JP4207311B2 - サイドウォール除去液 - Google Patents

サイドウォール除去液 Download PDF

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Publication number
JP4207311B2
JP4207311B2 JP15003299A JP15003299A JP4207311B2 JP 4207311 B2 JP4207311 B2 JP 4207311B2 JP 15003299 A JP15003299 A JP 15003299A JP 15003299 A JP15003299 A JP 15003299A JP 4207311 B2 JP4207311 B2 JP 4207311B2
Authority
JP
Japan
Prior art keywords
sidewall
wiring material
photoresist
chemical reaction
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP15003299A
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English (en)
Japanese (ja)
Other versions
JP2000338686A (ja
JP2000338686A5 (enExample
Inventor
不二麿 緒方
勉 杉山
邦明 宮原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP15003299A priority Critical patent/JP4207311B2/ja
Publication of JP2000338686A publication Critical patent/JP2000338686A/ja
Publication of JP2000338686A5 publication Critical patent/JP2000338686A5/ja
Application granted granted Critical
Publication of JP4207311B2 publication Critical patent/JP4207311B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Drying Of Semiconductors (AREA)
JP15003299A 1999-05-28 1999-05-28 サイドウォール除去液 Expired - Fee Related JP4207311B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15003299A JP4207311B2 (ja) 1999-05-28 1999-05-28 サイドウォール除去液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15003299A JP4207311B2 (ja) 1999-05-28 1999-05-28 サイドウォール除去液

Publications (3)

Publication Number Publication Date
JP2000338686A JP2000338686A (ja) 2000-12-08
JP2000338686A5 JP2000338686A5 (enExample) 2006-04-06
JP4207311B2 true JP4207311B2 (ja) 2009-01-14

Family

ID=15488020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15003299A Expired - Fee Related JP4207311B2 (ja) 1999-05-28 1999-05-28 サイドウォール除去液

Country Status (1)

Country Link
JP (1) JP4207311B2 (enExample)

Also Published As

Publication number Publication date
JP2000338686A (ja) 2000-12-08

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