JP4191913B2 - 薄膜磁気ヘッド - Google Patents
薄膜磁気ヘッド Download PDFInfo
- Publication number
- JP4191913B2 JP4191913B2 JP2001224601A JP2001224601A JP4191913B2 JP 4191913 B2 JP4191913 B2 JP 4191913B2 JP 2001224601 A JP2001224601 A JP 2001224601A JP 2001224601 A JP2001224601 A JP 2001224601A JP 4191913 B2 JP4191913 B2 JP 4191913B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- layer
- magnetic
- tip
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 98
- 230000004907 flux Effects 0.000 claims description 35
- 239000000696 magnetic material Substances 0.000 claims description 25
- 230000001965 increasing effect Effects 0.000 claims description 19
- 238000003892 spreading Methods 0.000 claims description 15
- 230000007480 spreading Effects 0.000 claims description 15
- 239000010410 layer Substances 0.000 description 293
- 239000010408 film Substances 0.000 description 69
- 230000007423 decrease Effects 0.000 description 34
- 230000008859 change Effects 0.000 description 23
- 230000000694 effects Effects 0.000 description 18
- 238000010586 diagram Methods 0.000 description 17
- 101000606504 Drosophila melanogaster Tyrosine-protein kinase-like otk Proteins 0.000 description 14
- 239000000463 material Substances 0.000 description 10
- 230000007797 corrosion Effects 0.000 description 9
- 238000005260 corrosion Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 238000007747 plating Methods 0.000 description 8
- 238000005498 polishing Methods 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 7
- 230000000630 rising effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000009966 trimming Methods 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 4
- 238000000992 sputter etching Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 229910020598 Co Fe Inorganic materials 0.000 description 2
- 229910002519 Co-Fe Inorganic materials 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910020641 Co Zr Inorganic materials 0.000 description 1
- 229910020520 Co—Zr Inorganic materials 0.000 description 1
- 229910020018 Nb Zr Inorganic materials 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
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- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
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- 238000003801 milling Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/012—Recording on, or reproducing or erasing from, magnetic disks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/332—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using thin films
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Magnetic Heads (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001224601A JP4191913B2 (ja) | 2001-07-25 | 2001-07-25 | 薄膜磁気ヘッド |
| US09/943,507 US7142391B2 (en) | 2001-07-25 | 2001-08-31 | Thin film head, producing method thereof and magnetic disk apparatus |
| US11/002,498 US7142392B2 (en) | 2001-07-25 | 2004-12-03 | Thin film head, producing method thereof and magnetic disk apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001224601A JP4191913B2 (ja) | 2001-07-25 | 2001-07-25 | 薄膜磁気ヘッド |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005184679A Division JP4246719B2 (ja) | 2005-06-24 | 2005-06-24 | 薄膜磁気ヘッド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003036506A JP2003036506A (ja) | 2003-02-07 |
| JP2003036506A5 JP2003036506A5 (enExample) | 2005-10-20 |
| JP4191913B2 true JP4191913B2 (ja) | 2008-12-03 |
Family
ID=19057732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001224601A Expired - Fee Related JP4191913B2 (ja) | 2001-07-25 | 2001-07-25 | 薄膜磁気ヘッド |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US7142391B2 (enExample) |
| JP (1) | JP4191913B2 (enExample) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6651313B1 (en) * | 2000-10-06 | 2003-11-25 | International Business Machines Corporation | Method for manufacturing a magnetic head |
