JP4139569B2 - 電子線又はｘ線用ネガ型レジスト組成物 - Google Patents

電子線又はｘ線用ネガ型レジスト組成物 Download PDF

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Publication number
JP4139569B2
JP4139569B2 JP2001032454A JP2001032454A JP4139569B2 JP 4139569 B2 JP4139569 B2 JP 4139569B2 JP 2001032454 A JP2001032454 A JP 2001032454A JP 2001032454 A JP2001032454 A JP 2001032454A JP 4139569 B2 JP4139569 B2 JP 4139569B2
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Prior art keywords
group
acid
electron beam
substituted
resist composition
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Expired - Lifetime
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JP2001032454A
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Japanese (ja)
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JP2002236354A5 (https=
JP2002236354A (ja
Inventor
一良 水谷
豊 阿出川
一也 上西
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Fujifilm Corp
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Fujifilm Corp
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Priority to JP2001032454A priority Critical patent/JP4139569B2/ja
Priority to TW091101971A priority patent/TW552477B/zh
Priority to KR1020020007006A priority patent/KR100796584B1/ko
Publication of JP2002236354A publication Critical patent/JP2002236354A/ja
Publication of JP2002236354A5 publication Critical patent/JP2002236354A5/ja
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Publication of JP4139569B2 publication Critical patent/JP4139569B2/ja
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Expired - Lifetime legal-status Critical Current

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP2001032454A 2001-02-08 2001-02-08 電子線又はｘ線用ネガ型レジスト組成物 Expired - Lifetime JP4139569B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001032454A JP4139569B2 (ja) 2001-02-08 2001-02-08 電子線又はｘ線用ネガ型レジスト組成物
TW091101971A TW552477B (en) 2001-02-08 2002-02-05 Negative resist composition for electronic or X-ray
KR1020020007006A KR100796584B1 (ko) 2001-02-08 2002-02-07 전자선 또는 엑스선용 네거티브 레지스트 조성물

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001032454A JP4139569B2 (ja) 2001-02-08 2001-02-08 電子線又はｘ線用ネガ型レジスト組成物

Publications (3)

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JP2002236354A JP2002236354A (ja) 2002-08-23
JP2002236354A5 JP2002236354A5 (https=) 2006-01-19
JP4139569B2 true JP4139569B2 (ja) 2008-08-27

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JP2001032454A Expired - Lifetime JP4139569B2 (ja) 2001-02-08 2001-02-08 電子線又はｘ線用ネガ型レジスト組成物

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JP (1) JP4139569B2 (https=)

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Publication number Publication date
JP2002236354A (ja) 2002-08-23

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