JP4226500B2 - 基板搬送機構および塗布膜形成装置 - Google Patents

基板搬送機構および塗布膜形成装置 Download PDF

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Publication number
JP4226500B2
JP4226500B2 JP2004074212A JP2004074212A JP4226500B2 JP 4226500 B2 JP4226500 B2 JP 4226500B2 JP 2004074212 A JP2004074212 A JP 2004074212A JP 2004074212 A JP2004074212 A JP 2004074212A JP 4226500 B2 JP4226500 B2 JP 4226500B2
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Prior art keywords
substrate
scale
unit
coating film
head
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Expired - Fee Related
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JP2004074212A
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Japanese (ja)
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JP2005263336A (ja
JP2005263336A5 (enExample
Inventor
慶崇 大塚
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of JP2005263336A5 publication Critical patent/JP2005263336A5/ja
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  • Coating Apparatus (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2004074212A 2004-03-16 2004-03-16 基板搬送機構および塗布膜形成装置 Expired - Fee Related JP4226500B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004074212A JP4226500B2 (ja) 2004-03-16 2004-03-16 基板搬送機構および塗布膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004074212A JP4226500B2 (ja) 2004-03-16 2004-03-16 基板搬送機構および塗布膜形成装置

Publications (3)

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JP2005263336A JP2005263336A (ja) 2005-09-29
JP2005263336A5 JP2005263336A5 (enExample) 2006-02-02
JP4226500B2 true JP4226500B2 (ja) 2009-02-18

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JP2004074212A Expired - Fee Related JP4226500B2 (ja) 2004-03-16 2004-03-16 基板搬送機構および塗布膜形成装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102729792B1 (ko) * 2023-09-18 2024-11-14 한화솔루션 주식회사 연속 인쇄 공정을 위한 코팅 방법

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007173365A (ja) * 2005-12-20 2007-07-05 Tokyo Electron Ltd 塗布乾燥処理システム及び塗布乾燥処理方法
JP2008212804A (ja) 2007-03-02 2008-09-18 Tokyo Ohka Kogyo Co Ltd 基板の搬送塗布装置
JP4743716B2 (ja) * 2007-03-06 2011-08-10 東京エレクトロン株式会社 基板処理装置
JP5188759B2 (ja) * 2007-08-07 2013-04-24 東京応化工業株式会社 塗布装置及び塗布方法
JP2009043829A (ja) * 2007-08-07 2009-02-26 Tokyo Ohka Kogyo Co Ltd 塗布装置及び塗布方法
JP5536516B2 (ja) * 2010-04-14 2014-07-02 オイレス工業株式会社 非接触搬送装置
KR101624597B1 (ko) * 2013-12-16 2016-05-27 한국기계연구원 가동 스테이지 구동 장치, 증착 장비 및 상압 화학기상증착 장비
JP2014133655A (ja) * 2014-03-17 2014-07-24 Oiles Ind Co Ltd 非接触搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102729792B1 (ko) * 2023-09-18 2024-11-14 한화솔루션 주식회사 연속 인쇄 공정을 위한 코팅 방법

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JP2005263336A (ja) 2005-09-29

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