A1 (en) 2006-08-24
US7075693B2 (en) 2006-07-11
EP1485746A1 (en) 2004-12-15
JP2005521078A (ja) 2005-07-14
CN1643432A (zh) 2005-07-20

Similar Documents

Publication Publication Date Title
JP4243546B2 (ja) 空間的光変調器（ｓｌｍ）の可動素子のアドレス指定方法
JP2005521078A5 (enExample)
KR101284542B1 (ko) 반발 모드 작동식 주사 미세 거울
TWI605013B (zh) 微光學機電掃描裝置與製造其之方法
US20070269199A1 (en) Driving device, optical scanning device, and object information detecting device
CN107797274B (zh) 用于光的二维偏转的微机械装置和方法
US10746982B2 (en) Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof
CN101284642A (zh) 具有倾斜电极的微机械器件
JP7436686B2 (ja) マイクロミラーデバイス及び光走査装置
JP6789438B2 (ja) 光走査装置およびその制御方法
EP1527484A2 (en) High resolution piezoelectric motor
JP3759598B2 (ja) アクチュエータ
JP2011064928A (ja) ２次元光スキャナ
JP2008122961A (ja) 低電圧マイクロメカニカルデバイス
JP5049904B2 (ja) 可動構造体及びそれを用いた光走査ミラー
JP2001004952A (ja) 光偏向子
JP2008083122A (ja) 可動構造体及びそれを備えた光学素子
JP7455976B2 (ja) 光走査装置、及びマイクロミラーデバイスの駆動方法
JP2007192902A (ja) 微小電気機械素子の駆動方法及び微小電気機械素子アレイの駆動方法、微小電気機械素子及び微小電気機械素子アレイ、並びに画像形成装置
WO2003079091A1 (en) An adressing method of moveable microelements in a spatial light modulator (slm) for pattering of a workpiece
JP7695131B2 (ja) 光走査装置、光走査装置の製造方法及び調整方法
Sasaki et al. Micromachined optical scanner using acoustic radiation force
KR100677204B1 (ko) 2축 회전이 가능한 마이크로미러
CN119631002A (zh) 具有偏转元件和向其拱起以可振动地悬挂偏转元件的弹簧元件的微型扫描器
JP2007264143A (ja) アクチュエータ

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051116

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081110

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20081216

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090105

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120109

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120109

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130109

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130109

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees