JP4234684B2 - 磁気記録媒体、磁気記憶装置及び磁気記録媒体の製造方法 - Google Patents
磁気記録媒体、磁気記憶装置及び磁気記録媒体の製造方法 Download PDFInfo
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Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/676—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
- G11B5/737—Physical structure of underlayer, e.g. texture
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7377—Physical structure of underlayer, e.g. texture
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7379—Seed layer, e.g. at least one non-magnetic layer is specifically adapted as a seed or seeding layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
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- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
3−1 シード層
3 下地層
4 磁性層
5 オーバーコート層
6 潤滑剤層
Ratio)を得るために提案されているマスクに類似している。しかし、水平磁気記録媒体と垂直磁気記録媒体とでは、所望の膜成長及びその目的が大きく異なる。水平媒体モードの目的は、ディスク状磁気記録媒体の場合、円周方向に沿った保持力を半径方向に沿った保持力より大きくすることにある。CrNb等からなるシード層がマスクを用いて形成される。次に、bcc構造のCr系合金が、シード層上に好ましくはマスクを用いて形成される。このCr合金は、(001)結晶配向を有し、下のCrNbシード層上にヘテロエピタキシャル成長するものではない。更に上に形成される層は、磁性層を含み、マスクを用いることなく形成される。X線データによると、CrNb下地層は特定の結晶配向を有するものではなかったが、TEMによると、結晶性であることがわかった。TEMによる断面及び平面の調査によると、CrNb下地層は、膜成長フラックス面上にある、基板半径方向に沿って観測すると波形構造を有する。
Claims (23)
- 基板と、
hcp構造のCo系磁性層と、
該基板の上に設けられ、c軸が基板面に対する垂線から10度から45度の角度傾斜しており傾斜のばらつきが5度未満であるhcp構造の下地層とを備え、
該磁性層は、該下地層の上に、該磁性層のc軸が該下地層のc軸の傾斜を保ち、且つ、該磁性層の粒柱が該垂線と平行な方向にエピタキシャル成長されてなる、磁気記録媒体。 - 50nmから400nmの膜厚を有し、該下地層と該基板との間に設けられた軟磁性層を更に備えた、請求項1記載の磁気記録媒体。
- 該下地層は、Os、Re、Ru、非磁性CoCr及び非磁性CoCr−Mからなるグループから選択された材料からなり、MはOs、Re、Ru及びTaから選択された材料からなる、請求項1又は2記載の磁気記録媒体。
- 該磁性層は、CoCrPt、CoCrPtB、CoCrPtBCu、CoCrPt−O及びCoCrPt−SiO2から選択された材料からなる、請求項1又は2記載の磁気記録媒体。
- 該hcp構造の下地層は、2nmから20nmの膜厚を有する、請求項1又は2記載の磁気記録媒体。
- 少なくとも1nmの膜厚を有し、該下地層と該基板との間に設けられた非晶質シード層を更に備えた、請求項1記載の磁気記録媒体。
- 少なくとも1nmの膜厚を有し、該下地層と該軟磁性層との間に設けられた非晶質シード層を更に備えた、請求項2記載の磁気記録媒体。
- 該下地層と該基板との間に設けられ、該下地層と直接接触しており1nmから5nmの膜厚を有するfcc構造の層を更に備えた、請求項1,2,6又は7記載の磁気記録媒体。
- 該磁性層は、少なくとも該下地層の上に設けられた第1の磁性層と、該第1の磁性層の上に設けられた第2の磁性層とからなる、請求項1又は2記載の磁気記録媒体。
- Ru、Re、Os、Ir及びその合金からなるグループから選択された材料からなり、該第1の磁性層の上に設けられており該第1の磁性層と該第2の磁性層の間の反結合を誘起するスペーサ層を更に備えた、請求項9記載の磁気記録媒体。
- 基板と、該基板の上に設けられたhcp構造の下地層と、hcp構造のCo系磁性層とを備えた磁気記録媒体の製造方法であって、
該下地層のc軸が基板面に対する垂線から10度から45度の角度傾斜しており傾斜のばらつきが5度未満となるように、該基板に入射する原子の大部分が基板面に対する垂線から35を超える角度で入射するように下地層材料を斜めに蒸着し、
該下地層の上に、該磁性層のc軸が該下地層のc軸の傾斜を保ち、且つ、該磁性層の粒柱が該垂線と平行な方向に成長するように該磁性層をエピタキシャル成長する、磁気記録媒体の製造方法。 - 下地層ターゲット材料は、該基板面に対する垂線に対して大きな入射角となるように該基板の中心に対して並進する、請求項11記載の磁気記録媒体の製造方法。
- 下地層ターゲット材料は、環状又はテーパを有する環状形状である、請求項11記載の磁気記録媒体の製造方法。