| US6826014B2 (en) * | 2001-09-26 | 2004-11-30 | International Business Machines Corporation | Write head having first pole piece with frequency dependent variable effective throat height |
| US7099121B2 (en) * | 2002-06-06 | 2006-08-29 | Seagate Technology Llc | Perpendicular magnetic recording head having a reduced field under the return pole and minimal eddy current losses |
| US7688545B1 (en) * | 2002-09-11 | 2010-03-30 | Seagate Technology Llc | Recording head writer with high magnetic moment material at the writer gap and associated process |
| JP2004185742A (ja) * | 2002-12-04 | 2004-07-02 | Tdk Corp | 薄膜磁気ヘッド |
| JP4079427B2 (ja) * | 2003-05-14 | 2008-04-23 | Tdk株式会社 | 薄膜磁気ヘッドおよびその製造方法、ヘッドジンバルアセンブリならびにハードディスク装置 |
| JP4051327B2 (ja) * | 2003-09-19 | 2008-02-20 | 新科實業有限公司 | 垂直磁気記録ヘッドおよびその製造方法、ならびに磁気記録装置 |
| US20050099727A1 (en) * | 2003-11-12 | 2005-05-12 | Headway Technologies, Inc. | Write-head having recessed magnetic material in gap region |
| JP2005166176A (ja) * | 2003-12-03 | 2005-06-23 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ディスク用磁気ヘッド |
| US7327532B2 (en) * | 2004-02-27 | 2008-02-05 | Headway Technologies, Inc. | Bottom pole structure with back-side steps |
| US8331058B2 (en) * | 2004-05-28 | 2012-12-11 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for providing a write head with an improved pole tip to improve overwrite and/or adjacent track interference |
| JP2005346786A (ja) | 2004-06-01 | 2005-12-15 | Tdk Corp | 薄膜磁気ヘッド、該薄膜磁気ヘッドを備えたヘッドジンバルアセンブリ、該ヘッドジンバルアセンブリを備えたヘッドアームアセンブリ、該ヘッドジンバルアセンブリを備えた磁気ディスク装置及び該薄膜磁気ヘッドの製造方法 |
| US7440229B2 (en) * | 2004-06-18 | 2008-10-21 | Headway Technologies, Inc. | Thin-film magnetic head having a write shield layer |
| US7580222B2 (en) * | 2004-06-18 | 2009-08-25 | Headway Technologies, Inc. | Thin-film magnetic head, a head gimbal assembly and hard disk drive |
| US7238292B1 (en) | 2004-07-30 | 2007-07-03 | Western Digital (Fremont), Inc. | Method of fabricating a write element with a reduced yoke length |
| US7522379B1 (en) * | 2004-07-30 | 2009-04-21 | Western Digital (Fremont), Llc | Write element with recessed pole and heat sink layer for ultra-high density writing |
| US7379269B1 (en) | 2004-07-30 | 2008-05-27 | Western Digital (Fremont), Llc | Write element with reduced yoke length for ultra-high density writing |
| JP2006120274A (ja) * | 2004-10-25 | 2006-05-11 | Hitachi Global Storage Technologies Netherlands Bv | 薄膜磁気ヘッド |
| US7764469B2 (en) * | 2004-10-29 | 2010-07-27 | Hitachi Global Storage Technologies Netherlands B.V. | Notched shield and pole structure with slanted wing for perpendicular recording |
| US7649711B2 (en) * | 2004-10-29 | 2010-01-19 | Hitachi Global Storage Technologies Netherlands B.V. | Double notched shield and pole structure for stray field reduction in a magnetic head |
| US7616403B2 (en) * | 2004-10-29 | 2009-11-10 | Hitachi Global Storage Technologies Netherlands B.V. | Winged design for reducing corner stray magnetic fields |
| JP2006236454A (ja) * | 2005-02-24 | 2006-09-07 | Fujitsu Ltd | 磁気ヘッドおよび磁気ヘッドの製造方法 |
| JP2007026578A (ja) * | 2005-07-20 | 2007-02-01 | Hitachi Global Storage Technologies Netherlands Bv | 薄膜磁気ヘッドおよび磁気ディスク装置 |
| US7551397B2 (en) * | 2005-09-02 | 2009-06-23 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic write head having a first magnetic pole with a self aligned stepped notch |
| US7612964B2 (en) * | 2005-09-15 | 2009-11-03 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic write head having a self aligned, steep shoulder pole structure and method of manufacture thereof |
| JP4504960B2 (ja) * | 2006-08-28 | 2010-07-14 | 株式会社日立製作所 | 熱アシスト磁気記録装置 |
