JP4152348B2 - 電子デバイス冷却装置、電子デバイスシステムおよび電子デバイス冷却方法 - Google Patents
電子デバイス冷却装置、電子デバイスシステムおよび電子デバイス冷却方法 Download PDFInfo
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/16—Constructional details or arrangements
- G06F1/20—Cooling means
- G06F1/206—Cooling means comprising thermal management
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/42—Circuits effecting compensation of thermal inertia; Circuits for predicting the stationary value of a temperature
- G01K7/425—Thermal management of integrated systems
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1917—Control of temperature characterised by the use of electric means using digital means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/467—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing gases, e.g. air
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
- H01L23/4735—Jet impingement
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20009—Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
- H05K7/20136—Forced ventilation, e.g. by fans
- H05K7/20172—Fan mounting or fan specifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20009—Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
- H05K7/20209—Thermal management, e.g. fan control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Thermal Sciences (AREA)
- Theoretical Computer Science (AREA)
- Automation & Control Theory (AREA)
- General Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Control Of Electric Motors In General (AREA)
Description
(数1)
h0=λf・Nu0/r0
と表される。ここで、Nu0は、噴流半径r0[m]における平均ヌセルト数であり、これは、
(数2)
Nu0=1.25・Pr0.45・Re0.45
と表される。Prはプラントル数とよばれる定数であり、Reはレイノルズ数である。Reは、以下の式で表される。
Re=u0・d0/ν
ここで、u0[m/s]は、噴流の体積流量を冷却ノズル噴出口の断面積で割った代表速度である。d0[m]は、噴出口の直径、ν[s/m2]は、流体の粘性を表す。
(数4)
Tt+Δt=f(Tt,E)
と表される。ここで、Ttは現在の温度、Eは当該Δt期間に生じる推定発熱量を示す。このように、当該Δt期間後の温度Tt+Δtを、現在の温度Ttと推定発熱量Eの関数として求める。当該Δt期間は、設計者により任意に設定可能である。
(数5)
E=∫[α・C・Vdd 2・f]dt
と表される。ここで、αは所定の比例定数、Cは負荷を容量で等価的に示した変数、Vddは電源電圧、fは動作周波数である。電源電圧Vddは2乗して用いる。これらを掛け合わせたものを上記Δtで積分した値が推定発熱量Eとなる。
第2実施形態は、図5に示した電子デバイス冷却装置100において、ノズルユニット102、ノズル制御部120および選択部140が搭載されない構成でもよい。以下、電動ファンによる一般的な冷却機構を想定して説明する。
(数6)
n=k・(Td−Tt)
と表される。
(数7)
n=k1・(Td−Tt)+k2・∫(Td−Tt)dt
と表される。ここで、k1は比例要素のフィードバックゲイン、k2は積分要素のフィードバックゲインを表す。
Claims (9)
- 電子デバイスの現在の温度と動作負荷の推定発熱量とを基に、所定期間後の温度を予測する予測部と、
予測された温度が所定の温度用閾値以上のとき、電子デバイスを冷却する冷却部を制御し、前記温度が前記温度用閾値未満のとき、前記予測部に定期的な温度予測を続けさせる制御部と、を備え、
前記制御部は、前記冷却部を制御する場合、予測された温度変化の速度が所定の速度用閾値以上のとき、冷却時間応答性の異なる複数の冷却部の中から、噴射型の冷却部を選択して動作させ、前記速度が前記速度用閾値未満のとき、ファンを選択して動作させることを特徴とする電子デバイス冷却装置。 - 請求項1に記載の装置において、前記制御部は、温度の上昇が予測されたとき、前記冷却部による温度制御の目標値を下げて冷却を行うことを特徴とする電子デバイス冷却装置。
- 請求項1に記載の装置において、前記制御部は、温度の下降が予測されたとき、前記冷却部による温度制御の目標値を上げて冷却を行うことを特徴とする電子デバイス冷却装置。
- 電子デバイスと、
前記電子デバイスを冷却する1以上の冷却部と、