- 下地層ターゲット材料は、該基板への原子の斜め入射を促進するカソード磁石を用いてスパッタリングされる、請求項11記載の磁気記録媒体の製造方法。
- 該磁気記録媒体はディスク状磁気記録媒体であり、該ディスク状磁気記録媒体の円周方向に沿った傾斜スロットと半径方向に沿った垂直スロットを有するマスクを用いて、該基板に対して所望の入射角度の原子のみを該マスクを通過させて他の原子が該マスクで阻止する、請求項11〜14のいずれか1項記載の磁気記録媒体の製造方法。
- 該基板を回転させる、請求項15記載の磁気記録媒体の製造方法。
- 該基板の中心を中心として下地層ターゲット又は蒸着ソースを回転させる、請求項15記載の磁気記録媒体の製造方法。
- 少なくとも1つの磁気記録媒体と、
該磁気記録媒体に情報を書き込み及び/又は該磁気記録媒体から情報を読み出すトランスデューサとを備え、
該磁気記録媒体は、
基板と、
hcp構造のCo系磁性層と、
該基板の上に設けられ、c軸が基板面に対する垂線から10度から45度の角度傾斜しており傾斜のばらつきが5度未満であるhcp構造の下地層とを備え、該磁性層は、該下地層の上に、該磁性層のc軸が該下地層のc軸の傾斜を保ち、且つ、該磁性層の粒柱が該垂線と平行な方向にエピタキシャル成長されてなる、磁気記憶装置。 - 該磁気記録媒体は、50nmから400nmの膜厚を有すると共に該下地層と該基板との間に設けられた軟磁性層を更に備えた、請求項18記載の磁気記憶装置。
- 該磁気記録媒体の該下地層は、Os、Re、Ru、非磁性CoCr及び非磁性CoCr−Mからなるグループから選択された材料からなり、MはOs、Re、Ru及びTaから選択された材料からなる、請求項18又は19記載の磁気記憶装置。
- 該磁気記録媒体は、少なくとも1nmの膜厚を有すると共に該下地層と該基板との間に設けられた非晶質シード層を更に備えた、請求項18記載の磁気記憶装置。
- 該磁気記録媒体は、少なくとも1nmの膜厚を有すると共に該下地層と該軟磁性層との間に設けられた非晶質シード層を更に備えた、請求項19記載の磁気記憶装置。
- 該磁気記録媒体の該磁性層は、少なくとも2つの反強磁性結合された磁性層からなる、請求項18又は19記載の磁気記憶装置。
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JPH09212855A (ja) * | 1996-02-05 | 1997-08-15 | Hitachi Ltd | 磁気記録媒体及び磁気ヘッド並びにこれらを用いた磁気記録再生装置 |
US6183893B1 (en) * | 1998-04-06 | 2001-02-06 | Hitachi, Ltd. | Perpendicular magnetic recording medium and magnetic storage apparatus using the same |
JP3011918B2 (ja) | 1998-04-06 | 2000-02-21 | 株式会社日立製作所 | 垂直磁気記録媒体及び磁気記憶装置 |
US6562489B2 (en) | 1999-11-12 | 2003-05-13 | Fujitsu Limited | Magnetic recording medium and magnetic storage apparatus |
JP2002304722A (ja) | 2001-04-06 | 2002-10-18 | Fujitsu Ltd | 垂直磁気記録媒体及びその製造方法並びに磁気記憶装置 |
US6524730B1 (en) * | 1999-11-19 | 2003-02-25 | Seagate Technology, Llc | NiFe-containing soft magnetic layer design for multilayer media |
US6645614B1 (en) * | 2000-07-25 | 2003-11-11 | Seagate Technology Llc | Magnetic recording media having enhanced coupling between magnetic layers |
AU2003279009A1 (en) * | 2002-09-30 | 2004-04-23 | Seagate Technology Llc | Magnetic storage media having tilted magnetic anisotropy |
-
2003
- 2003-05-02 JP JP2004571331A patent/JP4234684B2/ja not_active Expired - Fee Related
- 2003-05-02 WO PCT/JP2003/005623 patent/WO2004097809A1/en active Application Filing
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2005
- 2005-09-07 US US11/221,270 patent/US7566507B2/en not_active Expired - Fee Related
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WO2004097809A1 (en) | 2004-11-11 |
US20060003190A1 (en) | 2006-01-05 |
JP2006514395A (ja) | 2006-04-27 |
US7566507B2 (en) | 2009-07-28 |
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