JP4213030B2 - リング型スパッタリング・ターゲット - Google Patents

リング型スパッタリング・ターゲット Download PDF

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Publication number
JP4213030B2
JP4213030B2 JP2003502264A JP2003502264A JP4213030B2 JP 4213030 B2 JP4213030 B2 JP 4213030B2 JP 2003502264 A JP2003502264 A JP 2003502264A JP 2003502264 A JP2003502264 A JP 2003502264A JP 4213030 B2 JP4213030 B2 JP 4213030B2
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JP
Japan
Prior art keywords
sputtering
region
substrate
cathode
outer ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2003502264A
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English (en)
Japanese (ja)
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JP2004535513A5 (enExample
JP2004535513A (ja
Inventor
マークス、ダニエル、アール
マシュー、ラジャン
スノウマン、アルフレッド
フィッシャー、チャールズ、アール
Original Assignee
プラックセアー エス．ティ．テクノロジー、 インコーポレイテッド
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Application filed by プラックセアー エス．ティ．テクノロジー、 インコーポレイテッド filed Critical プラックセアー エス．ティ．テクノロジー、 インコーポレイテッド
Publication of JP2004535513A publication Critical patent/JP2004535513A/ja
Publication of JP2004535513A5 publication Critical patent/JP2004535513A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3423—Shape
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2003502264A 2001-06-05 2002-05-31 リング型スパッタリング・ターゲット Expired - Fee Related JP4213030B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/873,184 US6638402B2 (en) 2001-06-05 2001-06-05 Ring-type sputtering target
PCT/US2002/017001 WO2002099158A1 (en) 2001-06-05 2002-05-31 Ring-type sputtering target

Publications (3)

Publication Number Publication Date
JP2004535513A JP2004535513A (ja) 2004-11-25
JP2004535513A5 JP2004535513A5 (enExample) 2005-12-22
JP4213030B2 true JP4213030B2 (ja) 2009-01-21

Family

ID=25361131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003502264A Expired - Fee Related JP4213030B2 (ja) 2001-06-05 2002-05-31 リング型スパッタリング・ターゲット

Country Status (9)

Country Link
US (1) US6638402B2 (enExample)
EP (1) EP1402081B1 (enExample)
JP (1) JP4213030B2 (enExample)
KR (1) KR100907757B1 (enExample)
CN (1) CN1266305C (enExample)
DE (1) DE60235008D1 (enExample)
IL (2) IL158994A0 (enExample)
TW (1) TW573043B (enExample)
WO (1) WO2002099158A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015111576A1 (ja) 2014-01-21 2015-07-30 住友化学株式会社 スパッタリングターゲット

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030178301A1 (en) * 2001-12-21 2003-09-25 Lynn David Mark Planar magnetron targets having target material affixed to non-planar backing plates
US7431195B2 (en) * 2003-09-26 2008-10-07 Praxair S.T. Technology, Inc. Method for centering a sputter target onto a backing plate and the assembly thereof
US20050072668A1 (en) * 2003-10-06 2005-04-07 Heraeus, Inc. Sputter target having modified surface texture
US20050236270A1 (en) * 2004-04-23 2005-10-27 Heraeus, Inc. Controlled cooling of sputter targets
US20060032740A1 (en) * 2004-08-16 2006-02-16 Williams Advanced Materials, Inc. Slotted thin-film sputter deposition targets for ferromagnetic materials
JP4629051B2 (ja) * 2004-11-17 2011-02-09 Ｊｘ日鉱日石金属株式会社 スパッタリングターゲット−バッキングプレート組立体及び成膜装置
US8795486B2 (en) * 2005-09-26 2014-08-05 Taiwan Semiconductor Manufacturing Company, Ltd. PVD target with end of service life detection capability
US20070068796A1 (en) * 2005-09-26 2007-03-29 Taiwan Semiconductor Manufacturing Co., Ltd. Method of using a target having end of service life detection capability
US7891536B2 (en) * 2005-09-26 2011-02-22 Taiwan Semiconductor Manufacturing Co., Ltd. PVD target with end of service life detection capability
CN100560784C (zh) * 2005-09-26 2009-11-18 台湾积体电路制造股份有限公司 侦测制程机台使用的消耗性材料厚板寿命的系统及方法
CN102245795B (zh) * 2008-10-10 2013-06-26 东曹Smd有限公司 用于溅射靶制造的圆形凹槽挤压机构和方法
JP5502442B2 (ja) * 2009-02-26 2014-05-28 キヤノンアネルバ株式会社 マグネトロンスパッタカソード、マグネトロンスパッタ装置及び磁性デバイスの製造方法
US9611537B2 (en) * 2010-02-23 2017-04-04 Evatec Ag Target shaping
JP5619666B2 (ja) * 2010-04-16 2014-11-05 ジェイディーエス ユニフェイズ コーポレーションＪＤＳ Ｕｎｉｐｈａｓｅ Ｃｏｒｐｏｒａｔｉｏｎ マグネトロン・スパッタリング・デバイスで使用するためのリング・カソード
US20140110245A1 (en) * 2012-10-18 2014-04-24 Primestar Solar, Inc. Non-bonded rotatable targets and their methods of sputtering
WO2014107558A1 (en) * 2013-01-04 2014-07-10 Tosoh Smd, Inc. Silicon sputtering target with enhanced surface profile and improved performance and methods of making the same
WO2018119600A1 (zh) * 2016-12-26 2018-07-05 深圳市柔宇科技有限公司 磁控溅射阴极系统
JP6291122B1 (ja) 2017-03-29 2018-03-14 住友化学株式会社 スパッタリングターゲット
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
CN110010455A (zh) * 2018-01-04 2019-07-12 合肥江丰电子材料有限公司 长寿命lcd靶材组件及其形成方法
KR102446965B1 (ko) * 2021-01-28 2022-09-26 (주)지오엘리먼트 강성이 강화된 오링용 그루브를 갖는 스퍼터링 타겟 및 이의 제조방법
USD1104086S1 (en) * 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate
USD1103948S1 (en) * 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate
USD1071103S1 (en) * 2022-04-11 2025-04-15 Applied Materials, Inc. Gas distribution plate
USD1085029S1 (en) * 2022-07-19 2025-07-22 Applied Materials, Inc. Gas distribution plate

