JP4217963B2 - 板状体搬送装置 - Google Patents

板状体搬送装置 Download PDF

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Publication number
JP4217963B2
JP4217963B2 JP2003271946A JP2003271946A JP4217963B2 JP 4217963 B2 JP4217963 B2 JP 4217963B2 JP 2003271946 A JP2003271946 A JP 2003271946A JP 2003271946 A JP2003271946 A JP 2003271946A JP 4217963 B2 JP4217963 B2 JP 4217963B2
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JP
Japan
Prior art keywords
glass substrate
filter
plate
blower
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2003271946A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005029359A5 (enrdf_load_stackoverflow
JP2005029359A (ja
Inventor
進 森屋
繁人 村山
雄一 森本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP2003271946A priority Critical patent/JP4217963B2/ja
Priority to TW093117327A priority patent/TWI327128B/zh
Priority to US10/885,210 priority patent/US7329299B2/en
Priority to CN200410063505.9A priority patent/CN100497132C/zh
Priority to KR1020040053012A priority patent/KR101112508B1/ko
Priority to CN200810211027XA priority patent/CN101342992B/zh
Publication of JP2005029359A publication Critical patent/JP2005029359A/ja
Publication of JP2005029359A5 publication Critical patent/JP2005029359A5/ja
Application granted granted Critical
Publication of JP4217963B2 publication Critical patent/JP4217963B2/ja
Priority to KR1020110046199A priority patent/KR101149460B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2003271946A 2003-07-08 2003-07-08 板状体搬送装置 Expired - Lifetime JP4217963B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2003271946A JP4217963B2 (ja) 2003-07-08 2003-07-08 板状体搬送装置
TW093117327A TWI327128B (en) 2003-07-08 2004-06-16 Plate-shaped work piece transporting apparatus
US10/885,210 US7329299B2 (en) 2003-07-08 2004-07-06 Plate-shaped work piece transporting apparatus
KR1020040053012A KR101112508B1 (ko) 2003-07-08 2004-07-08 판형체 반송 장치
CN200410063505.9A CN100497132C (zh) 2003-07-08 2004-07-08 玻璃基板搬运装置
CN200810211027XA CN101342992B (zh) 2003-07-08 2004-07-08 板状体搬运装置
KR1020110046199A KR101149460B1 (ko) 2003-07-08 2011-05-17 판형체 반송 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003271946A JP4217963B2 (ja) 2003-07-08 2003-07-08 板状体搬送装置

Publications (3)

Publication Number Publication Date
JP2005029359A JP2005029359A (ja) 2005-02-03
JP2005029359A5 JP2005029359A5 (enrdf_load_stackoverflow) 2008-04-24
JP4217963B2 true JP4217963B2 (ja) 2009-02-04

Family

ID=34209653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003271946A Expired - Lifetime JP4217963B2 (ja) 2003-07-08 2003-07-08 板状体搬送装置

Country Status (2)

Country Link
JP (1) JP4217963B2 (enrdf_load_stackoverflow)
CN (1) CN101342992B (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4889275B2 (ja) * 2005-10-11 2012-03-07 株式会社日本設計工業 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置
KR100721550B1 (ko) 2006-01-19 2007-05-23 주식회사 태성기연 판유리 이송장치
JP4629007B2 (ja) * 2006-08-08 2011-02-09 株式会社日本設計工業 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置
WO2009028279A1 (ja) * 2007-08-24 2009-03-05 Sintokogio, Ltd. エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにそれを含むエア浮上搬送装置
JP2009073660A (ja) * 2007-08-24 2009-04-09 Sintokogio Ltd エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにエア浮上搬送装置
KR100888550B1 (ko) 2007-08-27 2009-03-11 호서대학교 산학협력단 비접촉식 웨이퍼 척 조립체
JP5151795B2 (ja) * 2008-08-08 2013-02-27 株式会社Ｉｈｉ 浮上搬送装置
KR100902790B1 (ko) * 2008-11-25 2009-06-12 이재성 높은 내압을 갖고 소량분출을 하는 비접촉식 반송플레이트
CN102328355A (zh) * 2011-06-20 2012-01-25 镇江市港南电子有限公司 一种硅片收集装置
JP6853520B2 (ja) * 2018-09-20 2021-03-31 株式会社Ｎｓｃ 浮上搬送装置
JP6906673B1 (ja) * 2020-12-07 2021-07-21 リンテック株式会社 支持装置および異物除去方法

Also Published As

Publication number Publication date
CN101342992B (zh) 2011-12-14
CN101342992A (zh) 2009-01-14
JP2005029359A (ja) 2005-02-03

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