前記電子デバイスの現在の温度と動作負荷の推定発熱量とを基に、所定期間後の温度を予測する予測部と、
予測された温度が所定の温度用閾値以上のとき、前記冷却部を制御し、前記温度が前記温度用閾値未満のとき、前記予測部に定期的な温度予測を続けさせる制御部と、を備え、
前記制御部は、前記冷却部を制御する場合、予測された温度変化の速度が所定の速度用閾値を超えたとき、冷却時間応答性の異なる複数の冷却部の中から、噴射型の冷却部を選択して動作させ、前記速度が前記速度用閾値以下のとき、ファンを選択して動作させることを特徴とする電子デバイスシステム。 - 電子デバイスの現在の温度と動作負荷の推定発熱量とを基に、所定期間後の温度を予測する予測ステップと、
予測された温度が所定の温度用閾値以上のとき、電子デバイスを冷却する冷却機構を制御し、前記温度が前記温度用閾値未満のとき、前記予測ステップによる定期的な温度予測を続けさせる制御ステップと、を備え、
前記制御ステップは、前記冷却機構を制御する場合、予測された温度変化の速度が所定の速度用閾値を超えたとき、冷却時間応答性の異なる複数の冷却機構の中から、噴射型の冷却機構を選択して動作させ、前記速度が前記速度用閾値以下のとき、ファンを選択して動作させることを特徴とする電子デバイス冷却方法。 - 請求項5に記載の方法において、温度の上昇が予測されたとき、前記冷却機構による温度制御の目標値を下げて冷却を行うことを特徴とする電子デバイス冷却方法。
- 請求項5に記載の方法において、温度の下降が予測されたとき、前記冷却機構による温度制御の目標値を上げて冷却を行うことを特徴とする電子デバイス冷却方法。
- 電子デバイスの現在の温度と動作負荷の推定発熱量とを基に、所定期間後の温度を予測する予測機能と、
予測された温度が所定の温度用閾値以上のとき、電子デバイスを冷却する冷却機構を制御し、前記温度が前記温度用閾値未満のとき、前記予測機能による定期的な温度予測を続けさせる制御機能と、をコンピュータに発揮させ、
前記制御機能は、前記冷却機構を制御する場合、予測された温度変化の速度が所定の速度用閾値以上のとき、冷却時間応答性の異なる複数の冷却機構の中から、噴射型の冷却機構を選択して動作させ、前記速度が前記速度用閾値未満のとき、ファンを選択して動作させることを特徴とする電子デバイス冷却プログラム。 - コンピュータにて読取可能な記録媒体であって、
電子デバイスの現在の温度と動作負荷の推定発熱量とを基に、所定期間後の温度を予測する予測機能と、
予測された温度が所定の温度用閾値以上のとき、電子デバイスを冷却する冷却機構を制御し、前記温度が前記温度用閾値未満のとき、前記予測機能による定期的な温度予測を続けさせる制御機能と、をコンピュータに発揮させ、
前記制御機能は、前記冷却機構を制御する場合、予測された温度変化の速度が所定の速度用閾値以上のとき、冷却時間応答性の異なる複数の冷却機構の中から、噴射型の冷却機構を選択して動作させ、前記速度が前記速度用閾値未満のとき、ファンを選択して動作させることを特徴とする電子デバイス冷却プログラムを格納した記録媒体。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2004166443A JP4152348B2 (ja) | 2004-06-03 | 2004-06-03 | 電子デバイス冷却装置、電子デバイスシステムおよび電子デバイス冷却方法 |
US11/140,491 US7167778B2 (en) | 2004-06-03 | 2005-05-27 | Electronic device cooling apparatus and method for cooling electronic device with temperature prediction |
EP05253376A EP1603380B1 (en) | 2004-06-03 | 2005-06-01 | Electronic device cooling apparatus, electronic device cooling system and method for cooling electronic device |
DE602005027147T DE602005027147D1 (de) | 2004-06-03 | 2005-06-01 | Gerät zur Kühlung einer elektronischer Anordnung, entsprechende System und Verfahren |
KR1020050047167A KR100755166B1 (ko) | 2004-06-03 | 2005-06-02 | 전자 디바이스의 온도를 예측해서 냉각하는 전자 디바이스 냉각장치, 냉각방법, 시스템 및 냉각 프로그램을 저장한 기록매체 |
CNB2005100878498A CN100433961C (zh) | 2004-06-03 | 2005-06-03 | 预测并冷却电子设备温度的电子设备冷却装置及方法 |
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JP2004166443A JP4152348B2 (ja) | 2004-06-03 | 2004-06-03 | 電子デバイス冷却装置、電子デバイスシステムおよび電子デバイス冷却方法 |
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JP4152348B2 true JP4152348B2 (ja) | 2008-09-17 |
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EP (1) | EP1603380B1 (ja) |
JP (1) | JP4152348B2 (ja) |
KR (1) | KR100755166B1 (ja) |
CN (1) | CN100433961C (ja) |
DE (1) | DE602005027147D1 (ja) |
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