| US8238057B2 (en) * | 2009-02-19 | 2012-08-07 | Tdk Corporation | Magnetic head, head assembly and magnetic recording/reproducing apparatus and method for manufacturing magnetic head |
| JP5808273B2 (ja) * | 2012-03-01 | 2015-11-10 | 株式会社日立製作所 | 磁気ヘッド、ヘッド駆動制御装置、磁気記憶装置、その制御方法 |
| US9704511B2 (en) * | 2014-11-12 | 2017-07-11 | Tdk Corporation | Perpendicular magnetic recording head with improved density recording |
| US9530443B1 (en) * | 2015-06-25 | 2016-12-27 | Western Digital (Fremont), Llc | Method for fabricating a magnetic recording device having a high aspect ratio structure |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6032353A (en) * | 1997-05-15 | 2000-03-07 | Read-Rite Corporation | Magnetic head with low stack height and self-aligned pole tips |
| US6201670B1 (en) * | 1997-06-16 | 2001-03-13 | International Business Machines Corporation | Merged magnetic head that includes a write head with single-sided notched first pole piece |
| JP3411194B2 (ja) * | 1997-07-29 | 2003-05-26 | アルプス電気株式会社 | 軟磁性膜及びこの軟磁性膜を用いたmr/インダクティブ複合型薄膜磁気ヘッド |
| JPH11232610A (ja) * | 1997-12-12 | 1999-08-27 | Tdk Corp | 薄膜磁気ヘッド |
| US6317289B1 (en) * | 1998-04-17 | 2001-11-13 | Tdk Corporation | Combination-type thin film magnetic head with improved writing properties |
| JP2000020916A (ja) * | 1998-07-01 | 2000-01-21 | Hitachi Ltd | 誘導型薄膜磁気ヘッド |
| JP3799168B2 (ja) * | 1998-08-20 | 2006-07-19 | 株式会社日立グローバルストレージテクノロジーズ | 磁気記録再生装置 |
| JP2000149219A (ja) * | 1998-11-12 | 2000-05-30 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP3909630B2 (ja) * | 1999-03-15 | 2007-04-25 | Tdk株式会社 | 薄膜磁気ヘッド及びその製造方法 |
| JP2000276707A (ja) | 1999-03-25 | 2000-10-06 | Hitachi Metals Ltd | 記録再生分離型磁気ヘッド |
| US6524491B1 (en) * | 1999-04-26 | 2003-02-25 | Headway Technologies, Inc. | Double plate-up process for fabrication of composite magnetoresistive shared poles |
| JP3859398B2 (ja) * | 1999-07-08 | 2006-12-20 | Tdk株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| JP2001028107A (ja) * | 1999-07-14 | 2001-01-30 | Tdk Corp | 薄膜磁気ヘッド、磁気ヘッド装置、磁気ディスク装置及び薄膜磁気ヘッドの製造方法 |
| JP2001034911A (ja) * | 1999-07-16 | 2001-02-09 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP2001067617A (ja) * | 1999-08-24 | 2001-03-16 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP2001167408A (ja) * | 1999-12-09 | 2001-06-22 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| US6687096B2 (en) * | 2000-06-21 | 2004-02-03 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
| JP2002015405A (ja) * | 2000-06-28 | 2002-01-18 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP2002015404A (ja) * | 2000-06-29 | 2002-01-18 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| US6563669B1 (en) * | 2000-09-13 | 2003-05-13 | Storage Technology Corporation | Inverted write head with high-precision track width definition |
| JP3362034B2 (ja) * | 2001-01-16 | 2003-01-07 | ティーディーケイ株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| US6870712B2 (en) * | 2001-06-05 | 2005-03-22 | Western Digital (Fremont), Inc. | Inductive writer with flat top pole and pedestal defined zero throat |
| US6572989B2 (en) * | 2001-06-06 | 2003-06-03 | International Business Machines Corporation | Thin film magnetic recording disk with a chromium-nickel pre-seed layer |
| US6826020B2 (en) * | 2001-08-20 | 2004-11-30 | Storage Technology Corporation | Merged-pole magnetic head having inverted write elements |
-
2001
- 2001-07-25 JP JP2001224601A patent/JP4191913B2/ja not_active Expired - Fee Related
- 2001-08-31 US US09/943,507 patent/US7142391B2/en not_active Expired - Fee Related
-
2004
- 2004-12-03 US US11/002,498 patent/US7142392B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7142392B2 (en) | 2006-11-28 |
| US7142391B2 (en) | 2006-11-28 |
| JP2003036506A (ja) | 2003-02-07 |
| US20050078412A1 (en) | 2005-04-14 |
| US20030021064A1 (en) | 2003-01-30 |
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