JP2005263336A5 - - Google Patents
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- Publication number
- JP2005263336A5 JP2005263336A5 JP2004074212A JP2004074212A JP2005263336A5 JP 2005263336 A5 JP2005263336 A5 JP 2005263336A5 JP 2004074212 A JP2004074212 A JP 2004074212A JP 2004074212 A JP2004074212 A JP 2004074212A JP 2005263336 A5 JP2005263336 A5 JP 2005263336A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004074212A JP4226500B2 (ja) | 2004-03-16 | 2004-03-16 | 基板搬送機構および塗布膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004074212A JP4226500B2 (ja) | 2004-03-16 | 2004-03-16 | 基板搬送機構および塗布膜形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005263336A JP2005263336A (ja) | 2005-09-29 |
| JP2005263336A5 true JP2005263336A5 (enExample) | 2006-02-02 |
| JP4226500B2 JP4226500B2 (ja) | 2009-02-18 |
Family
ID=35088287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004074212A Expired - Fee Related JP4226500B2 (ja) | 2004-03-16 | 2004-03-16 | 基板搬送機構および塗布膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4226500B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007173365A (ja) * | 2005-12-20 | 2007-07-05 | Tokyo Electron Ltd | 塗布乾燥処理システム及び塗布乾燥処理方法 |
| JP2008212804A (ja) | 2007-03-02 | 2008-09-18 | Tokyo Ohka Kogyo Co Ltd | 基板の搬送塗布装置 |
| JP4743716B2 (ja) * | 2007-03-06 | 2011-08-10 | 東京エレクトロン株式会社 | 基板処理装置 |
| JP5188759B2 (ja) * | 2007-08-07 | 2013-04-24 | 東京応化工業株式会社 | 塗布装置及び塗布方法 |
| JP2009043829A (ja) * | 2007-08-07 | 2009-02-26 | Tokyo Ohka Kogyo Co Ltd | 塗布装置及び塗布方法 |
| JP5536516B2 (ja) * | 2010-04-14 | 2014-07-02 | オイレス工業株式会社 | 非接触搬送装置 |
| KR101624597B1 (ko) * | 2013-12-16 | 2016-05-27 | 한국기계연구원 | 가동 스테이지 구동 장치, 증착 장비 및 상압 화학기상증착 장비 |
| JP2014133655A (ja) * | 2014-03-17 | 2014-07-24 | Oiles Ind Co Ltd | 非接触搬送装置 |
| KR102729792B1 (ko) * | 2023-09-18 | 2024-11-14 | 한화솔루션 주식회사 | 연속 인쇄 공정을 위한 코팅 방법 |
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2004
- 2004-03-16 JP JP2004074212A patent/JP4226500B2/ja not_active Expired - Fee Related