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583977A (ja) 1981-06-29 1983-01-10 Fujitsu Ltd スパツタリング装置
JPH01108378A (ja) * 1987-10-21 1989-04-25 Mitsubishi Electric Corp スパツタ装置
JPH04173965A (ja) 1990-11-05 1992-06-22 Vacuum Metallurgical Co Ltd スパッタリング用ターゲット
US5540821A (en) 1993-07-16 1996-07-30 Applied Materials, Inc. Method and apparatus for adjustment of spacing between wafer and PVD target during semiconductor processing
US5455197A (en) * 1993-07-16 1995-10-03 Materials Research Corporation Control of the crystal orientation dependent properties of a film deposited on a semiconductor wafer
JPH08239763A (ja) * 1995-02-27 1996-09-17 Nec Kansai Ltd スパッタ装置及びその調整方法
US6068742A (en) 1996-07-22 2000-05-30 Balzers Aktiengesellschaft Target arrangement with a circular plate, magnetron for mounting the target arrangement, and process for coating a series of circular disc-shaped workpieces by means of said magnetron source
US6139699A (en) * 1997-05-27 2000-10-31 Applied Materials, Inc. Sputtering methods for depositing stress tunable tantalum and tantalum nitride films
US6086725A (en) * 1998-04-02 2000-07-11 Applied Materials, Inc. Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life
US6080287A (en) * 1998-05-06 2000-06-27 Tokyo Electron Limited Method and apparatus for ionized physical vapor deposition
IL138642A0 (en) 1999-09-23 2001-10-31 Praxair Technology Inc Extended life sputter targets

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015111576A1 (ja) 2014-01-21 2015-07-30 住友化学株式会社 スパッタリングターゲット
JP2017179609A (ja) * 2014-01-21 2017-10-05 住友化学株式会社 スパッタリングターゲット
US11532468B2 (en) 2014-01-21 2022-12-20 Sumitomo Chemical Company, Limited Sputtering target

Also Published As

Publication number Publication date
CN1266305C (zh) 2006-07-26
EP1402081A4 (en) 2007-10-10
KR20040030649A (ko) 2004-04-09
EP1402081A1 (en) 2004-03-31
EP1402081B1 (en) 2010-01-06
TW573043B (en) 2004-01-21
IL158994A (en) 2007-02-11
KR100907757B1 (ko) 2009-07-15
US6638402B2 (en) 2003-10-28
DE60235008D1 (de) 2010-02-25
IL158994A0 (en) 2004-05-12
WO2002099158A1 (en) 2002-12-12
CN1541281A (zh) 2004-10-27
US20030075437A1 (en) 2003-04-24
JP2004535513A (ja) 2004-11-25

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